CA1151395A - Fabrication de silane et de silicone de haute purete - Google Patents

Fabrication de silane et de silicone de haute purete

Info

Publication number: CA1151395A
Authority: CA; Canada
Prior art keywords: silicon; zone; silane; reaction zone; trichlorosilane
Prior art date: 1978-08-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA000334373A

Other languages

English (en)

Inventor

William C. Breneman

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Union Carbide Corp

Original Assignee

Union Carbide Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-08-23

Filing date

1979-08-23

Publication date

1983-08-09

1979-08-23 Application filed by Union Carbide Corp filed Critical Union Carbide Corp

1983-08-09 Application granted granted Critical

1983-08-09 Publication of CA1151395A publication Critical patent/CA1151395A/fr

Status Expired legal-status Critical Current

Links

BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 131
229910000077 silane Inorganic materials 0.000 title claims abstract description 129
238000004519 manufacturing process Methods 0.000 title claims description 42
229920001296 polysiloxane Polymers 0.000 title 1
238000006243 chemical reaction Methods 0.000 claims abstract description 104
ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims abstract description 82
239000005052 trichlorosilane Substances 0.000 claims abstract description 80
VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 56
239000005049 silicon tetrachloride Substances 0.000 claims abstract description 56
239000012535 impurity Substances 0.000 claims abstract description 41
MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims abstract description 26
KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 18
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 140
229910052710 silicon Inorganic materials 0.000 claims description 116
239000010703 silicon Substances 0.000 claims description 116
238000000034 method Methods 0.000 claims description 104
230000008569 process Effects 0.000 claims description 95
229910052739 hydrogen Inorganic materials 0.000 claims description 51
238000004821 distillation Methods 0.000 claims description 46
239000001257 hydrogen Substances 0.000 claims description 44
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 41
238000007323 disproportionation reaction Methods 0.000 claims description 39
239000000463 material Substances 0.000 claims description 39
239000006227 byproduct Substances 0.000 claims description 38
238000000354 decomposition reaction Methods 0.000 claims description 37
239000000047 product Substances 0.000 claims description 31
239000002699 waste material Substances 0.000 claims description 27
239000007789 gas Substances 0.000 claims description 24
239000011863 silicon-based powder Substances 0.000 claims description 24
239000010949 copper Substances 0.000 claims description 23
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 22
229910052802 copper Inorganic materials 0.000 claims description 22
238000000746 purification Methods 0.000 claims description 22
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 18
239000003054 catalyst Substances 0.000 claims description 18
239000004065 semiconductor Substances 0.000 claims description 18
239000012530 fluid Substances 0.000 claims description 14
229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 13
150000002431 hydrogen Chemical class 0.000 claims description 11
239000003456 ion exchange resin Substances 0.000 claims description 11
229920003303 ion-exchange polymer Polymers 0.000 claims description 11
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
238000000926 separation method Methods 0.000 claims description 9
125000001302 tertiary amino group Chemical group 0.000 claims description 9
NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 8
230000015572 biosynthetic process Effects 0.000 claims description 8
229910052799 carbon Inorganic materials 0.000 claims description 8
IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 8
238000002844 melting Methods 0.000 claims description 8
230000008018 melting Effects 0.000 claims description 8
230000002708 enhancing effect Effects 0.000 claims description 7
239000003957 anion exchange resin Substances 0.000 claims description 6
239000002245 particle Substances 0.000 claims description 6
239000000741 silica gel Substances 0.000 claims description 6
229910002027 silica gel Inorganic materials 0.000 claims description 6
239000011347 resin Substances 0.000 claims description 5
229920005989 resin Polymers 0.000 claims description 5
239000011856 silicon-based particle Substances 0.000 claims description 5
239000007787 solid Substances 0.000 claims description 5
238000007865 diluting Methods 0.000 claims description 4
230000007062 hydrolysis Effects 0.000 claims description 4
238000006460 hydrolysis reaction Methods 0.000 claims description 4
125000001453 quaternary ammonium group Chemical group 0.000 claims description 4
238000007596 consolidation process Methods 0.000 claims description 2
238000000227 grinding Methods 0.000 claims description 2
229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
238000004064 recycling Methods 0.000 claims 4
150000002500 ions Chemical class 0.000 claims 1
238000002360 preparation method Methods 0.000 claims 1
238000005984 hydrogenation reaction Methods 0.000 abstract description 15
239000005046 Chlorosilane Substances 0.000 abstract description 5
239000007788 liquid Substances 0.000 abstract description 3
150000001412 amines Chemical class 0.000 abstract description 2
229910004721 HSiCl3 Inorganic materials 0.000 abstract 2
-1 amine hydrochloride Chemical class 0.000 abstract 1
238000012545 processing Methods 0.000 description 17
239000013078 crystal Substances 0.000 description 9
229910001507 metal halide Inorganic materials 0.000 description 6
150000005309 metal halides Chemical class 0.000 description 6
239000011541 reaction mixture Substances 0.000 description 6
238000013459 approach Methods 0.000 description 5
239000000203 mixture Substances 0.000 description 5
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
238000009835 boiling Methods 0.000 description 4
239000000460 chlorine Substances 0.000 description 4
238000005516 engineering process Methods 0.000 description 4
229920000548 poly(silane) polymer Polymers 0.000 description 4
230000009467 reduction Effects 0.000 description 4
238000010992 reflux Methods 0.000 description 4
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
229910000519 Ferrosilicon Inorganic materials 0.000 description 3
229910052796 boron Inorganic materials 0.000 description 3
230000006872 improvement Effects 0.000 description 3
239000002210 silicon-based material Substances 0.000 description 3
235000012431 wafers Nutrition 0.000 description 3
KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 2
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical class [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
229910052801 chlorine Inorganic materials 0.000 description 2
238000010276 construction Methods 0.000 description 2
238000010924 continuous production Methods 0.000 description 2
238000011161 development Methods 0.000 description 2
230000000694 effects Effects 0.000 description 2
229910052742 iron Inorganic materials 0.000 description 2
239000007791 liquid phase Substances 0.000 description 2
239000010802 sludge Substances 0.000 description 2
239000012808 vapor phase Substances 0.000 description 2
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
239000003463 adsorbent Substances 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
229910052791 calcium Inorganic materials 0.000 description 1
239000011575 calcium Substances 0.000 description 1
239000012159 carrier gas Substances 0.000 description 1
229920001429 chelating resin Polymers 0.000 description 1
239000007795 chemical reaction product Substances 0.000 description 1
238000004320 controlled atmosphere Methods 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
229910021419 crystalline silicon Inorganic materials 0.000 description 1
230000003247 decreasing effect Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000010790 dilution Methods 0.000 description 1
239000012895 dilution Substances 0.000 description 1
230000003467 diminishing effect Effects 0.000 description 1
230000005611 electricity Effects 0.000 description 1
231100001261 hazardous Toxicity 0.000 description 1
230000003993 interaction Effects 0.000 description 1
239000013067 intermediate product Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000000843 powder Substances 0.000 description 1
238000001556 precipitation Methods 0.000 description 1
238000000197 pyrolysis Methods 0.000 description 1
239000010453 quartz Substances 0.000 description 1
230000000717 retained effect Effects 0.000 description 1
150000004756 silanes Chemical class 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
239000000758 substrate Substances 0.000 description 1
150000003512 tertiary amines Chemical class 0.000 description 1
238000005979 thermal decomposition reaction Methods 0.000 description 1
FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
239000006200 vaporizer Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Landscapes

Silicon Compounds (AREA)

CA000334373A 1978-08-23 1979-08-23 Fabrication de silane et de silicone de haute purete Expired CA1151395A (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US93609178A	1978-08-23	1978-08-23
US936,091		1986-11-28

Publications (1)

Publication Number	Publication Date
CA1151395A true CA1151395A (fr)	1983-08-09

Family

ID=25468157

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000334373A Expired CA1151395A (fr)	1978-08-23	1979-08-23	Fabrication de silane et de silicone de haute purete

Country Status (1)

Country	Link
CA (1)	CA1151395A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2013110247A1 (fr) *	2012-01-28	2013-08-01	Xi Chu	Procédé et système pour produire du silicium et dispositifs correspondants
CN110078080A (zh) *	2019-04-26	2019-08-02	天津科技大学	一种结合渣浆处理与裂解反应的氯硅烷高沸物回收工艺

1979
- 1979-08-23 CA CA000334373A patent/CA1151395A/fr not_active Expired

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2013110247A1 (fr) *	2012-01-28	2013-08-01	Xi Chu	Procédé et système pour produire du silicium et dispositifs correspondants
CN104271504A (zh) *	2012-01-28	2015-01-07	储晞	用于生产硅和器件的方法及系统
CN110540208A (zh) *	2012-01-28	2019-12-06	储晞	一种生产硅的方法
CN110078080A (zh) *	2019-04-26	2019-08-02	天津科技大学	一种结合渣浆处理与裂解反应的氯硅烷高沸物回收工艺

Legal Events

Date	Code	Title	Description
2000-08-09	MKEX	Expiry

Publication	Publication Date	Title
US4676967A (en)	1987-06-30	High purity silane and silicon production
US4340574A (en)	1982-07-20	Process for the production of ultrahigh purity silane with recycle from separation columns
JP4465961B2 (ja)	2010-05-26	六塩化二珪素の製造方法
JP5374091B2 (ja)	2013-12-25	多結晶シリコンの製造方法
KR101538168B1 (ko)	2015-07-20	전환 반응 가스의 분리 회수 방법
US9067338B2 (en)	2015-06-30	Method to convert waste silicon to high purity silicon
CA1145117A (fr)	1983-04-26	Methode de production de silicones polycristallins
CA1228220A (fr)	1987-10-20	Production du silicone
JPWO2002012122A1 (ja)	2003-09-09	六塩化二珪素の製造方法
WO2003040036A1 (fr)	2003-05-15	Procede de production de silicium
US4318942A (en)	1982-03-09	Process for producing polycrystalline silicon
JPS6259051B2 (fr)	1987-12-09
US4321246A (en)	1982-03-23	Polycrystalline silicon production
CA1162028A (fr)	1984-02-14	Silane ultra-pur et obtention de silicium
Iya	1986	Production of ultra-high-purity polycrystalline silicon
CA1151395A (fr)	1983-08-09	Fabrication de silane et de silicone de haute purete
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CN213912399U (zh)	2021-08-10	一种处理多晶硅副产高沸物的反应精馏系统
JP2710382B2 (ja)	1998-02-10	高純度ジクロロシランの製造方法
CA1184017A (fr)	1985-03-19	Silane ultrapur, et production de silicone par recyclage des produits du silane
JPH01226712A (ja)	1989-09-11	ジクロルシランの製造方法
Breneman	1987	High purity silane and silicon production
US20130121908A1 (en)	2013-05-16	Method for producing trichlorosilane with reduced boron compound impurities
US20120082609A1 (en)	2012-04-05	Method for producing trichlorosilane with reduced boron compound impurities
CN119365416A (zh)	2025-01-24	纯化三氯硅烷的制造方法