CA1315111C - Optimally staged cryopump - Google Patents

Optimally staged cryopump

Info

Publication number: CA1315111C
Authority: CA; Canada
Prior art keywords: temperature; stage; cryopump; gases; adsorbent
Prior art date: 1987-01-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA000557461A

Other languages

English (en)

French (fr)

Inventor

Philip A. Lessard

Thomas Dunn

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Azenta Inc

Original Assignee

Helix Technology Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-01-27

Filing date

1988-01-27

Publication date

1993-03-30

1988-01-27 Application filed by Helix Technology Corp filed Critical Helix Technology Corp

1993-03-30 Application granted granted Critical

1993-03-30 Publication of CA1315111C publication Critical patent/CA1315111C/en

2010-03-30 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000007789 gas Substances 0.000 claims abstract description 66
238000005086 pumping Methods 0.000 claims abstract description 44
239000003463 adsorbent Substances 0.000 claims abstract description 43
239000001257 hydrogen Substances 0.000 claims description 11
229910052739 hydrogen Inorganic materials 0.000 claims description 11
238000010438 heat treatment Methods 0.000 claims description 9
238000001816 cooling Methods 0.000 claims description 6
238000011069 regeneration method Methods 0.000 claims description 5
238000001179 sorption measurement Methods 0.000 claims description 4
230000008929 regeneration Effects 0.000 claims description 3
238000000034 method Methods 0.000 claims 8
238000009833 condensation Methods 0.000 claims 3
230000005494 condensation Effects 0.000 claims 3
125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
239000012212 insulator Substances 0.000 claims 1
239000011148 porous material Substances 0.000 abstract description 9
238000009835 boiling Methods 0.000 description 10
230000005855 radiation Effects 0.000 description 10
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
239000003610 charcoal Substances 0.000 description 7
239000001307 helium Substances 0.000 description 5
229910052734 helium Inorganic materials 0.000 description 5
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
239000000463 material Substances 0.000 description 3
229910052754 neon Inorganic materials 0.000 description 3
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
239000003507 refrigerant Substances 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
230000003247 decreasing effect Effects 0.000 description 2
239000010457 zeolite Substances 0.000 description 2
NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
239000002250 absorbent Substances 0.000 description 1
230000002745 absorbent Effects 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
230000008878 coupling Effects 0.000 description 1
238000010168 coupling process Methods 0.000 description 1
238000005859 coupling reaction Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
239000000428 dust Substances 0.000 description 1
238000007710 freezing Methods 0.000 description 1
230000008014 freezing Effects 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
239000010409 thin film Substances 0.000 description 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

CA000557461A 1987-01-27 1988-01-27 Optimally staged cryopump Expired - Fee Related CA1315111C (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US737087A	1987-01-27	1987-01-27
US007,370		1987-01-27

Publications (1)

Publication Number	Publication Date
CA1315111C true CA1315111C (en)	1993-03-30

Family

ID=21725773

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000557461A Expired - Fee Related CA1315111C (en)	1987-01-27	1988-01-27	Optimally staged cryopump

Country Status (5)

Country	Link
EP (1)	EP0349577B1 (de)
JP (1)	JP2597696B2 (de)
CA (1)	CA1315111C (de)
DE (1)	DE3852303T2 (de)
WO (1)	WO1988005500A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR102033142B1 (ko) *	2011-02-09	2019-10-16	브룩스 오토메이션, 인크.	극저온 펌프

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3218815A (en) *	1964-06-17	1965-11-23	Little Inc A	Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator
DE3046458A1 (de) *	1980-12-10	1982-07-15	Leybold-Heraeus GmbH, 5000 Köln	Refrigerator-kryostat
US4438632A (en) *	1982-07-06	1984-03-27	Helix Technology Corporation	Means for periodic desorption of a cryopump
DE3330146A1 (de) *	1982-09-17	1984-03-22	Balzers Hochvakuum Gmbh, 6200 Wiesbaden	Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
US4593530A (en) *	1984-04-10	1986-06-10	Air Products And Chemicals, Inc.	Method and apparatus for improving the sensitivity of a leak detector utilizing a cryopump
DE3512614A1 (de) *	1985-04-06	1986-10-16	Leybold-Heraeus GmbH, 5000 Köln	Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe

1988
- 1988-01-27 CA CA000557461A patent/CA1315111C/en not_active Expired - Fee Related
- 1988-01-27 WO PCT/US1988/000225 patent/WO1988005500A1/en not_active Ceased
- 1988-01-27 DE DE3852303T patent/DE3852303T2/de not_active Expired - Fee Related
- 1988-01-27 EP EP88902995A patent/EP0349577B1/de not_active Expired - Lifetime
- 1988-01-27 JP JP63502773A patent/JP2597696B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2597696B2 (ja)	1997-04-09
DE3852303D1 (de)	1995-01-12
EP0349577A1 (de)	1990-01-10
WO1988005500A1 (en)	1988-07-28
EP0349577B1 (de)	1994-11-30
JPH02502034A (ja)	1990-07-05
DE3852303T2 (de)	1995-05-18

Legal Events

Date	Code	Title	Description
2005-03-30	MKLA	Lapsed

Publication	Publication Date	Title
US4763483A (en)	1988-08-16	Cryopump and method of starting the cryopump
US5001903A (en)	1991-03-26	Optimally staged cryopump
EP0397251B1 (de)	1994-03-02	Verfahren zum Herstellen von Vakuumvorrichtungen und IR Detektoren mit einem Getter
JP4356250B2 (ja)	2009-11-04	無線受信機
US4356701A (en)	1982-11-02	Cryopump
US5517823A (en)	1996-05-21	Pressure controlled cryopump regeneration method and system
EP0332107B1 (de)	1992-07-08	Turbomolekularpumpe und deren Betriebsverfahren
KR100239605B1 (ko)	2000-01-15	저온 펌프
EP0464893A1 (de)	1992-01-08	Infrarotdetektoren und deren Herstellung
US7320224B2 (en)	2008-01-22	Method and apparatus for detecting and measuring state of fullness in cryopumps
WO1992014057A1 (en)	1992-08-20	Cryopump with improved second stage passageway
US5345787A (en)	1994-09-13	Miniature cryosorption vacuum pump
CA1221553A (en)	1987-05-12	Cryopump with improved adsorption capacity
EP3710699B1 (de)	2022-06-22	Kryopumpe mit verstärktem frontarray
US4966016A (en)	1990-10-30	Cryopump with multiple refrigerators
JP3192143B2 (ja)	2001-07-23	差動ポンピング能力を備えたクライオポンプ
CA1315111C (en)	1993-03-30	Optimally staged cryopump
US4454722A (en)	1984-06-19	Cryopump
EP0506133B1 (de)	1997-07-23	Kryopumpe
KR100706818B1 (ko)	2007-04-12	크라이오 펌프
US4896511A (en)	1990-01-30	Optimally staged cryopump
EP0126909B1 (de)	1987-07-22	Kryopumpe mit Schnellkühlung und erhöhter Druckstabilität
JP2943489B2 (ja)	1999-08-30	真空排気装置のコールドトラップ
Piltingsrud	1994	Miniature cryosorption vacuum pump for portable instruments
JPH11141460A (ja)	1999-05-25	クライオポンプの再生装置およびクライオポンプの再生方法