CA1065129A - Appareil optoelectronique et methode de localisation et d'inspection - Google Patents
Appareil optoelectronique et methode de localisation et d'inspectionInfo
- Publication number
- CA1065129A CA1065129A CA244,914A CA244914A CA1065129A CA 1065129 A CA1065129 A CA 1065129A CA 244914 A CA244914 A CA 244914A CA 1065129 A CA1065129 A CA 1065129A
- Authority
- CA
- Canada
- Prior art keywords
- axis
- light
- target
- incident beam
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000007689 inspection Methods 0.000 title abstract description 19
- 230000005693 optoelectronics Effects 0.000 title abstract 3
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 238000005553 drilling Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 24
- 230000008859 change Effects 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000004304 visual acuity Effects 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA244,914A CA1065129A (fr) | 1976-02-03 | 1976-02-03 | Appareil optoelectronique et methode de localisation et d'inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA244,914A CA1065129A (fr) | 1976-02-03 | 1976-02-03 | Appareil optoelectronique et methode de localisation et d'inspection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1065129A true CA1065129A (fr) | 1979-10-30 |
Family
ID=4105139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA244,914A Expired CA1065129A (fr) | 1976-02-03 | 1976-02-03 | Appareil optoelectronique et methode de localisation et d'inspection |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1065129A (fr) |
-
1976
- 1976-02-03 CA CA244,914A patent/CA1065129A/fr not_active Expired
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