CA2184737A1 - Transducteurs revetus de carbone proche du diamant, pour supports d'enregistrement magnetiques - Google Patents

Transducteurs revetus de carbone proche du diamant, pour supports d'enregistrement magnetiques

Info

Publication number
CA2184737A1
CA2184737A1 CA 2184737 CA2184737A CA2184737A1 CA 2184737 A1 CA2184737 A1 CA 2184737A1 CA 2184737 CA2184737 CA 2184737 CA 2184737 A CA2184737 A CA 2184737A CA 2184737 A1 CA2184737 A1 CA 2184737A1
Authority
CA
Canada
Prior art keywords
transducer
ion beam
silicon
deposition
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2184737
Other languages
English (en)
Inventor
Bradley J. Knapp
Fred M. Kimock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2184737A1 publication Critical patent/CA2184737A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40—Protective measures on heads, e.g. against excessive temperature 
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

Cette invention se rapporte à un procédé pour fabriquer des ensembles transducteurs magnétiques revêtus de carbone proche du diamant, ces transducteurs ayant une plus grande résistance à l'usure et une durée de vie accrue. Sont décrits des transducteurs magnétiques ayant une structure de revêtement composite, constituée par une première couche intermédiaire améliorant l'adhérence, contenant du silicium, et par une couche supérieure de carbone proche du diamant, déposée par faisceaux ioniques. Selon le procédé décrit, la surface du substrat (3) du transducteur magnétique est bombarbée par des ions énergétiques provenant d'une source d'ions (4), afin de réaliser une attaque par pulvérisation cathodique, une couche intermédiaire contenant du silicium est déposée au moyen d'une source de faisceaux d'ions (7) et d'une cible (10), afin de déposer par pulvérisation cathodique ladite couche intermédiaire, et, une fois terminé le dépôt de la couche intermédiaire, une couche supérieure de carbone proche du diamant est déposée par faisceaux d'ions.
CA 2184737 1994-03-03 1995-03-01 Transducteurs revetus de carbone proche du diamant, pour supports d'enregistrement magnetiques Abandoned CA2184737A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20570194A 1994-03-03 1994-03-03
US205,701 1994-03-03

Publications (1)

Publication Number Publication Date
CA2184737A1 true CA2184737A1 (fr) 1995-09-08

Family

ID=22763287

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2184737 Abandoned CA2184737A1 (fr) 1994-03-03 1995-03-01 Transducteurs revetus de carbone proche du diamant, pour supports d'enregistrement magnetiques

Country Status (3)

Country Link
EP (1) EP0804630A4 (fr)
CA (1) CA2184737A1 (fr)
WO (1) WO1995023878A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741470B1 (fr) * 1995-11-22 1998-01-02 Commissariat Energie Atomique Procede de realisation d'une tete magnetique planaire et tete obtenue par ce procede
GB9519546D0 (en) * 1995-09-25 1995-11-29 Gec Marconi Avionics Holdings Depositing optical coatings
US5858477A (en) 1996-12-10 1999-01-12 Akashic Memories Corporation Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon
FR2754933B1 (fr) * 1996-10-23 1998-11-27 Schneider Electric Sa Relais de declenchement electromagnetique a revetement de carbone amorphe, et son procede de fabrication
US6322880B1 (en) * 1998-09-28 2001-11-27 Seagate Technology Llc Magneto-resistance recording media comprising a foundation layer and a C-overcoat
US6517956B1 (en) * 1999-05-03 2003-02-11 Seagate Technology Llc Magneto-resistance recording media comprising aluminum nitride corrosion barrier layer and a c-overcoat
JP3511371B2 (ja) * 2000-04-13 2004-03-29 アルプス電気株式会社 薄膜磁気ヘッド及びその製造方法
JP2003058872A (ja) 2001-08-21 2003-02-28 Sony Corp 指紋検出装置、その製造方法及び成膜装置
JP2005310300A (ja) * 2004-04-23 2005-11-04 Shinka Jitsugyo Kk 薄膜磁気ヘッド装置の製造方法、薄膜磁気ヘッド装置、該薄膜磁気ヘッド装置を備えたヘッドジンバルアセンブリ及び該ヘッドジンバルアセンブリを備えた磁気ディスク装置
US8815060B2 (en) 2004-08-30 2014-08-26 HGST Netherlands B.V. Method for minimizing magnetically dead interfacial layer during COC process
JP2006073069A (ja) 2004-08-31 2006-03-16 Toshiba Corp 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置
JP2006138404A (ja) 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
WO2009083193A2 (fr) * 2007-12-28 2009-07-09 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Procédé et appareil de traitement de surface par irradiation combinée de particules
US8472134B2 (en) 2011-08-02 2013-06-25 HGST Netherlands B.V. Air bearing surface overcoat with soft intermediate film, and methods of producing the same
CN107083536B (zh) * 2017-04-24 2019-11-29 信利光电股份有限公司 一种类金刚石复合薄膜及其制备方法
CN111560592B (zh) * 2020-06-16 2022-03-08 中国科学院宁波材料技术与工程研究所 一种长效耐磨防雾镜片涂层及其制备方法与应用

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565618A (en) * 1983-05-17 1986-01-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus for producing diamondlike carbon flakes
US5135808A (en) * 1990-09-27 1992-08-04 Diamonex, Incorporated Abrasion wear resistant coated substrate product
US5175658A (en) * 1990-12-27 1992-12-29 International Buiness Machines Corporation Thin film magnetic head having a protective coating and method for making same
US5159508A (en) * 1990-12-27 1992-10-27 International Business Machines Corporation Magnetic head slider having a protective coating thereon
US5336550A (en) * 1993-05-18 1994-08-09 Applied Magnetics Corporation Carbon overcoat for magnetic head sliders

Also Published As

Publication number Publication date
EP0804630A1 (fr) 1997-11-05
EP0804630A4 (fr) 1998-06-10
WO1995023878A1 (fr) 1995-09-08

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Legal Events

Date Code Title Description
FZDE Dead