CA947458A - Electroless deposition of ductile copper - Google Patents
Electroless deposition of ductile copperInfo
- Publication number
- CA947458A CA947458A CA095,339A CA95339A CA947458A CA 947458 A CA947458 A CA 947458A CA 95339 A CA95339 A CA 95339A CA 947458 A CA947458 A CA 947458A
- Authority
- CA
- Canada
- Prior art keywords
- electroless deposition
- ductile copper
- ductile
- copper
- electroless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 230000008021 deposition Effects 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6915718A NL6915718A (fr) | 1969-10-16 | 1969-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA947458A true CA947458A (en) | 1974-05-21 |
Family
ID=19808149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA095,339A Expired CA947458A (en) | 1969-10-16 | 1970-10-13 | Electroless deposition of ductile copper |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3804638A (fr) |
| AT (1) | AT311145B (fr) |
| AU (1) | AU2101370A (fr) |
| BE (1) | BE757573A (fr) |
| CA (1) | CA947458A (fr) |
| CH (1) | CH550255A (fr) |
| DE (1) | DE2049061C3 (fr) |
| FR (1) | FR2065996A5 (fr) |
| GB (1) | GB1330332A (fr) |
| HK (1) | HK49576A (fr) |
| NL (1) | NL6915718A (fr) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5627594B2 (fr) * | 1975-03-14 | 1981-06-25 | ||
| US4171225A (en) | 1976-01-23 | 1979-10-16 | U.S. Philips Corporation | Electroless copper plating solutions |
| US4211564A (en) * | 1978-05-09 | 1980-07-08 | Hitachi, Ltd. | Chemical copper plating solution |
| US4301196A (en) * | 1978-09-13 | 1981-11-17 | Kollmorgen Technologies Corp. | Electroless copper deposition process having faster plating rates |
| US4303443A (en) * | 1979-06-15 | 1981-12-01 | Hitachi, Ltd. | Electroless copper plating solution |
| JPS56156749A (en) * | 1980-05-08 | 1981-12-03 | Toshiba Corp | Chemical copper plating solution |
| CA1184359A (fr) * | 1981-10-23 | 1985-03-26 | Donald A. Arcilesi | Repression des impuretes metalliques en cuivrage non electrolytique |
| IT1157006B (it) * | 1982-03-09 | 1987-02-11 | Alfachimici Spa | Miscela stabilizzante per un bagno di rame chimico |
| US4548644A (en) * | 1982-09-28 | 1985-10-22 | Hitachi Chemical Company, Ltd. | Electroless copper deposition solution |
| US4563217A (en) * | 1983-07-25 | 1986-01-07 | Hitachi, Ltd. | Electroless copper plating solution |
| US4908242A (en) * | 1986-10-31 | 1990-03-13 | Kollmorgen Corporation | Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
| US5925403A (en) * | 1994-01-31 | 1999-07-20 | Matsushita Electric Works, Ltd. | Method of coating a copper film on a ceramic substrate |
| US6852152B2 (en) * | 2002-09-24 | 2005-02-08 | International Business Machines Corporation | Colloidal seed formulation for printed circuit board metallization |
| US20050016416A1 (en) * | 2003-07-23 | 2005-01-27 | Jon Bengston | Stabilizer for electroless copper plating solution |
| US7534298B2 (en) * | 2003-09-19 | 2009-05-19 | Applied Materials, Inc. | Apparatus and method of detecting the electroless deposition endpoint |
| US20050067297A1 (en) * | 2003-09-26 | 2005-03-31 | Innovative Technology Licensing, Llc | Copper bath for electroplating fine circuitry on semiconductor chips |
| US20060062897A1 (en) * | 2004-09-17 | 2006-03-23 | Applied Materials, Inc | Patterned wafer thickness detection system |
| CN1876891B (zh) * | 2005-06-10 | 2013-07-03 | 恩通公司 | 使不导电基底直接金属化的方法 |
| US20160273112A1 (en) * | 2013-03-27 | 2016-09-22 | Atotech Deutschland Gmbh | Electroless copper plating solution |
| US10060034B2 (en) | 2017-01-23 | 2018-08-28 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions |
| US10294569B2 (en) | 2017-10-06 | 2019-05-21 | Rohm And Haas Electronic Materials Llc | Stable electroless copper plating compositions and methods for electroless plating copper on substrates |
| US10655227B2 (en) | 2017-10-06 | 2020-05-19 | Rohm And Haas Electronic Materials Llc | Stable electroless copper plating compositions and methods for electroless plating copper on substrates |
| CN110498532A (zh) * | 2019-08-15 | 2019-11-26 | 深南电路股份有限公司 | 印制线路板废水的处理方法及处理装置 |
| CN113388829A (zh) * | 2021-06-11 | 2021-09-14 | 惠州金晟新电子科技有限公司 | 化学镀铜液以及利用化学镀铜液镀铜基板的方法 |
| EP4545680B1 (fr) * | 2023-10-26 | 2026-03-04 | Atotech Deutschland GmbH & Co. KG | Solution de cuivrage sans courant et sans nickel et procede d'utilisation de cette solution |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3075856A (en) * | 1958-03-31 | 1963-01-29 | Gen Electric | Copper plating process and solution |
| US3300335A (en) * | 1963-11-20 | 1967-01-24 | Dow Chemical Co | Electroless metal plating with foam |
| US3485643A (en) * | 1966-05-06 | 1969-12-23 | Photocircuits Corp | Electroless copper plating |
| US3472664A (en) * | 1966-09-15 | 1969-10-14 | Enthone | Inhibiting stardusting in electroless copper plating |
| US3515563A (en) * | 1967-12-28 | 1970-06-02 | Photocircuits Corp | Autocatalytic metal plating solutions |
-
0
- BE BE757573D patent/BE757573A/fr not_active IP Right Cessation
-
1969
- 1969-10-16 NL NL6915718A patent/NL6915718A/xx unknown
-
1970
- 1970-10-06 DE DE2049061A patent/DE2049061C3/de not_active Expired
- 1970-10-13 GB GB4859070A patent/GB1330332A/en not_active Expired
- 1970-10-13 AT AT922170A patent/AT311145B/de not_active IP Right Cessation
- 1970-10-13 CA CA095,339A patent/CA947458A/en not_active Expired
- 1970-10-13 AU AU21013/70A patent/AU2101370A/en not_active Expired
- 1970-10-13 CH CH1511570A patent/CH550255A/xx not_active IP Right Cessation
- 1970-10-15 FR FR7037240A patent/FR2065996A5/fr not_active Expired
-
1972
- 1972-04-06 US US00241806A patent/US3804638A/en not_active Expired - Lifetime
-
1976
- 1976-07-29 HK HK495/76*UA patent/HK49576A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2049061B2 (de) | 1980-07-24 |
| NL6915718A (fr) | 1971-04-20 |
| AU2101370A (en) | 1972-04-20 |
| CH550255A (de) | 1974-06-14 |
| DE2049061A1 (de) | 1971-04-29 |
| US3804638A (en) | 1974-04-16 |
| FR2065996A5 (fr) | 1971-08-06 |
| DE2049061C3 (de) | 1981-04-30 |
| BE757573A (fr) | 1971-04-15 |
| AT311145B (de) | 1973-10-25 |
| GB1330332A (en) | 1973-09-19 |
| HK49576A (en) | 1976-08-06 |
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