BE842810A - Procede de nettoyage de disques semi-conducteurs polis - Google Patents
Procede de nettoyage de disques semi-conducteurs polisInfo
- Publication number
- BE842810A BE842810A BE167808A BE167808A BE842810A BE 842810 A BE842810 A BE 842810A BE 167808 A BE167808 A BE 167808A BE 167808 A BE167808 A BE 167808A BE 842810 A BE842810 A BE 842810A
- Authority
- BE
- Belgium
- Prior art keywords
- polished semiconductor
- semiconductor discs
- cleaning polished
- cleaning
- discs
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2526052A DE2526052C2 (de) | 1975-06-11 | 1975-06-11 | Verfahren zum Reinigen polierter Halbleiterscheiben |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE842810A true BE842810A (fr) | 1976-12-10 |
Family
ID=5948838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE167808A BE842810A (fr) | 1975-06-11 | 1976-06-10 | Procede de nettoyage de disques semi-conducteurs polis |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS51150972A (fr) |
| BE (1) | BE842810A (fr) |
| DE (1) | DE2526052C2 (fr) |
| DK (1) | DK144776A (fr) |
| GB (1) | GB1553695A (fr) |
| IT (1) | IT1061334B (fr) |
| NL (1) | NL7603267A (fr) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4129457A (en) * | 1977-05-23 | 1978-12-12 | International Business Machines Corporation | Post-polishing cleaning of semiconductor surfaces |
| JPS6040705B2 (ja) * | 1978-06-26 | 1985-09-12 | インタ−ナシヨナル・ビジネス・マシ−ンンズ・コ−ポレ−シヨン | 電子回路の保護被覆形成方法 |
| DE3328639A1 (de) * | 1983-08-09 | 1985-02-21 | Merck Patent Gmbh, 6100 Darmstadt | Reinigungsmittel fuer mechanisch bearbeitete halbleitermaterialien |
| JPS60126838A (ja) * | 1983-12-13 | 1985-07-06 | Mitsubishi Monsanto Chem Co | ひ化ガリウム単結晶ウエハの洗滌液および洗滌方法 |
| DE3834396A1 (de) * | 1988-10-10 | 1990-04-12 | Telefunken Electronic Gmbh | Verfahren zum entfernen von oberflaechenschichten |
| DE4103084A1 (de) * | 1991-02-01 | 1992-08-13 | Wacker Chemitronic | Magazin zur halterung von scheibenfoermigen werkstuecken, insbesondere halbleiterscheiben, bei der nasschemischen oberflaechenbehandlung in fluessigkeitsbaedern |
| US5320706A (en) * | 1991-10-15 | 1994-06-14 | Texas Instruments Incorporated | Removing slurry residue from semiconductor wafer planarization |
| US5911889A (en) * | 1995-05-11 | 1999-06-15 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Aktiengesellschaft | Method of removing damaged crystal regions from silicon wafers |
| US6074935A (en) * | 1997-06-25 | 2000-06-13 | Siemens Aktiengesellschaft | Method of reducing the formation of watermarks on semiconductor wafers |
| RU2219002C1 (ru) * | 2002-04-08 | 2003-12-20 | Панчеха Юрий Степанович | Способ очистки изделий |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3342652A (en) * | 1964-04-02 | 1967-09-19 | Ibm | Chemical polishing of a semi-conductor substrate |
-
1975
- 1975-06-11 DE DE2526052A patent/DE2526052C2/de not_active Expired
-
1976
- 1976-03-29 NL NL7603267A patent/NL7603267A/xx not_active Application Discontinuation
- 1976-03-30 DK DK144776A patent/DK144776A/da not_active Application Discontinuation
- 1976-04-01 JP JP51035225A patent/JPS51150972A/ja active Granted
- 1976-06-09 IT IT49850/76A patent/IT1061334B/it active
- 1976-06-10 BE BE167808A patent/BE842810A/fr not_active IP Right Cessation
- 1976-06-10 GB GB24059/76A patent/GB1553695A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DK144776A (da) | 1976-12-12 |
| DE2526052C2 (de) | 1983-04-21 |
| NL7603267A (nl) | 1976-12-14 |
| IT1061334B (it) | 1983-02-28 |
| JPS5338592B2 (fr) | 1978-10-16 |
| DE2526052A1 (de) | 1976-12-30 |
| GB1553695A (en) | 1979-09-26 |
| JPS51150972A (en) | 1976-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| BE837140A (fr) | Procede de polissage chimique-mecanique de semi-conducteurs | |
| HK10282A (en) | Process for cleaning silicon semiconductor materials | |
| FR2333761A1 (fr) | Procede de fabrication de materiau abrasif | |
| IT960386B (it) | Apparecchio per la lucidatura auto matica di superfici | |
| SE419045B (sv) | Rengoringsanordning for maskinelement | |
| BE842810A (fr) | Procede de nettoyage de disques semi-conducteurs polis | |
| BE844064A (fr) | Procede de superfinition des surfaces de semi-conducteurs | |
| FR2305275A2 (fr) | Machine pour le polissage des meules | |
| IT1064578B (it) | Apparato di risciacquo per macchine lavatrici | |
| CH505466A (de) | Verfahren zum Polieren von Halbleiteroberflächen | |
| NL7703307A (nl) | Werkwijze ter bereiding van gemarmerde stuk- vormige reinigingsmiddelen. | |
| DK145328C (da) | Kemisk-mekanisk rensningsapparat for mindre afloebsanlaeg | |
| SE418697B (sv) | Anordning for rengoring av linor | |
| NL7704704A (nl) | Werkwijze ter bereiding van schurende reinigingsmiddelen. | |
| IT975718B (it) | Disco per macchina pulitrice | |
| BR7606022A (pt) | Maquina polidora de graos | |
| FR2333416A7 (fr) | Cureur de fosses et procede de curage des fosses | |
| IT1074983B (it) | Apparecchio per rettificare mole | |
| IT8068723A0 (it) | Apparecchio per la lucidatura dei pezzi mediante barilatura | |
| CH540039A (de) | Vorrichtung zum Reinigen von Schuhwerk | |
| SE423379B (sv) | Forfarande for rening av fagelfjedrar | |
| BE791884A (fr) | Procede de meulage | |
| BE816482A (fr) | Procede de nettoyage de surfaces | |
| AT330005B (de) | Kontaktscheibe fur bandschleifmaschinen | |
| SE420260B (sv) | Diskamaskin for rengoring av ringformiga foremal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RE | Patent lapsed |
Owner name: WACKER-CHEMITRONIC GESELLSCHAFT FUR ELEKTRONIK-GR Effective date: 19840610 |