BE903914A - Procede et appareil pour deposer un metal sur des surfaces d'articles globalement plats. - Google Patents
Procede et appareil pour deposer un metal sur des surfaces d'articles globalement plats.Info
- Publication number
- BE903914A BE903914A BE0/216039A BE216039A BE903914A BE 903914 A BE903914 A BE 903914A BE 0/216039 A BE0/216039 A BE 0/216039A BE 216039 A BE216039 A BE 216039A BE 903914 A BE903914 A BE 903914A
- Authority
- BE
- Belgium
- Prior art keywords
- articles
- depositing metal
- flat articles
- printed circuit
- circuit boards
- Prior art date
Links
- 238000000151 deposition Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
- C23C18/163—Supporting devices for articles to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1632—Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
L'appareil comporte des postes (12, 30, 31) de réception et de préparation des articles, tels que des plaquettes à circuits imprimés (PCB), un poste (62) de dépot autocalytique dans lequel les articles sont disposés verticalement pendant qu'ils sont déplacés relativement lentement dans un bain (84) de dépot autocatalytique, et un poste (110) de sortie, dans lequel les articles sont rincés et séchés après avoir été ramenés dans une orientation horizontale. Domaine d'application : fabrication de plaquettes à circuits imprimés, etc.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/726,049 US4576685A (en) | 1985-04-23 | 1985-04-23 | Process and apparatus for plating onto articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE903914A true BE903914A (fr) | 1986-04-16 |
Family
ID=24917013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE0/216039A BE903914A (fr) | 1985-04-23 | 1985-12-20 | Procede et appareil pour deposer un metal sur des surfaces d'articles globalement plats. |
Country Status (15)
| Country | Link |
|---|---|
| US (1) | US4576685A (fr) |
| JP (1) | JPS61246372A (fr) |
| CN (1) | CN1015996B (fr) |
| AT (1) | AT395022B (fr) |
| BE (1) | BE903914A (fr) |
| BG (1) | BG60260B2 (fr) |
| CH (1) | CH668270A5 (fr) |
| DE (1) | DE3543286A1 (fr) |
| FR (1) | FR2580671B1 (fr) |
| GB (1) | GB2174107B (fr) |
| IT (1) | IT1215167B (fr) |
| LU (1) | LU86221A1 (fr) |
| NL (1) | NL8503147A (fr) |
| SE (1) | SE463625B (fr) |
| SU (1) | SU1660595A3 (fr) |
Families Citing this family (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3631055C1 (de) * | 1986-09-12 | 1987-05-21 | Deutsche Automobilgesellsch | Verfahren zum kontinuierlichen Traenken von Vliesstoff- oder Nadelfilzbahnen mit einer Aktivierungsloesung |
| DE3632378A1 (de) * | 1986-09-24 | 1988-03-31 | Schering Ag | Verfahren zum fuehren von plattenfoermigen gegenstaenden, sowie dazugehoerige vorrichtung |
| US4775449A (en) * | 1986-12-29 | 1988-10-04 | General Electric Company | Treatment of a polyimide surface to improve the adhesion of metal deposited thereon |
| DE3703542A1 (de) * | 1987-02-06 | 1988-08-18 | Schering Ag | Verfahren und anordnung zur beschickung von traggestellen in anlagen zum chemischen behandeln in baedern, insbesondere zum galvanisieren von plattenfoermigen gegenstaenden |
| JPH02232391A (ja) * | 1988-12-21 | 1990-09-14 | Internatl Business Mach Corp <Ibm> | アデイテイブ鍍金浴および方法 |
| US4990224A (en) * | 1988-12-21 | 1991-02-05 | International Business Machines Corporation | Copper plating bath and process for difficult to plate metals |
| US4954226A (en) * | 1988-12-21 | 1990-09-04 | International Business Machines Corporation | Additive plating bath and process |
| US5091218A (en) * | 1989-03-06 | 1992-02-25 | Motorola, Inc. | Method for producing a metallized pattern on a substrate |
| US4999079A (en) * | 1989-06-02 | 1991-03-12 | Chemcut Corporation | Process and apparatus for treating articles and preventing their wrap around a roller |
| US5002616A (en) * | 1989-08-28 | 1991-03-26 | Chemcut Corporation | Process and apparatus for fliud treatment of articles |
| US5077176A (en) * | 1990-07-30 | 1991-12-31 | At&T Bell Laboratories | Pre-plate cleaning process |
| US5166037A (en) * | 1991-02-14 | 1992-11-24 | International Business Machines Corporation | Method of additive circuitization of circuit boards with high adhesion, voidless copper leads |
| US5685970A (en) | 1992-07-01 | 1997-11-11 | Gould Electronics Inc. | Method and apparatus for sequentially metalized polymeric films and products made thereby |
| US5441618A (en) * | 1992-11-10 | 1995-08-15 | Casio Computer Co., Ltd. | Anodizing apparatus and an anodizing method |
| JPH06260309A (ja) * | 1993-03-05 | 1994-09-16 | Murata Mfg Co Ltd | チップ状電子部品の製造方法 |
| US5336370A (en) * | 1993-12-09 | 1994-08-09 | Chipalkatti Makarand H | Pre-treatment for plating technique |
| WO1995016059A1 (fr) * | 1993-12-10 | 1995-06-15 | Taisho Kogyo Kabushiki Kaisha | Dispositif de traitement par immersion continue du type transfert horizontal |
| US5720813A (en) | 1995-06-07 | 1998-02-24 | Eamon P. McDonald | Thin sheet handling system |
| US5614264A (en) | 1995-08-11 | 1997-03-25 | Atotech Usa, Inc. | Fluid delivery apparatus and method |
| US5904773A (en) | 1995-08-11 | 1999-05-18 | Atotech Usa, Inc. | Fluid delivery apparatus |
| US5658441A (en) * | 1995-12-18 | 1997-08-19 | Cfc, Inc. | Conveyorized spray plating machine |
| DE19736805A1 (de) * | 1997-08-23 | 1999-02-25 | Atotech Deutschland Gmbh | Verfahren und Vorrichtung zur naßchemischen Behandlung von Teilen |
| TW593731B (en) * | 1998-03-20 | 2004-06-21 | Semitool Inc | Apparatus for applying a metal structure to a workpiece |
| US6565729B2 (en) * | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
| EP1091024A4 (fr) * | 1998-04-30 | 2006-03-22 | Ebara Corp | Procede et dispositif de placage d'un substrat |
| DE19830212A1 (de) * | 1998-07-07 | 2000-01-20 | Angew Solarenergie Ase Gmbh | Verfahren und Vorrichtung zum Behandeln von Gegenständen, insbesondere scheibenförmigen Gegenständen wie Blechen, Glasplatten, Leiterplatten, Keramiksubstraten |
| EP0971051A1 (fr) | 1998-07-09 | 2000-01-12 | Giacomo Borra | Dispositif pour renouveler la teinture ou vernis d'objets métalliques minces |
| US6497801B1 (en) * | 1998-07-10 | 2002-12-24 | Semitool Inc | Electroplating apparatus with segmented anode array |
| EP1099012A4 (fr) * | 1998-07-10 | 2006-11-15 | Semitool Inc | Procede et appareil de cuivrage pour depot autocatalytique et depot electrolytique |
| US6773560B2 (en) | 1998-07-10 | 2004-08-10 | Semitool, Inc. | Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces |
| US7048841B2 (en) | 1998-12-07 | 2006-05-23 | Semitool, Inc. | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces |
| US6303010B1 (en) | 1999-07-12 | 2001-10-16 | Semitool, Inc. | Methods and apparatus for processing the surface of a microelectronic workpiece |
| US6110345A (en) * | 1998-11-24 | 2000-08-29 | Advanced Micro Devices, Inc. | Method and system for plating workpieces |
| US6645356B1 (en) * | 1998-12-07 | 2003-11-11 | Semitool, Inc. | Methods and apparatus for processing the surface of a microelectronic workpiece |
| US6309520B1 (en) * | 1998-12-07 | 2001-10-30 | Semitool, Inc. | Methods and apparatus for processing the surface of a microelectronic workpiece |
| TW483950B (en) | 1998-12-31 | 2002-04-21 | Semitool Inc | Method, chemistry, and apparatus for high deposition rate solder electroplating on a microelectronic workpiece |
| US6368475B1 (en) * | 2000-03-21 | 2002-04-09 | Semitool, Inc. | Apparatus for electrochemically processing a microelectronic workpiece |
| US7585398B2 (en) * | 1999-04-13 | 2009-09-08 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7020537B2 (en) * | 1999-04-13 | 2006-03-28 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7160421B2 (en) * | 1999-04-13 | 2007-01-09 | Semitool, Inc. | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US20030038035A1 (en) * | 2001-05-30 | 2003-02-27 | Wilson Gregory J. | Methods and systems for controlling current in electrochemical processing of microelectronic workpieces |
| TW527444B (en) * | 1999-04-13 | 2003-04-11 | Semitool Inc | System for electrochemically processing a workpiece |
| US7351314B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7351315B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7189318B2 (en) * | 1999-04-13 | 2007-03-13 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US6916412B2 (en) | 1999-04-13 | 2005-07-12 | Semitool, Inc. | Adaptable electrochemical processing chamber |
| US7438788B2 (en) * | 1999-04-13 | 2008-10-21 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US7264698B2 (en) * | 1999-04-13 | 2007-09-04 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US7645366B2 (en) * | 1999-07-12 | 2010-01-12 | Semitool, Inc. | Microelectronic workpiece holders and contact assemblies for use therewith |
| US6673216B2 (en) * | 1999-08-31 | 2004-01-06 | Semitool, Inc. | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing |
| KR100659544B1 (ko) * | 1999-11-12 | 2006-12-19 | 에바라 유지라이토 코포레이션 리미티드 | 비아 필링 방법 |
| US20050183959A1 (en) * | 2000-04-13 | 2005-08-25 | Wilson Gregory J. | Tuning electrodes used in a reactor for electrochemically processing a microelectric workpiece |
| AU2001259504A1 (en) * | 2000-05-24 | 2001-12-03 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| WO2002023613A2 (fr) * | 2000-09-15 | 2002-03-21 | Rodel Holdings, Inc. | Systeme de planarisation et de polissage chimiomecaniques utilise pour le depot de metal |
| JP2004536217A (ja) * | 2000-10-03 | 2004-12-02 | アプライド マテリアルズ インコーポレイテッド | 金属蒸着のためのエントリーにあたって半導体基板を傾けるための方法と関連する装置 |
| US20030010449A1 (en) * | 2001-07-16 | 2003-01-16 | Gramarossa Daniel J. | Automatic wafer processing and plating system |
| US20030089613A1 (en) * | 2001-11-15 | 2003-05-15 | Ching Chang Yu | Method of selectively electroplating by screen-plating technology |
| US7118658B2 (en) * | 2002-05-21 | 2006-10-10 | Semitool, Inc. | Electroplating reactor |
| US8465469B2 (en) * | 2002-09-12 | 2013-06-18 | Medtronic Vascular, Inc. | Reinforced catheter and methods of making |
| US20050048210A1 (en) * | 2003-01-14 | 2005-03-03 | Sam Siau | Method for plating and plating solution therefor |
| US20040146461A1 (en) * | 2003-01-29 | 2004-07-29 | Vincenzo Giuliano | Oral contrast media composition for computerized axial tomographic examinations and method |
| US20050123681A1 (en) * | 2003-12-08 | 2005-06-09 | Jar-Wha Lee | Method and apparatus for the treatment of individual filaments of a multifilament yarn |
| US20050199587A1 (en) * | 2004-03-12 | 2005-09-15 | Jon Bengston | Non-chrome plating on plastic |
| US7581551B2 (en) * | 2004-09-01 | 2009-09-01 | Sanyo Electric Co., Ltd. | Cleaning apparatus |
| RU2323277C2 (ru) * | 2006-01-10 | 2008-04-27 | Юрий Романович Копылов | Способ гальваномеханического восстановления токопроводящих деталей и устройство для его осуществления |
| DE102006054846C5 (de) * | 2006-11-20 | 2012-05-03 | Permatecs Gmbh | Produktionsanlage zur Herstellung von Solarzellen im Inline-Verfahren, sowie Verfahren zur Integration eines Batch-Prozesses in eine mehrspurige Inline-Produktionsanlage für Solarzellen |
| KR100856873B1 (ko) * | 2007-01-05 | 2008-09-04 | 연세대학교 산학협력단 | 무전해도금용 촉매활성 방법 |
| US20090238979A1 (en) * | 2008-03-21 | 2009-09-24 | William Decesare | Method of Applying Catalytic Solution for Use in Electroless Deposition |
| FR2934609B1 (fr) * | 2008-07-30 | 2011-07-22 | Jet Metal Technologies | Procede non eletrolytique de metallisation en ligne de substrats par projection avec traitement de surface prealable et dispositif pour la mise en oeuvre du procede. |
| CN102453915B (zh) * | 2010-10-27 | 2014-03-12 | 富葵精密组件(深圳)有限公司 | 蚀刻装置及使用该蚀刻装置蚀刻基板的方法 |
| CN102508583B (zh) * | 2011-09-30 | 2014-05-21 | 南京熊猫电子股份有限公司 | 电容式触摸屏金属引线的制备方法 |
| CN102673053B (zh) * | 2012-06-05 | 2016-05-11 | 深圳市五株科技股份有限公司 | 覆铜板、印刷电路板及其制造方法 |
| CN103786386B (zh) * | 2014-02-28 | 2016-08-17 | 厦门建霖工业有限公司 | 一种abs塑料表面涂层及其制备方法 |
| CN104164689A (zh) * | 2014-07-30 | 2014-11-26 | 东莞市五株电子科技有限公司 | 一种水平前处理垂直连续式电镀设备 |
| CN104862760A (zh) * | 2015-06-11 | 2015-08-26 | 重庆德凯覆铜板有限公司 | 铝板表面阳极氧化生产线 |
| CN105018980A (zh) * | 2015-07-23 | 2015-11-04 | 珠海元盛电子科技股份有限公司 | 一种印制电路板孔金属化离子液体镀金的电镀液及电镀方法 |
| CN107087867B (zh) * | 2017-06-29 | 2018-12-14 | 绍兴上虞文丰礼品有限公司 | 一种便捷珠宝镀金装置 |
| CN114222433B (zh) * | 2022-01-25 | 2022-08-09 | 东莞塘厦裕华电路板有限公司 | 一种印刷电路板湿化学处理设备 |
| CN114672792B (zh) * | 2022-04-20 | 2024-11-22 | 深圳市恒博智造有限公司 | 一种具有负载及镀镍时间控制功能的镀镍用镍缸装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2942719A (en) * | 1956-02-06 | 1960-06-28 | American Can Co | Apparatus for treating articles |
| US3905827A (en) * | 1971-10-18 | 1975-09-16 | Chemcut Corp | Etchant rinse method |
| US3801387A (en) * | 1971-10-18 | 1974-04-02 | Chemcut Corp | Etchant remover apparatus and method |
| US4015706A (en) * | 1971-11-15 | 1977-04-05 | Chemcut Corporation | Connecting modules for an etching system |
| US3776800A (en) * | 1971-12-06 | 1973-12-04 | Chemut Corp | Etching apparatus |
| US3801478A (en) * | 1972-01-27 | 1974-04-02 | Cottbus Textilkombinat | Process of metallizing polymeric materials |
| US4046248A (en) * | 1974-01-15 | 1977-09-06 | Chemcut Corporation | Connecting and alignment means for modular chemical treatment system |
| US3954570A (en) * | 1974-11-11 | 1976-05-04 | Amp Incorporated | Sensitized polyimides and circuit elements thereof |
| US4017982A (en) * | 1975-07-28 | 1977-04-19 | Chemcut Corporation | Drying apparatus |
| US4402799A (en) * | 1981-10-02 | 1983-09-06 | Chemcut Corporation | Apparatus and method of treating tabs of printed circuit boards and the like |
| US4402800A (en) * | 1981-10-02 | 1983-09-06 | Ash James J | Apparatus and method of treating tabs of printed circuit boards and the like |
| US4385967A (en) * | 1981-10-07 | 1983-05-31 | Chemcut Corporation | Electroplating apparatus and method |
| US4617204A (en) * | 1983-01-04 | 1986-10-14 | The United States Of America As Represented By The United States Department Of Energy | Chemical synthesis of thin films and supported crystals by oxidation of zintl anions |
| US4454003A (en) * | 1983-01-06 | 1984-06-12 | Systems Engineering & Manufacturing Corp. | Printed circuit board component conveyor apparatus and process |
| US4511597A (en) * | 1983-10-12 | 1985-04-16 | Kollmorgen Technologies Corporation | Method for depositing a metal on a surface |
| JPS60218477A (ja) * | 1984-04-11 | 1985-11-01 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 無電解付着のための触媒化処理法 |
| DE3423457A1 (de) * | 1984-06-26 | 1986-01-02 | Bayer Ag, 5090 Leverkusen | Verfahren zur herstellung von leiterplatten |
-
1985
- 1985-04-23 US US06/726,049 patent/US4576685A/en not_active Expired - Fee Related
- 1985-11-15 NL NL8503147A patent/NL8503147A/nl not_active Application Discontinuation
- 1985-11-22 IT IT8567980A patent/IT1215167B/it active
- 1985-11-29 CN CN85108685.3A patent/CN1015996B/zh not_active Expired
- 1985-11-29 JP JP60267569A patent/JPS61246372A/ja active Granted
- 1985-12-07 DE DE19853543286 patent/DE3543286A1/de active Granted
- 1985-12-11 SE SE8505859A patent/SE463625B/sv not_active IP Right Cessation
- 1985-12-16 AT AT0361585A patent/AT395022B/de not_active IP Right Cessation
- 1985-12-16 BG BG72728A patent/BG60260B2/xx unknown
- 1985-12-18 SU SU853990693A patent/SU1660595A3/ru active
- 1985-12-20 BE BE0/216039A patent/BE903914A/fr not_active IP Right Cessation
- 1985-12-20 CH CH5467/85A patent/CH668270A5/de not_active IP Right Cessation
- 1985-12-20 GB GB8531409A patent/GB2174107B/en not_active Expired
- 1985-12-20 LU LU86221A patent/LU86221A1/fr unknown
- 1985-12-20 FR FR8518956A patent/FR2580671B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB8531409D0 (en) | 1986-02-05 |
| GB2174107B (en) | 1989-04-19 |
| BG60260B1 (bg) | 1994-03-24 |
| BG60260B2 (en) | 1994-03-24 |
| SE8505859L (sv) | 1986-10-24 |
| FR2580671A1 (fr) | 1986-10-24 |
| SE8505859D0 (sv) | 1985-12-11 |
| NL8503147A (nl) | 1986-11-17 |
| JPH0571665B2 (fr) | 1993-10-07 |
| CN85108685A (zh) | 1986-10-22 |
| JPS61246372A (ja) | 1986-11-01 |
| CH668270A5 (de) | 1988-12-15 |
| IT1215167B (it) | 1990-01-31 |
| SU1660595A3 (ru) | 1991-06-30 |
| ATA361585A (de) | 1992-01-15 |
| DE3543286A1 (de) | 1986-10-23 |
| SE463625B (sv) | 1990-12-17 |
| DE3543286C2 (fr) | 1993-08-19 |
| US4576685A (en) | 1986-03-18 |
| LU86221A1 (fr) | 1986-04-14 |
| CN1015996B (zh) | 1992-03-25 |
| AT395022B (de) | 1992-08-25 |
| FR2580671B1 (fr) | 1989-07-28 |
| IT8567980A0 (it) | 1985-11-22 |
| GB2174107A (en) | 1986-10-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RE | Patent lapsed |
Owner name: SCHERING A.G. Effective date: 19941231 |