CA2013029A1 - Detecteur de mouvements utilisant le champ electrique - Google Patents

Detecteur de mouvements utilisant le champ electrique

Info

Publication number
CA2013029A1
CA2013029A1 CA2013029A CA2013029A CA2013029A1 CA 2013029 A1 CA2013029 A1 CA 2013029A1 CA 2013029 A CA2013029 A CA 2013029A CA 2013029 A CA2013029 A CA 2013029A CA 2013029 A1 CA2013029 A1 CA 2013029A1
Authority
CA
Canada
Prior art keywords
pair
fingers
finger
strain
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2013029A
Other languages
English (en)
Other versions
CA2013029C (fr
Inventor
Stephen C. Jacobsen
John E. Wood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sarcos Group LC
Original Assignee
Sarcos Group LC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos Group LC filed Critical Sarcos Group LC
Publication of CA2013029A1 publication Critical patent/CA2013029A1/fr
Application granted granted Critical
Publication of CA2013029C publication Critical patent/CA2013029C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Pressure Sensors (AREA)
CA002013029A 1989-04-03 1990-03-26 Detecteur de mouvements utilisant le champ electrique Expired - Fee Related CA2013029C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/332,593 1989-04-03
US07/332,593 US4964306A (en) 1989-04-03 1989-04-03 Field-based movement sensor

Publications (2)

Publication Number Publication Date
CA2013029A1 true CA2013029A1 (fr) 1990-10-03
CA2013029C CA2013029C (fr) 1997-08-19

Family

ID=23298925

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002013029A Expired - Fee Related CA2013029C (fr) 1989-04-03 1990-03-26 Detecteur de mouvements utilisant le champ electrique

Country Status (7)

Country Link
US (1) US4964306A (fr)
EP (1) EP0391217B1 (fr)
JP (1) JP2937399B2 (fr)
KR (1) KR0172591B1 (fr)
AT (1) ATE111216T1 (fr)
CA (1) CA2013029C (fr)
DE (1) DE69012186T2 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5481184A (en) * 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
DE4115786A1 (de) * 1991-05-15 1992-11-19 Micro Epsilon Messtechnik Verfahren und vorrichtung zum ueberwachen mechanischer kraftuebertragungssysteme
CA2070739A1 (fr) * 1991-06-21 1992-12-22 Stephen C. Jacobsen Appareil de mesure du deplacement rotatif
JP2852886B2 (ja) * 1995-09-04 1999-02-03 本田技研工業株式会社 半導体応力センサ
USD384298S (en) * 1995-11-02 1997-09-30 Boyd Darry L Load gauge block
DE10023838C2 (de) * 2000-05-16 2002-11-28 Siemens Ag Vorrichtung zum Messen einer Wegänderung zwischen Abschnitten eines Bauteils und Verwendung dieser Vorrichtung
DE10238721A1 (de) * 2002-08-23 2004-03-11 Robert Bosch Gmbh Vorrichtung zur Messung einer Kraft, Vorrichtung zur Messung eines Drucks und Drucksensor
US7451658B2 (en) * 2003-01-07 2008-11-18 Sensopad Limited Sensing apparatus and method
DE10307360A1 (de) * 2003-02-21 2004-10-07 Ceramics Gmbh & Co. Kg Dehnungssensor, insbesondere für einen piezokeramischen Biegewandler
US7325327B2 (en) * 2003-09-12 2008-02-05 Fischer David C Method and apparatus for measuring angular or linear displacement
DE102004034277B4 (de) * 2004-07-15 2009-12-03 Infineon Technologies Ag Vorrichtung, insbesondere in einer integrierten Schaltungsanordnung, und Verfahren zur Erfassung eines mechanischen Stresszustands in einem Halbleitersubstrat
TWI468880B (zh) * 2012-06-15 2015-01-11 Asml Netherlands Bv 定位系統、微影裝置及器件製造方法
US10732055B2 (en) * 2015-10-30 2020-08-04 Northwestern University Dielectrostrictive sensors for shear stress measurement, process monitoring, and quality examination of viscoelastic materials
KR101965051B1 (ko) * 2017-03-24 2019-04-02 고려대학교 세종산학협력단 스트레인 게이지 및 그를 포함하는 스트레인 센서
WO2020247891A1 (fr) * 2019-06-07 2020-12-10 The Regents Of The University Of California Capteur à base de rigidité électrique

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092856A (en) * 1977-05-13 1978-06-06 The United States Of America As Represented By The Secretary Of The Army Kilobar range stress gauge
FR2453396A1 (fr) * 1979-04-02 1980-10-31 Testut Aequitas Recepteur de charge a parallelogramme d'une seule piece et transducteur capacitif
DE3008573A1 (de) * 1980-03-06 1981-09-17 Robert Bosch Gmbh, 7000 Stuttgart Druckaufnehmer
US4649759A (en) * 1981-05-19 1987-03-17 Setra Systems, Inc. Force transducer
GB2123157B (en) * 1982-06-22 1986-10-15 Peter Caleb Frederi Wolfendale Load cells
DE3515349A1 (de) * 1985-04-27 1986-10-30 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Elektrischer geber zur messung mechanischer groessen
DE3635462A1 (de) * 1985-10-21 1987-04-23 Sharp Kk Feldeffekt-drucksensor
US4767973A (en) * 1987-07-06 1988-08-30 Sarcos Incorporated Systems and methods for sensing position and movement
US4873871A (en) * 1988-06-17 1989-10-17 Motorola, Inc. Mechanical field effect transistor sensor

Also Published As

Publication number Publication date
EP0391217A2 (fr) 1990-10-10
CA2013029C (fr) 1997-08-19
EP0391217B1 (fr) 1994-09-07
KR0172591B1 (ko) 1999-05-01
DE69012186T2 (de) 1995-02-02
JP2937399B2 (ja) 1999-08-23
ATE111216T1 (de) 1994-09-15
EP0391217A3 (fr) 1992-04-15
JPH0361861A (ja) 1991-03-18
US4964306A (en) 1990-10-23
DE69012186D1 (de) 1994-10-13
KR900016746A (ko) 1990-11-14

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