CH624435A5 - - Google Patents

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Publication number: CH624435A5
Authority: CH; Switzerland
Prior art keywords: electron beam; evaporated; holding; rod; holding rod
Prior art date: 1977-11-22

Application number

CH1423577A

Other languages

German (de)

English (en)

Inventor

Erich Zollinger

Original Assignee

Balzers Hochvakuum

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-11-22

Filing date

1977-11-22

Publication date

1981-07-31

1977-11-22 Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum

1977-11-22 Priority to CH1423577A priority Critical patent/CH624435A5/de

1978-01-18 Priority to NL7800612A priority patent/NL7800612A/xx

1978-11-16 Priority to IT29838/78A priority patent/IT1101171B/it

1978-11-17 Priority to DE2849933A priority patent/DE2849933C2/de

1978-11-17 Priority to US05/961,544 priority patent/US4221629A/en

1978-11-20 Priority to JP14324578A priority patent/JPS5499562A/ja

1978-11-20 Priority to GB7845224A priority patent/GB2008849B/en

1978-11-21 Priority to FR7832805A priority patent/FR2409596A1/fr

1981-07-31 Publication of CH624435A5 publication Critical patent/CH624435A5/de

Links

238000010894 electron beam technology Methods 0.000 claims 15
239000000463 material Substances 0.000 claims 13
238000005566 electron beam evaporation Methods 0.000 claims 3
238000001704 evaporation Methods 0.000 claims 3
230000008020 evaporation Effects 0.000 claims 3
238000007738 vacuum evaporation Methods 0.000 claims 3
238000007740 vapor deposition Methods 0.000 claims 2
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 claims 1
239000000956 alloy Substances 0.000 claims 1
229910045601 alloy Inorganic materials 0.000 claims 1
238000004140 cleaning Methods 0.000 claims 1
239000002826 coolant Substances 0.000 claims 1
238000001816 cooling Methods 0.000 claims 1
229910052802 copper Inorganic materials 0.000 claims 1
239000010949 copper Substances 0.000 claims 1
238000006073 displacement reaction Methods 0.000 claims 1
239000000203 mixture Substances 0.000 claims 1
238000001556 precipitation Methods 0.000 claims 1
239000000758 substrate Substances 0.000 claims 1
238000009834 vaporization Methods 0.000 claims 1
230000008016 vaporization Effects 0.000 claims 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S159/00—Concentrating evaporators
- Y10S159/26—Electric field

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Physical Vapour Deposition (AREA)
Electrodes Of Semiconductors (AREA)
Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

CH1423577A 1977-11-22 1977-11-22 CH624435A5 (2)

Priority Applications (8)

Application Number	Priority Date	Filing Date	Title
CH1423577A CH624435A5 (2)	1977-11-22	1977-11-22
NL7800612A NL7800612A (nl)	1977-11-22	1978-01-18	Elektronenstraalverdampingsinrichting voor vacuumopdampinstallaties.
IT29838/78A IT1101171B (it)	1977-11-22	1978-11-16	Dispositivo di povlerizzazione a fascio elettronico per impianti di spruzzamento catodico sotto vuoto
DE2849933A DE2849933C2 (de)	1977-11-22	1978-11-17	Elektronenstrahlverdampfungseinrichtung für Vakuumaufdampfanlagen
US05/961,544 US4221629A (en)	1977-11-22	1978-11-17	Electron beam evaporation device for vacuum evaporators
JP14324578A JPS5499562A (en)	1977-11-22	1978-11-20	Device for evaporating via electron beam for vacuum deposition
GB7845224A GB2008849B (en)	1977-11-22	1978-11-20	Electron beam evaporation device for evaporation coating apparatus
FR7832805A FR2409596A1 (fr)	1977-11-22	1978-11-21	Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH1423577A CH624435A5 (2)	1977-11-22	1977-11-22

Publications (1)

Publication Number	Publication Date
CH624435A5 true CH624435A5 (2)	1981-07-31

Family

ID=4399104

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH1423577A CH624435A5 (2)	1977-11-22	1977-11-22

Country Status (8)

Country	Link
US (1)	US4221629A (2)
JP (1)	JPS5499562A (2)
CH (1)	CH624435A5 (2)
DE (1)	DE2849933C2 (2)
FR (1)	FR2409596A1 (2)
GB (1)	GB2008849B (2)
IT (1)	IT1101171B (2)
NL (1)	NL7800612A (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH663037A5 (de) *	1985-02-05	1987-11-13	Balzers Hochvakuum	Dampfquelle fuer vakuumbeschichtungsanlagen.
US20050020368A1 (en) *	1998-04-15	2005-01-27	Burkholder Roy A.	Bowling lane advertising and method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE553562A (2) *	1955-12-20	1900-01-01
US3202794A (en) *	1963-02-18	1965-08-24	Thermionics Lab Inc	Permanent magnet transverse electron beam evaporation source
US3277865A (en) *	1963-04-01	1966-10-11	United States Steel Corp	Metal-vapor source with heated reflecting shield
US3389210A (en) *	1965-03-29	1968-06-18	Everette M. Whitson	Multiple crucible for a permanent magnet transverse electron beam evaporation source
DE1521252B2 (de) *	1966-05-03	1969-10-30	Farbenfabriken Bayer Aktiengesellschaft, 5090 Leverkusen	Vorrichtung zum Verdampfen von hochschmelzenden Materialien wie Quarz od. dgl., insbesondere zum Aufdampfen von Schichten
BE754553A (fr) *	1969-08-13	1971-01-18	Leybold Heraeus Verwaltung	Procede et dispositif d'evaporation sous vide de corps non metalliques a point de fusion eleve
US3582529A (en) *	1969-09-24	1971-06-01	Air Reduction	Electron beam heating apparatus and control system therein
GB1340701A (en) *	1971-04-19	1973-12-12	Craswell K B	Apparatus for use in coating a body with an evaporant

1977
- 1977-11-22 CH CH1423577A patent/CH624435A5/de not_active IP Right Cessation
1978
- 1978-01-18 NL NL7800612A patent/NL7800612A/xx not_active Application Discontinuation
- 1978-11-16 IT IT29838/78A patent/IT1101171B/it active
- 1978-11-17 DE DE2849933A patent/DE2849933C2/de not_active Expired
- 1978-11-17 US US05/961,544 patent/US4221629A/en not_active Expired - Lifetime
- 1978-11-20 JP JP14324578A patent/JPS5499562A/ja active Pending
- 1978-11-20 GB GB7845224A patent/GB2008849B/en not_active Expired
- 1978-11-21 FR FR7832805A patent/FR2409596A1/fr active Granted

Also Published As

Publication number	Publication date
JPS5499562A (en)	1979-08-06
NL7800612A (nl)	1979-05-25
IT7829838A0 (it)	1978-11-16
FR2409596A1 (fr)	1979-06-15
GB2008849A (en)	1979-06-06
FR2409596B1 (2)	1983-12-09
GB2008849B (en)	1982-03-10
US4221629A (en)	1980-09-09
IT1101171B (it)	1985-09-28
DE2849933A1 (de)	1979-05-23
DE2849933C2 (de)	1983-01-20

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Legal Events

Date	Code	Title	Description
1992-07-31	PL	Patent ceased
2024-10-31	PL	Patent ceased