CH537096A - Appareil de masquage optique d'une couche photosensible - Google Patents

Appareil de masquage optique d'une couche photosensible

Info

Publication number: CH537096A
Authority: CH; Switzerland
Prior art keywords: objective; semi; objectives; mask; optical masking
Prior art date: 1971-03-26

Application number

CH1275771A

Other languages

English (en)

French (fr)

Inventor

Raymond Delmas Jean

Original Assignee

Raymond Delmas Jean

Microlec S A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-03-26

Filing date

1971-08-31

Publication date

1973-05-15

1971-03-26 Priority claimed from FR7110838A external-priority patent/FR2130955A6/fr

1971-07-16 Priority claimed from FR7126053A external-priority patent/FR2146512A6/fr

1971-08-31 Application filed by Raymond Delmas Jean, Microlec S A filed Critical Raymond Delmas Jean

1973-05-15 Publication of CH537096A publication Critical patent/CH537096A/fr

Links

230000003287 optical effect Effects 0.000 title claims description 45
230000000873 masking effect Effects 0.000 title claims description 18
230000005855 radiation Effects 0.000 claims description 14
239000012528 membrane Substances 0.000 claims description 4
239000004065 semiconductor Substances 0.000 claims description 4
239000000463 material Substances 0.000 claims description 3
230000001678 irradiating effect Effects 0.000 claims 1
230000004304 visual acuity Effects 0.000 description 13
239000011347 resin Substances 0.000 description 7
229920005989 resin Polymers 0.000 description 7
230000004075 alteration Effects 0.000 description 6
230000008901 benefit Effects 0.000 description 6
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
229910052751 metal Inorganic materials 0.000 description 4
239000002184 metal Substances 0.000 description 4
238000000034 method Methods 0.000 description 4
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
239000011521 glass Substances 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
229910044991 metal oxide Inorganic materials 0.000 description 3
150000004706 metal oxides Chemical class 0.000 description 3
239000010703 silicon Substances 0.000 description 3
229910052814 silicon oxide Inorganic materials 0.000 description 3
201000009310 astigmatism Diseases 0.000 description 2
229910052804 chromium Inorganic materials 0.000 description 2
239000011651 chromium Substances 0.000 description 2
239000000428 dust Substances 0.000 description 2
238000005286 illumination Methods 0.000 description 2
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
230000003071 parasitic effect Effects 0.000 description 2
230000008569 process Effects 0.000 description 2
239000002775 capsule Substances 0.000 description 1
230000001143 conditioned effect Effects 0.000 description 1
230000007547 defect Effects 0.000 description 1
230000002542 deteriorative effect Effects 0.000 description 1
230000001627 detrimental effect Effects 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000000839 emulsion Substances 0.000 description 1
230000006872 improvement Effects 0.000 description 1
239000012535 impurity Substances 0.000 description 1
229910052753 mercury Inorganic materials 0.000 description 1
230000009467 reduction Effects 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
238000001179 sorption measurement Methods 0.000 description 1
230000003595 spectral effect Effects 0.000 description 1
230000008022 sublimation Effects 0.000 description 1
238000000859 sublimation Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
239000012780 transparent material Substances 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
238000007738 vacuum evaporation Methods 0.000 description 1

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

CH1275771A 1971-03-26 1971-08-31 Appareil de masquage optique d'une couche photosensible CH537096A (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR7110838A FR2130955A6 (de)	1971-03-26	1971-03-26
FR7126053A FR2146512A6 (de)	1971-07-16	1971-07-16

Publications (1)

Publication Number	Publication Date
CH537096A true CH537096A (fr)	1973-05-15

Family

ID=26216288

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH1275771A CH537096A (fr)	1971-03-26	1971-08-31	Appareil de masquage optique d'une couche photosensible

Country Status (5)

Country	Link
BE (1)	BE772057A (de)
CH (1)	CH537096A (de)
DD (1)	DD94438A5 (de)
IT (1)	IT939372B (de)
NL (1)	NL7112018A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
AT406100B (de) *	1996-08-08	2000-02-25	Thallner Erich	Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen

1971
- 1971-08-31 CH CH1275771A patent/CH537096A/fr not_active IP Right Cessation
- 1971-09-01 BE BE772057A patent/BE772057A/xx unknown
- 1971-09-01 NL NL7112018A patent/NL7112018A/xx unknown
- 1971-09-03 DD DD15752971A patent/DD94438A5/xx unknown
- 1971-09-03 IT IT5265471A patent/IT939372B/it active

Also Published As

Publication number	Publication date
NL7112018A (de)	1972-09-28
BE772057A (fr)	1972-01-17
DD94438A5 (de)	1972-12-12
IT939372B (it)	1973-02-10

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Legal Events

Date	Code	Title	Description
1981-04-30	PL	Patent ceased