CA1184017A - Silane ultrapur, et production de silicone par recyclage des produits du silane - Google Patents

Silane ultrapur, et production de silicone par recyclage des produits du silane

Info

Publication number
CA1184017A
CA1184017A CA000382525A CA382525A CA1184017A CA 1184017 A CA1184017 A CA 1184017A CA 000382525 A CA000382525 A CA 000382525A CA 382525 A CA382525 A CA 382525A CA 1184017 A CA1184017 A CA 1184017A
Authority
CA
Canada
Prior art keywords
silane
silicon
column
stream
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000382525A
Other languages
English (en)
Inventor
Larry M. Coleman
William C. Breneman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of CA1184017A publication Critical patent/CA1184017A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
CA000382525A 1980-08-28 1981-07-24 Silane ultrapur, et production de silicone par recyclage des produits du silane Expired CA1184017A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18214680A 1980-08-28 1980-08-28
US182,146 1980-08-28

Publications (1)

Publication Number Publication Date
CA1184017A true CA1184017A (fr) 1985-03-19

Family

ID=22667250

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000382525A Expired CA1184017A (fr) 1980-08-28 1981-07-24 Silane ultrapur, et production de silicone par recyclage des produits du silane

Country Status (1)

Country Link
CA (1) CA1184017A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094831A (en) * 1989-07-31 1992-03-10 Degussa Aktiengesellschaft Process for the dismutation of chlorosilanes
US5118485A (en) * 1988-03-25 1992-06-02 Hemlock Semiconductor Corporation Recovery of lower-boiling silanes in a cvd process
CN116495741A (zh) * 2023-05-31 2023-07-28 内蒙古润阳悦达新能源科技有限公司 一种多晶硅生产伴生二硅原料化利用方法及系统

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118485A (en) * 1988-03-25 1992-06-02 Hemlock Semiconductor Corporation Recovery of lower-boiling silanes in a cvd process
US5094831A (en) * 1989-07-31 1992-03-10 Degussa Aktiengesellschaft Process for the dismutation of chlorosilanes
CN116495741A (zh) * 2023-05-31 2023-07-28 内蒙古润阳悦达新能源科技有限公司 一种多晶硅生产伴生二硅原料化利用方法及系统
CN116495741B (zh) * 2023-05-31 2024-06-18 宁夏润阳硅材料科技有限公司 一种多晶硅生产伴生二硅原料化利用方法及系统

Similar Documents

Publication Publication Date Title
US4340574A (en) Process for the production of ultrahigh purity silane with recycle from separation columns
US4676967A (en) High purity silane and silicon production
US6932954B2 (en) Method for producing silicon
CA1145117A (fr) Methode de production de silicones polycristallins
EP2654912B1 (fr) Fabrication de silicium polycristallin dans procédés à boucle sensiblement fermée qui entraînent des opérations de dismutation
CA1228220A (fr) Production du silicone
US4318942A (en) Process for producing polycrystalline silicon
US4117094A (en) Process for silicon and trichlorosilane production
JP2009149502A (ja) 転換反応ガスの分離回収方法。
JPS6259051B2 (fr)
CN115838175B (zh) 一种去除氯硅烷中碳杂质的方法及系统
US4321246A (en) Polycrystalline silicon production
JP2004002138A (ja) シリコンの製造方法
CA1162028A (fr) Silane ultra-pur et obtention de silicium
US20110023778A1 (en) Method and Apparatus for Improving the Efficiency of Purification and Deposition of Polycrystalline Silicon
EP1912720B1 (fr) Procede d'elimination d'impuretes a base de carbure et/ou phosphore dans une installation de production de silicium
JPS62277193A (ja) 高純度シリコン法からの廃棄物の処理法
Ceccaroli et al. New advances in polysilicon processes correlating feedstock properties and good crystal and wafer performances
CN213527475U (zh) 一种处理多硅化合物的隔板反应精馏系统
CN213912399U (zh) 一种处理多晶硅副产高沸物的反应精馏系统
CA1151395A (fr) Fabrication de silane et de silicone de haute purete
WO1985004389A1 (fr) Procede d'hydrogenation de tetrachlorure de silicium
JPH02196014A (ja) 高純度ジクロロシランの製造方法
Coleman Process for the production of ultrahigh purity silane with recycle from separation columns
Breneman High purity silane and silicon production

Legal Events

Date Code Title Description
MKEX Expiry