ATE534141T1 - Antriebsvorrichtung für einen substrattransferroboter mit kühlmittelzirkulationsdurchgang - Google Patents

Antriebsvorrichtung für einen substrattransferroboter mit kühlmittelzirkulationsdurchgang

Info

Publication number
ATE534141T1
ATE534141T1 AT07706698T AT07706698T ATE534141T1 AT E534141 T1 ATE534141 T1 AT E534141T1 AT 07706698 T AT07706698 T AT 07706698T AT 07706698 T AT07706698 T AT 07706698T AT E534141 T1 ATE534141 T1 AT E534141T1
Authority
AT
Austria
Prior art keywords
atmospheric side
contact type
vacuum seal
stationary member
type vacuum
Prior art date
Application number
AT07706698T
Other languages
English (en)
Inventor
Makoto Tange
Original Assignee
Nabtesco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabtesco Corp filed Critical Nabtesco Corp
Application granted granted Critical
Publication of ATE534141T1 publication Critical patent/ATE534141T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • General Details Of Gearings (AREA)
AT07706698T 2006-01-13 2007-01-12 Antriebsvorrichtung für einen substrattransferroboter mit kühlmittelzirkulationsdurchgang ATE534141T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006005616 2006-01-13
PCT/JP2007/050356 WO2007080986A1 (ja) 2006-01-13 2007-01-12 冷却循環通路を備えた基板搬送用ロボットの駆動装置

Publications (1)

Publication Number Publication Date
ATE534141T1 true ATE534141T1 (de) 2011-12-15

Family

ID=38256390

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07706698T ATE534141T1 (de) 2006-01-13 2007-01-12 Antriebsvorrichtung für einen substrattransferroboter mit kühlmittelzirkulationsdurchgang

Country Status (8)

Country Link
US (1) US8156840B2 (de)
EP (1) EP1981078B1 (de)
JP (1) JP5096930B2 (de)
KR (1) KR101341241B1 (de)
CN (1) CN101375385B (de)
AT (1) ATE534141T1 (de)
TW (1) TW200801371A (de)
WO (1) WO2007080986A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5203009B2 (ja) * 2008-03-28 2013-06-05 ヤマハ発動機株式会社 多関節型ロボット
US8784033B2 (en) 2009-01-11 2014-07-22 Applied Materials, Inc. Robot systems, apparatus and methods for transporting substrates
JP5464892B2 (ja) * 2009-04-15 2014-04-09 Ｎｔｎ株式会社 遠隔操作型アクチュエータ
WO2011090905A2 (en) * 2010-01-22 2011-07-28 Applied Materials, Inc. Transfer robot with substrate cooling
JP5315266B2 (ja) * 2010-03-01 2013-10-16 住友重機械工業株式会社 ホロー出力軸と被駆動軸との連結構造、及び減速機
CN102233585A (zh) * 2010-04-29 2011-11-09 鸿富锦精密工业（深圳）有限公司 机器人臂部件
CN102338197B (zh) * 2010-07-20 2014-01-15 鸿富锦精密工业（深圳）有限公司 齿轮传动装置及具有该齿轮传动装置的机械手臂
JP5488494B2 (ja) * 2011-02-23 2014-05-14 株式会社安川電機 ロボットシステム
JP5727823B2 (ja) * 2011-03-15 2015-06-03 株式会社アルバック 回転駆動装置
JP5959221B2 (ja) 2011-11-16 2016-08-02 日本電産サンキョー株式会社 産業用ロボット
KR101901247B1 (ko) * 2011-12-07 2018-09-27 엘지디스플레이 주식회사 디스플레이 패널 이송용 로봇
JP5966532B2 (ja) * 2012-04-02 2016-08-10 セイコーエプソン株式会社 ロボット
KR102153608B1 (ko) * 2012-07-05 2020-09-08 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들
JP6296940B2 (ja) * 2014-08-11 2018-03-20 住友重機械工業株式会社 減速装置
JP6645062B2 (ja) * 2015-07-27 2020-02-12 セイコーエプソン株式会社 ロボット
JP2018017342A (ja) * 2016-07-28 2018-02-01 ナブテスコ株式会社 歯車装置
WO2020054426A1 (ja) * 2018-09-10 2020-03-19 川崎重工業株式会社 ロボット
CN110671419B (zh) * 2019-10-10 2020-09-04 江苏博人文化科技有限公司 一种游乐设施回转关节结构
KR102473569B1 (ko) 2020-01-15 2022-12-02 세메스 주식회사 기판 반송 장치 및 이를 구비하는 기판 처리 시스템
US12283508B2 (en) * 2020-04-07 2025-04-22 Kawasaki Jukogyo Kabushiki Kaisha In-vacuum twin-arm robot
KR102866277B1 (ko) * 2020-10-28 2025-10-01 나부테스코 가부시키가이샤 진공 시일 장치 및 구동 전달 장치
CN112728048B (zh) * 2021-01-05 2024-04-30 埃夫特智能装备股份有限公司 一种密封结构及机器人
CN112936335B (zh) * 2021-05-13 2021-09-14 上海捷勃特机器人有限公司 机器人关节结构及其组装方法
JP2023114384A (ja) * 2022-02-04 2023-08-17 川崎重工業株式会社 基板搬送ロボット
JP2023173068A (ja) * 2022-05-25 2023-12-07 ナブテスコ株式会社 回転導入機
JP2025522767A (ja) * 2022-07-01 2025-07-17 ラム リサーチ コーポレーション 真空適合シールと内部の冷却流路とを有するロボットアーム
CN118293188A (zh) * 2022-12-26 2024-07-05 美的集团股份有限公司 内啮合行星齿轮装置和机器人用关节装置
CN120516751B (zh) * 2025-07-28 2025-09-30 杭州伏特机器人科技有限公司 一种两级油冷转子关节模组

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521890A (en) * 1968-10-07 1970-07-28 Thiokol Chemical Corp Quick change lip seal cartridge device
JPH04253589A (ja) * 1991-01-30 1992-09-09 Fanuc Ltd レーザロボットの手首の配管装置
JPH06285780A (ja) 1993-04-06 1994-10-11 Kokusai Electric Co Ltd 搬送用ロボット
EP0696242B2 (de) * 1993-04-16 2004-10-13 Brooks Automation, Inc. Handhabungseinrichtung mit gelenkarm
JPH0780987A (ja) * 1993-09-17 1995-03-28 Houjiyou Giken Kogyo Kk アスファルトルーフィングの製造方法
DE69524424T2 (de) * 1994-08-23 2002-10-02 Sequa Corp., Hackensack Abstreifeinheit für stössel einer maschine zum erzeligen von düsenkörpern
US5676472A (en) * 1995-07-10 1997-10-14 Smart Machines Rotary labyrinth seal
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
JP3757016B2 (ja) * 1997-02-20 2006-03-22 ローツェ株式会社 ハンドリング用ロボット
JPH1138909A (ja) * 1997-07-18 1999-02-12 Toa Resin Kk 看 板
JP2002228010A (ja) * 2000-10-25 2002-08-14 Teijin Seiki Co Ltd 真空シール機構および真空シール装置
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
US6710336B2 (en) 2002-01-30 2004-03-23 Varian, Inc. Ion trap mass spectrometer using pre-calculated waveforms for ion isolation and collision induced dissociation
JP2004084920A (ja) 2002-07-03 2004-03-18 Ts Corporation 真空用歯車装置

Also Published As

Publication number Publication date
US8156840B2 (en) 2012-04-17
CN101375385A (zh) 2009-02-25
CN101375385B (zh) 2012-05-30
JPWO2007080986A1 (ja) 2009-06-11
JP5096930B2 (ja) 2012-12-12
EP1981078B1 (de) 2011-11-16
WO2007080986A1 (ja) 2007-07-19
US20090169343A1 (en) 2009-07-02
TWI372828B (de) 2012-09-21
EP1981078A4 (de) 2010-06-02
KR20080091445A (ko) 2008-10-13
TW200801371A (en) 2008-01-01
EP1981078A1 (de) 2008-10-15
KR101341241B1 (ko) 2013-12-12

Similar Documents

Publication Publication Date Title
TWI372828B (de)
TWI597141B (zh) Industrial robots
KR102267858B1 (ko) 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
US8337621B2 (en) Substrate processing apparatus
US10211363B2 (en) Transfer printing template and transfer printing device of micro light-emitting diode
TWI551411B (zh) Industrial robots
GB0715575D0 (en) Heat transfer apparatus
US20080279656A1 (en) Transfer apparatus
JP2009543282A (ja) 温室において配置される半導体ベース装置の冷却
EP2963105B1 (de) Kulturvorrichtung
CN107252980A (zh) 风冷激光打标装置
CN112095078B (zh) 一种用于面蒸发源的冷却缓存室及驱动方法
US20190280204A1 (en) Printing System Assemblies and Methods
EP2023416A3 (de) Kühlkörper und Halbleitervorrichtung mit dem Kühlkörper
KR20140127955A (ko) 냉각팬을 구비한 서셉터 제조장치
WO2023133243A3 (en) Peltier effect driven air cooler
JP2018157026A (ja) 基板処理装置
US9456471B2 (en) Heat treatment apparatus
KR101226251B1 (ko) 유기발광소자 밀봉장치 및 밀봉방법
CN116331632A (zh) 一种检验科用微生物临床标本双温度系统转运保存装置
CN203787394U (zh) 压力烘烤设备
MX2023011111A (es) Aparato de transferencia de calor de flujo cruzado.
TWI548107B (zh) 氣密組件、具有其之裝置及其測漏方法
CN116083691B (zh) 一种均匀速冷式热处理冷却台
CN119937667A (zh) 温控结构、测试机构及作业设备