ATE70369T1 - Verfahren zur herstellung eines kontaktes auf einem diamant. - Google Patents

Verfahren zur herstellung eines kontaktes auf einem diamant.

Info

Publication number
ATE70369T1
ATE70369T1 AT87305451T AT87305451T ATE70369T1 AT E70369 T1 ATE70369 T1 AT E70369T1 AT 87305451 T AT87305451 T AT 87305451T AT 87305451 T AT87305451 T AT 87305451T AT E70369 T1 ATE70369 T1 AT E70369T1
Authority
AT
Austria
Prior art keywords
diamond
conductive regions
detector
contacts
radiation
Prior art date
Application number
AT87305451T
Other languages
German (de)
English (en)
Inventor
Johan Frans Prins
Tom Leong Nam
Rex James Keddy
Original Assignee
De Beers Ind Diamond
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Ind Diamond filed Critical De Beers Ind Diamond
Application granted granted Critical
Publication of ATE70369T1 publication Critical patent/ATE70369T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/26—Measuring radiation intensity with resistance detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0111—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
    • H10D64/0114—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors to diamond, semiconducting diamond-like carbon or graphene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Light Receiving Elements (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT87305451T 1986-06-20 1987-06-19 Verfahren zur herstellung eines kontaktes auf einem diamant. ATE70369T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ZA864614 1986-06-20
EP87305451A EP0250252B1 (en) 1986-06-20 1987-06-19 Forming contacts on diamonds

Publications (1)

Publication Number Publication Date
ATE70369T1 true ATE70369T1 (de) 1991-12-15

Family

ID=25578457

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87305451T ATE70369T1 (de) 1986-06-20 1987-06-19 Verfahren zur herstellung eines kontaktes auf einem diamant.

Country Status (7)

Country Link
US (1) US4833328A (2)
EP (1) EP0250252B1 (2)
JP (1) JPS6345582A (2)
KR (1) KR950009929B1 (2)
AT (1) ATE70369T1 (2)
DE (1) DE3775121D1 (2)
ZA (1) ZA874362B (2)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL81537A (en) * 1986-02-24 1991-05-12 De Beers Ind Diamond Method and synthetic diamond detector for detection of nuclear radiation
CA1289683C (en) * 1987-10-27 1991-09-24 De Beers Industrial Diamond Division (Proprietary) Diamond radiation probe
DE68907196T2 (de) * 1988-12-28 1993-10-14 De Beers Ind Diamond Diamant-Szintillationsdetektor.
GB8902443D0 (en) * 1989-02-03 1989-03-22 Jones Barbara L Radiation detector
CA2021020A1 (en) * 1989-07-13 1991-01-14 Johan Frans Prins Diamond diode structure
US5079425A (en) * 1990-01-10 1992-01-07 Sumitomo Electric Industries, Ltd. Radiation detecting element
JP2836790B2 (ja) * 1991-01-08 1998-12-14 株式会社神戸製鋼所 ダイヤモンド薄膜へのオーミック電極形成方法
US5334306A (en) * 1991-12-11 1994-08-02 At&T Bell Laboratories Metallized paths on diamond surfaces
US5444251A (en) * 1993-03-02 1995-08-22 Nam; Tom L. Diamond radiation detector element
CA2127832C (en) * 1993-07-20 2001-02-20 Grant Lu Cvd diamond radiation detector
ZA946002B (en) * 1993-08-12 1995-03-14 De Beers Ind Diamond Detecting ionising radiation
IL124592A (en) 1997-05-23 2002-07-25 Gersan Ets Method of marking a gemstone or diamond
GB9710738D0 (en) * 1997-05-23 1997-07-16 Gersan Ets Diamond marking
JP6634646B2 (ja) * 2015-09-14 2020-01-22 学校法人早稲田大学 グラファイト積層ダイヤモンド基板及びその製造方法、並びに半導体装置及びその製造方法
EP4001970A1 (en) * 2020-11-24 2022-05-25 Commissariat à l'Energie Atomique et aux Energies Alternatives Radiation detector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3383567A (en) * 1965-09-15 1968-05-14 Ion Physics Corp Solid state translating device comprising irradiation implanted conductivity ions
US3665193A (en) * 1967-03-29 1972-05-23 Fizichesky I Im P N Lebedeva L Diamond nuclear radiation detector
US3824680A (en) * 1968-03-28 1974-07-23 Levina Fizichesky I I Lebedeva Nuclear radiation detector and method of manufacturing same
US4609520A (en) * 1984-01-30 1986-09-02 The United States Of America As Represented By The Secretary Of The Army Protection of radiation detectors from fast neutron damage

Also Published As

Publication number Publication date
US4833328A (en) 1989-05-23
JPS6345582A (ja) 1988-02-26
KR880000800A (ko) 1988-03-29
DE3775121D1 (de) 1992-01-23
JPH0531951B2 (2) 1993-05-13
EP0250252A1 (en) 1987-12-23
KR950009929B1 (en) 1995-09-01
ZA874362B (en) 1988-02-24
EP0250252B1 (en) 1991-12-11

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee