CA1306100C - Procede d'assemblage d'elements moules en nitrure de silicium - Google Patents

Procede d'assemblage d'elements moules en nitrure de silicium

Info

Publication number
CA1306100C
CA1306100C CA000552831A CA552831A CA1306100C CA 1306100 C CA1306100 C CA 1306100C CA 000552831 A CA000552831 A CA 000552831A CA 552831 A CA552831 A CA 552831A CA 1306100 C CA1306100 C CA 1306100C
Authority
CA
Canada
Prior art keywords
silicon nitride
nitrogen
layer
silicon
nitride layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA000552831A
Other languages
English (en)
Inventor
Erno Gyarmati
Xueliang Qiu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Jülich
Original Assignee
Forschungszentrum Jülich
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Jülich, Kernforschungsanlage Juelich GmbH filed Critical Forschungszentrum Jülich
Priority to CA000552831A priority Critical patent/CA1306100C/fr
Application granted granted Critical
Publication of CA1306100C publication Critical patent/CA1306100C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Ceramic Products (AREA)
CA000552831A 1987-11-26 1987-11-26 Procede d'assemblage d'elements moules en nitrure de silicium Expired - Lifetime CA1306100C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000552831A CA1306100C (fr) 1987-11-26 1987-11-26 Procede d'assemblage d'elements moules en nitrure de silicium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000552831A CA1306100C (fr) 1987-11-26 1987-11-26 Procede d'assemblage d'elements moules en nitrure de silicium

Publications (1)

Publication Number Publication Date
CA1306100C true CA1306100C (fr) 1992-08-11

Family

ID=4136939

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000552831A Expired - Lifetime CA1306100C (fr) 1987-11-26 1987-11-26 Procede d'assemblage d'elements moules en nitrure de silicium

Country Status (1)

Country Link
CA (1) CA1306100C (fr)

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