EP0401741A1 - Zweistufige Trockenprimärpumpe - Google Patents

Zweistufige Trockenprimärpumpe Download PDF

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Publication number
EP0401741A1
EP0401741A1 EP90110602A EP90110602A EP0401741A1 EP 0401741 A1 EP0401741 A1 EP 0401741A1 EP 90110602 A EP90110602 A EP 90110602A EP 90110602 A EP90110602 A EP 90110602A EP 0401741 A1 EP0401741 A1 EP 0401741A1
Authority
EP
European Patent Office
Prior art keywords
pump
screw
drive
stage
screw pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90110602A
Other languages
English (en)
French (fr)
Other versions
EP0401741B1 (de
Inventor
Jean-Marie Crinquette
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Priority to AT90110602T priority Critical patent/ATE86364T1/de
Publication of EP0401741A1 publication Critical patent/EP0401741A1/de
Application granted granted Critical
Publication of EP0401741B1 publication Critical patent/EP0401741B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the present invention relates to a two-stage dry primary pump.
  • a dry vane pump avoids, compared to an oil lubricated vane pump, the migration of oil vapor in the enclosure to be pumped, but the main drawback lies in the existence of a high dry friction causing rapid wear and accelerated degradation of pump performance.
  • dry primary screw pumps consisting of a single stage. These pumps are capable, under steady conditions, of sucking a fluid from a limit pressure of the order of 10 ⁇ 2 mbar to atmospheric pressure. Their advantage is the absence of contact between the screws, therefore absence of friction, which makes them very reliable. But in the pump area where the pressure is higher than 10 mbar, they absorb a high power which is mainly dissipated in heat. The part of the screws working in this zone at high pressures (greater than 10 mbar) is then subjected to a significant heating which causes strong asymmetric expansions and incompatible with internal clearances. Increasing the clearance between the two screws would not constitute a satisfactory solution because, under these conditions, the performance would no longer be ensured, in particular the suction flow and the limit pressure.
  • the present invention aims to provide a solution to this problem, therefore to obtain a dry primary pump capable of sucking, in steady state, a fluid from a limit pressure of the order of 10 ⁇ 2 mbar, or even lower. , up to atmospheric pressure, and with a wide range of aspirated flow rates, from 50 m3 / h to several thousand m3 / h.
  • the invention consists in limiting the discharge pressure of the screw pump, in order to limit its heating, and in adding a second stage constituted by a viscous and / or turbulent drive pump, making it possible to transfer the energy to the second stage. of compression degraded in heat.
  • the screw pump no longer has a screw part working at high pressures and undergoing large expansions.
  • the average free path of the molecules is relatively high, and this pump can then operate with greater internal clearances.
  • the present invention thus relates to a two-stage dry primary pump, characterized in that it comprises, in a single common stator, on the low pressure side, a screw pump, and, on the high pressure side, a drive pump, a conduit. connection ensuring communication between the screw pump and the drive pump.
  • the connecting duct is in communication with the suction side of the screw pump, therefore the suction side of the primary pump, by means of a by-pass provided with a relief valve.
  • the connecting duct is in communication with the discharge side of the drive pump, therefore the discharge side of the primary pump, by means of a bypass provided with a relief valve.
  • the primary pump comprises these two embodiments.
  • the speed of rotation of each stage may be different.
  • a single motor can run the screw pump and the drive pump simultaneously, or two motors can independently drive the screw pump and the drive pump. The latter solution makes it possible in particular to independently vary the rotation speeds, therefore the pumping speeds, in applications where pressure regulation is necessary.
  • the motor or motors can be conventional motors or vacuum rotors.
  • the primary pump comprises a frame 1 constituting a stator, a suction inlet 4, a discharge outlet 5, a low pressure stage constituted by a dry screw pump 10, and a high pressure stage constituted by a drive pump 20.
  • the frame 1 may include cooling channels 2, which allow, by circulation of a liquid (water, oil, ...) to ensure thermal stabilization of the assembly. The heat exchange with the ambient environment takes place by natural or forced convection.
  • the pump 10 comprises two conjugated screws 11, 12, mounted respectively on two shafts 13, 14 and synchronized in drive by two pinions 41, 44, the pinion 41 being driven by an electric motor 50.
  • the two pinions 41, 44 are installed in an oil box 3 secured to the chassis 1 and sealed against the suction inlet 4 by two seals 48, 49.
  • the two shafts 13, 14 rotate in two bearings respectively 42, 43 and 45, 46.
  • L 'shaft 13 rotates in another bearing 47 located at the other end, at the connection conduit.
  • the pump 20 is a viscous and / or turbulent drive pump, that is to say a pump in which the pumping effect is obtained by friction from a rotor / stator assembly 21 comprising one or more helical grooves variable pitch, whose profile varies between suction and discharge, and rotating at high speed.
  • the pump 20 shown is cylindrical but, of course, it can be in the form of a disc or a cone for example.
  • the shaft 22 of the pump 20 is mechanically linked to the shaft 14 of the screw 12, so that the motor 50 alone drives the pumps 10 and 20.
  • the shaft 22 rotates in a level 23.
  • the primary pump comprises two by-passes 60, 70 each equipped with a relief valve 61, 71 to ensure the distribution of the flow in the transient phases.
  • the bypass 60 allows the excess gas pumped by the low pressure stage to be recirculated to the suction side 4, and the bypass 70 allows recirculation of excess gas to the discharge side 5.
  • valves 61 and 71 can be controlled or automatic, and close under the action of a spring 62, 72 (as shown) or close under the effect of their own weight. But they are, in all cases, closed when there is compatibility between the flow discharged by the low pressure stage and the flow sucked by the high pressure stage.
  • the pump 20 is driven separately by an electric motor 80, and, in this case, the shaft 22 of this pump 20 is no longer linked to the shaft 14 of the screw 12, but to the electric motor 80.
  • FIG. 2 makes it possible to have a speed of rotation of the pump 20 different from that of the screw pump 10.
  • the speed of rotation of the pump 20 can then be easily adapted to the flow rate and to the discharge pressure of the pump 10.
  • the volume flow treated is low, as a consequence of the high compression rate obtained in the first stage.
  • the overpressure created on the discharge of the low-pressure stage causes the valves 61, 71 to open.
  • valve 71 closes, the valve 61 remaining open.
  • valve 61 closes and the primary pump operates in steady state.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Details Of Reciprocating Pumps (AREA)
EP90110602A 1989-06-05 1990-06-05 Zweistufige Trockenprimärpumpe Expired - Lifetime EP0401741B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90110602T ATE86364T1 (de) 1989-06-05 1990-06-05 Zweistufige trockenprimaerpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8907392 1989-06-05
FR8907392A FR2647853A1 (fr) 1989-06-05 1989-06-05 Pompe primaire seche a deux etages

Publications (2)

Publication Number Publication Date
EP0401741A1 true EP0401741A1 (de) 1990-12-12
EP0401741B1 EP0401741B1 (de) 1993-03-03

Family

ID=9382363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90110602A Expired - Lifetime EP0401741B1 (de) 1989-06-05 1990-06-05 Zweistufige Trockenprimärpumpe

Country Status (8)

Country Link
US (1) US5040949A (de)
EP (1) EP0401741B1 (de)
JP (1) JPH0333492A (de)
AT (1) ATE86364T1 (de)
DE (1) DE69000990T2 (de)
ES (1) ES2039997T3 (de)
FR (1) FR2647853A1 (de)
RU (1) RU1771514C (de)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US5445502A (en) * 1992-01-23 1995-08-29 Matsushita Electric Industrial Co., Ltd. Vacuum pump having parallel kinetic pump inlet section
EP0730093A1 (de) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Kontrollsystem für zweistufige Vakuumpumpe
EP0798463A3 (de) * 1996-03-29 1998-02-25 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
EP0857876A3 (de) * 1997-02-05 1999-07-07 Pfeiffer Vacuum GmbH Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
EP0898083A3 (de) * 1997-08-15 1999-07-07 The BOC Group plc Vakuum-Pumpsystem
WO2005033028A1 (en) 2003-10-08 2005-04-14 Draka Fibre Technology B.V. Method for manufacturing optical fibres and their preforms
WO2014001090A1 (de) * 2012-06-28 2014-01-03 Sterling Industry Consult Gmbh Verfahren und pumpenanordnung zum evakuieren einer kammer
CN103867436A (zh) * 2008-07-22 2014-06-18 厄利孔莱博尔德真空技术有限责任公司 真空泵、特别是罗茨泵
AU2014407987B2 (en) * 2014-10-02 2019-10-31 Ateliers Busch Sa Pumping system for generating a vacuum and method for pumping by means of this pumping system
EP3198148B1 (de) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Vakuumerzeugendes pumpsystem und pumpverfahren mit diesem pumpsystem
IT201800009944A1 (it) 2018-10-31 2020-05-01 Nova Rotors Srl "pompa volumetrica"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0545827Y2 (de) * 1988-06-24 1993-11-26
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
US5888053A (en) * 1995-02-10 1999-03-30 Ebara Corporation Pump having first and second outer casing members
ES2219956T3 (es) * 1999-07-19 2004-12-01 Sterling Fluid Systems (Germany) Gmbh Maquina volumetrica para medios comprimibles.
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE20110360U1 (de) * 2001-06-22 2002-10-31 GHH-RAND Schraubenkompressoren GmbH, 46145 Oberhausen Zweistufiger Schraubenkompressor
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US6589023B2 (en) 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
ITMI20020263A1 (it) * 2002-02-12 2003-08-12 Alfatech Srl Pompa per il trasporto di masse fuse di polimeri ed elastomeri
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
GB0223769D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc A pump
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
DE102010019402A1 (de) * 2010-05-04 2011-11-10 Oerlikon Leybold Vacuum Gmbh Schrauben-Vakuumpumpe
US20150078927A1 (en) * 2013-09-13 2015-03-19 Agilent Technologies, Inc. Multi-Stage Pump Having Reverse Bypass Circuit
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
DE102016100957A1 (de) * 2016-01-20 2017-07-20 FRISTAM Pumpen Schaumburg GmbH Verdrängerpumpe
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
EP4103841B1 (de) 2020-02-12 2025-03-19 Nova Rotors Srl Verdrängerpumpe
CN111520321B (zh) * 2020-05-15 2022-09-13 大连宏亚泵业有限公司 一种机械密封化工泵及其使用方法
GB2606224B (en) 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2903248A (en) * 1956-12-10 1959-09-08 Leander H Walker System of mixing liquiform ingredients
GB1517156A (en) * 1974-06-21 1978-07-12 Svenska Rotor Maskiner Ab Screw compressor including means for varying the capacity thereof
US4781553A (en) * 1987-07-24 1988-11-01 Kabushiki Kaisha Kobe Seiko Sho Screw vacuum pump with lubricated bearings and a plurality of shaft sealing means

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445502A (en) * 1992-01-23 1995-08-29 Matsushita Electric Industrial Co., Ltd. Vacuum pump having parallel kinetic pump inlet section
US5564907A (en) * 1992-09-03 1996-10-15 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
US5709537A (en) * 1992-09-03 1998-01-20 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US5951266A (en) * 1992-09-03 1999-09-14 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus having interengaging rotors with threads having a decreasing pitch at the exhaust side
US5961297A (en) * 1995-02-28 1999-10-05 Iwata Air Compressor Mfg. Co., Ltd. Oil-free two stage scroll vacuum pump and method for controlling the same pump
EP0730093A1 (de) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Kontrollsystem für zweistufige Vakuumpumpe
EP1101943A3 (de) * 1995-02-28 2001-07-25 Anest Iwata Corporation Kontrollsystem für zweistufige Vakuumpumpe
EP0798463A3 (de) * 1996-03-29 1998-02-25 Anest Iwata Corporation Ölfreie Spiralvakuumpumpe
US6030181A (en) * 1997-02-05 2000-02-29 Pfeiffer Vacuum Gmbh Vacuum apparatus and a method of controlling a suction speed thereof
EP0857876A3 (de) * 1997-02-05 1999-07-07 Pfeiffer Vacuum GmbH Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
EP0898083A3 (de) * 1997-08-15 1999-07-07 The BOC Group plc Vakuum-Pumpsystem
WO2005033028A1 (en) 2003-10-08 2005-04-14 Draka Fibre Technology B.V. Method for manufacturing optical fibres and their preforms
CN103867436A (zh) * 2008-07-22 2014-06-18 厄利孔莱博尔德真空技术有限责任公司 真空泵、特别是罗茨泵
WO2014001090A1 (de) * 2012-06-28 2014-01-03 Sterling Industry Consult Gmbh Verfahren und pumpenanordnung zum evakuieren einer kammer
EP3198148B1 (de) * 2014-09-26 2020-02-26 Ateliers Busch S.A. Vakuumerzeugendes pumpsystem und pumpverfahren mit diesem pumpsystem
AU2014407987B2 (en) * 2014-10-02 2019-10-31 Ateliers Busch Sa Pumping system for generating a vacuum and method for pumping by means of this pumping system
EP3201469B1 (de) * 2014-10-02 2020-03-25 Ateliers Busch S.A. Pumpsystem zur vakuumerzeugung und verfahren zum pumpen mit diesem pumpsystem
IT201800009944A1 (it) 2018-10-31 2020-05-01 Nova Rotors Srl "pompa volumetrica"
GB2583949A (en) * 2019-05-15 2020-11-18 Edwards Ltd A vacuum pump comprising a relief valve and a method of assembly of the relief valve
US12031542B2 (en) 2019-05-15 2024-07-09 Edwards Limited Vacuum pump comprising a relief valve and a method of assembly of the relief valve

Also Published As

Publication number Publication date
US5040949A (en) 1991-08-20
DE69000990D1 (de) 1993-04-08
DE69000990T2 (de) 1993-06-09
JPH0333492A (ja) 1991-02-13
ATE86364T1 (de) 1993-03-15
RU1771514C (ru) 1992-10-23
EP0401741B1 (de) 1993-03-03
FR2647853A1 (fr) 1990-12-07
ES2039997T3 (es) 1993-10-01

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