CH490678A - Jauge de mesure de la vitesse d'évaporation sous vide - Google Patents

Jauge de mesure de la vitesse d'évaporation sous vide

Info

Publication number
CH490678A
CH490678A CH454168A CH454168A CH490678A CH 490678 A CH490678 A CH 490678A CH 454168 A CH454168 A CH 454168A CH 454168 A CH454168 A CH 454168A CH 490678 A CH490678 A CH 490678A
Authority
CH
Switzerland
Prior art keywords
vacuum evaporation
evaporation rate
rate measurement
measurement gauge
gauge
Prior art date
Application number
CH454168A
Other languages
English (en)
Inventor
Zega Bodgan
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH576267A external-priority patent/CH475559A/fr
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Priority to CH454168A priority Critical patent/CH490678A/fr
Priority to GB1858368A priority patent/GB1194943A/en
Priority to DE19681773242 priority patent/DE1773242C3/de
Priority to JP2638368A priority patent/JPS5212590B1/ja
Priority to FR1577403D priority patent/FR1577403A/fr
Publication of CH490678A publication Critical patent/CH490678A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CH454168A 1967-04-21 1968-03-26 Jauge de mesure de la vitesse d'évaporation sous vide CH490678A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH454168A CH490678A (fr) 1967-04-21 1968-03-26 Jauge de mesure de la vitesse d'évaporation sous vide
GB1858368A GB1194943A (en) 1967-04-21 1968-04-19 Gauge for Measuring the Rate of Evaporation of Substances in an Evacuated Enclosure
DE19681773242 DE1773242C3 (de) 1967-04-21 1968-04-19 Meßgerät zur Ermittlung und Regelung der Verdampfungsgeschwindigkeit von im Vakuum verdampften Substanzen
JP2638368A JPS5212590B1 (fr) 1967-04-21 1968-04-20
FR1577403D FR1577403A (fr) 1967-04-21 1968-04-22

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH576267A CH475559A (fr) 1967-04-21 1967-04-21 Procédé de mesure de la vitesse d'évaporation sous vide, jauge pour la mise en oeuvre de ce procédé et application de ce procédé
CH454168A CH490678A (fr) 1967-04-21 1968-03-26 Jauge de mesure de la vitesse d'évaporation sous vide

Publications (1)

Publication Number Publication Date
CH490678A true CH490678A (fr) 1970-05-15

Family

ID=25695723

Family Applications (1)

Application Number Title Priority Date Filing Date
CH454168A CH490678A (fr) 1967-04-21 1968-03-26 Jauge de mesure de la vitesse d'évaporation sous vide

Country Status (5)

Country Link
JP (1) JPS5212590B1 (fr)
CH (1) CH490678A (fr)
DE (1) DE1773242C3 (fr)
FR (1) FR1577403A (fr)
GB (1) GB1194943A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225422A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd 薄膜形成方法およびその装置
DE3521549A1 (de) * 1985-06-15 1986-12-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur messung und/oder regelung eines teilchenstromes
DE60233607D1 (de) * 2002-05-28 2009-10-15 Inficon Inc Ionisationsmesser und Verfahren zur Ermittlung eines Gesamtionendrucks

Also Published As

Publication number Publication date
DE1773242C3 (de) 1974-08-08
JPS5212590B1 (fr) 1977-04-08
DE1773242B2 (de) 1974-01-10
GB1194943A (en) 1970-06-17
FR1577403A (fr) 1969-08-08
DE1773242A1 (de) 1971-10-28

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Legal Events

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PLZ Patent of addition ceased