ATE546881T1 - Mikrostrukturierter dünnfilmresonator - Google Patents

Mikrostrukturierter dünnfilmresonator

Info

Publication number
ATE546881T1
ATE546881T1 AT04078526T AT04078526T ATE546881T1 AT E546881 T1 ATE546881 T1 AT E546881T1 AT 04078526 T AT04078526 T AT 04078526T AT 04078526 T AT04078526 T AT 04078526T AT E546881 T1 ATE546881 T1 AT E546881T1
Authority
AT
Austria
Prior art keywords
bottom electrode
electrode
top electrode
thin film
film resonator
Prior art date
Application number
AT04078526T
Other languages
English (en)
Inventor
Hendrikus A C Tilmans
Wanling Pan
Original Assignee
Imec
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec filed Critical Imec
Application granted granted Critical
Publication of ATE546881T1 publication Critical patent/ATE546881T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/38—Multiple capacitors, e.g. ganged
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/022—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/027—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the microelectro-mechanical [MEMS] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/241—Bulk-mode MEMS resonators

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT04078526T 2003-12-24 2004-12-24 Mikrostrukturierter dünnfilmresonator ATE546881T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03447311A EP1548935A1 (de) 2003-12-24 2003-12-24 Mikrostrukturierter Dünnfilmresonator
US53332203P 2003-12-29 2003-12-29

Publications (1)

Publication Number Publication Date
ATE546881T1 true ATE546881T1 (de) 2012-03-15

Family

ID=34530891

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04078526T ATE546881T1 (de) 2003-12-24 2004-12-24 Mikrostrukturierter dünnfilmresonator

Country Status (2)

Country Link
EP (1) EP1548935A1 (de)
AT (1) ATE546881T1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7847649B2 (en) 2005-12-23 2010-12-07 Nxp B.V. MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
CN101523527B (zh) * 2006-10-12 2011-09-14 艾利森电话股份有限公司 电容装置及与其相关的方法
US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
US8030823B2 (en) 2009-01-26 2011-10-04 Resonance Semiconductor Corporation Protected resonator
EP2339748B1 (de) * 2009-09-28 2018-12-19 Nxp B.V. Resonator
CN112311353B (zh) * 2019-08-01 2024-08-06 芯知微(上海)电子科技有限公司 一种牢固安置型体声波谐振器及其制造方法
CN112787613B (zh) * 2019-11-11 2024-06-18 芯知微(上海)电子科技有限公司 一种薄膜压电声波谐振器及其制造方法
CN112994639B (zh) * 2019-12-16 2026-08-11 中芯集成电路（宁波）有限公司 一种薄膜压电声波谐振器及其制造方法及滤波器
CN111030634B (zh) * 2019-12-31 2021-04-16 诺思(天津)微系统有限责任公司 带电学隔离层的体声波谐振器及其制造方法、滤波器及电子设备
CN111146328A (zh) * 2019-12-31 2020-05-12 诺思(天津)微系统有限责任公司 单晶压电结构及具有其的电子设备
CN116996038B (zh) * 2022-04-25 2024-05-28 锐石创芯(重庆)科技有限公司 滤波器、多工器及射频前端模组
CN119448970A (zh) * 2024-12-13 2025-02-14 武汉敏声新技术有限公司 一种体声波谐振器及其制备方法、滤波器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU980252A1 (ru) * 1981-01-05 1982-12-07 Государственный Угличский Часовой Завод Им.50-Летия Ссср Пьезоэлектрический резонатор
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
US5339051A (en) * 1991-12-09 1994-08-16 Sandia Corporation Micro-machined resonator oscillator
JPH06350371A (ja) * 1993-06-10 1994-12-22 Matsushita Electric Ind Co Ltd 圧電デバイスの製造方法
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US6958566B2 (en) * 2001-08-16 2005-10-25 The Regents Of The University Of Michigan Mechanical resonator device having phenomena-dependent electrical stiffness
DE10153434C2 (de) * 2001-10-30 2003-12-18 Epcos Ag Magnetisch abstimmbares Filter
JP2003273698A (ja) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk 電子機器

Also Published As

Publication number Publication date
EP1548935A1 (de) 2005-06-29

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