ATE86364T1 - Zweistufige trockenprimaerpumpe. - Google Patents

Zweistufige trockenprimaerpumpe.

Info

Publication number
ATE86364T1
ATE86364T1 AT90110602T AT90110602T ATE86364T1 AT E86364 T1 ATE86364 T1 AT E86364T1 AT 90110602 T AT90110602 T AT 90110602T AT 90110602 T AT90110602 T AT 90110602T AT E86364 T1 ATE86364 T1 AT E86364T1
Authority
AT
Austria
Prior art keywords
pump
primary pump
stage dry
dry primary
pressure side
Prior art date
Application number
AT90110602T
Other languages
English (en)
Inventor
Jean-Marie Crinquette
Jacques Long
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE86364T1 publication Critical patent/ATE86364T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Details Of Reciprocating Pumps (AREA)
AT90110602T 1989-06-05 1990-06-05 Zweistufige trockenprimaerpumpe. ATE86364T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8907392A FR2647853A1 (fr) 1989-06-05 1989-06-05 Pompe primaire seche a deux etages
EP90110602A EP0401741B1 (de) 1989-06-05 1990-06-05 Zweistufige Trockenprimärpumpe

Publications (1)

Publication Number Publication Date
ATE86364T1 true ATE86364T1 (de) 1993-03-15

Family

ID=9382363

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90110602T ATE86364T1 (de) 1989-06-05 1990-06-05 Zweistufige trockenprimaerpumpe.

Country Status (8)

Country Link
US (1) US5040949A (de)
EP (1) EP0401741B1 (de)
JP (1) JPH0333492A (de)
AT (1) ATE86364T1 (de)
DE (1) DE69000990T2 (de)
ES (1) ES2039997T3 (de)
FR (1) FR2647853A1 (de)
RU (1) RU1771514C (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545827Y2 (de) * 1988-06-24 1993-11-26
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US5888053A (en) * 1995-02-10 1999-03-30 Ebara Corporation Pump having first and second outer casing members
DE69623516T2 (de) * 1995-02-28 2003-05-15 Anest Iwata Corp., Tokio/Tokyo Kontrollsystem für zweistufige Vakuumpumpe
EP0798463A3 (de) * 1996-03-29 1998-02-25 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
GB9717400D0 (en) 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
ES2219956T3 (es) * 1999-07-19 2004-12-01 Sterling Fluid Systems (Germany) Gmbh Maquina volumetrica para medios comprimibles.
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE20110360U1 (de) * 2001-06-22 2002-10-31 GHH-RAND Schraubenkompressoren GmbH, 46145 Oberhausen Zweistufiger Schraubenkompressor
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US6589023B2 (en) 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
ITMI20020263A1 (it) * 2002-02-12 2003-08-12 Alfatech Srl Pompa per il trasporto di masse fuse di polimeri ed elastomeri
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
GB0223769D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc A pump
NL1024480C2 (nl) 2003-10-08 2005-04-11 Draka Fibre Technology Bv Werkwijze ter vervaardiging van een voorvorm voor optische vezels, alsmede werkwijze ter vervaardiging van optische vezels.
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
EP2310684B1 (de) * 2008-07-22 2018-11-07 Leybold GmbH Vakuumpumpe, insbesondere wälzkolbenpumpe
DE102010019402A1 (de) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Schrauben-Vakuumpumpe
US11215180B2 (en) 2012-06-28 2022-01-04 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
US20150078927A1 (en) * 2013-09-13 2015-03-19 Agilent Technologies, Inc. Multi-Stage Pump Having Reverse Bypass Circuit
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
EP3198148B1 (de) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Vakuumerzeugendes pumpsystem und pumpverfahren mit diesem pumpsystem
BR112017006572B1 (pt) * 2014-10-02 2022-08-23 Ateliers Busch S.A. Sistema de bombeamento para a geração de vácuo e método de bombeamento
DE102016100957A1 (de) * 2016-01-20 2017-07-20 FRISTAM Pumpen Schaumburg GmbH Verdrängerpumpe
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
IT201800009944A1 (it) 2018-10-31 2020-05-01 Nova Rotors Srl "pompa volumetrica"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve
EP4103841B1 (de) 2020-02-12 2025-03-19 Nova Rotors Srl Verdrängerpumpe
CN111520321B (zh) * 2020-05-15 2022-09-13 大连宏亚泵业有限公司 一种机械密封化工泵及其使用方法
GB2606224B (en) 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2903248A (en) * 1956-12-10 1959-09-08 Leander H Walker System of mixing liquiform ingredients
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
GB1517156A (en) * 1974-06-21 1978-07-12 Svenska Rotor Maskiner Ab Screw compressor including means for varying the capacity thereof
JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
US4781553A (en) * 1987-07-24 1988-11-01 Kabushiki Kaisha Kobe Seiko Sho Screw vacuum pump with lubricated bearings and a plurality of shaft sealing means

Also Published As

Publication number Publication date
US5040949A (en) 1991-08-20
DE69000990D1 (de) 1993-04-08
DE69000990T2 (de) 1993-06-09
EP0401741A1 (de) 1990-12-12
JPH0333492A (ja) 1991-02-13
RU1771514C (ru) 1992-10-23
EP0401741B1 (de) 1993-03-03
FR2647853A1 (fr) 1990-12-07
ES2039997T3 (es) 1993-10-01

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties