BE857362A - Procede et dispositif de fabrication de circuits integres - Google Patents
Procede et dispositif de fabrication de circuits integresInfo
- Publication number
- BE857362A BE857362A BE179810A BE179810A BE857362A BE 857362 A BE857362 A BE 857362A BE 179810 A BE179810 A BE 179810A BE 179810 A BE179810 A BE 179810A BE 857362 A BE857362 A BE 857362A
- Authority
- BE
- Belgium
- Prior art keywords
- integrated circuits
- manufacturing integrated
- manufacturing
- circuits
- integrated
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
- H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
- H10P76/2047—X-ray beam lithography processes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US72794976A | 1976-09-29 | 1976-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE857362A true BE857362A (fr) | 1977-12-01 |
Family
ID=24924778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE179810A BE857362A (fr) | 1976-09-29 | 1977-08-01 | Procede et dispositif de fabrication de circuits integres |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5342679A (fr) |
| BE (1) | BE857362A (fr) |
| DE (1) | DE2740366A1 (fr) |
| FR (1) | FR2366694A1 (fr) |
| GB (1) | GB1522568A (fr) |
| IT (1) | IT1089816B (fr) |
| NL (1) | NL7707485A (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1224839A (fr) * | 1983-06-06 | 1987-07-28 | Barukh Yaakobi | Lithographie a rayons x |
| JPS629632A (ja) * | 1985-07-06 | 1987-01-17 | Agency Of Ind Science & Technol | 投影露光装置 |
| JPS62208631A (ja) * | 1986-03-07 | 1987-09-12 | Sanyo Electric Co Ltd | 縮小型ｘ線リソグラフイ装置 |
| JP2603225B2 (ja) * | 1986-07-11 | 1997-04-23 | キヤノン株式会社 | Ｘ線投影露光装置及び半導体製造方法 |
| JP2628165B2 (ja) * | 1987-06-15 | 1997-07-09 | キヤノン株式会社 | Ｘ線露光装置 |
| JPH07147230A (ja) * | 1994-08-04 | 1995-06-06 | Canon Inc | 縮小投影露光装置および半導体製造方法 |
-
1977
- 1977-06-30 GB GB27379/77A patent/GB1522568A/en not_active Expired
- 1977-07-06 NL NL7707485A patent/NL7707485A/xx not_active Application Discontinuation
- 1977-08-01 BE BE179810A patent/BE857362A/fr unknown
- 1977-08-05 FR FR7724267A patent/FR2366694A1/fr not_active Withdrawn
- 1977-09-08 DE DE19772740366 patent/DE2740366A1/de active Pending
- 1977-09-15 IT IT51022/77A patent/IT1089816B/it active
- 1977-09-29 JP JP11618777A patent/JPS5342679A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5342679A (en) | 1978-04-18 |
| GB1522568A (en) | 1978-08-23 |
| NL7707485A (nl) | 1978-03-31 |
| DE2740366A1 (de) | 1978-03-30 |
| FR2366694A1 (fr) | 1978-04-28 |
| IT1089816B (it) | 1985-06-18 |
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