FR2409596A1 - Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide - Google Patents

Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide

Info

Publication number: FR2409596A1
Authority: FR; France
Prior art keywords: electronic beam; vacuum evaporation; deposit systems; vacuum; evaporation device
Prior art date: 1977-11-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

FR7832805A

Other languages

English (en)

French (fr)

Other versions

FR2409596B1 (2

Inventor

Erich Sollinger

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

OC Oerlikon Balzers AG

Original Assignee

Balzers AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-11-22

Filing date

1978-11-21

Publication date

1979-06-15

1978-11-21 Application filed by Balzers AG filed Critical Balzers AG

1979-06-15 Publication of FR2409596A1 publication Critical patent/FR2409596A1/fr

1983-12-09 Application granted granted Critical

1983-12-09 Publication of FR2409596B1 publication Critical patent/FR2409596B1/fr

Status Granted legal-status Critical Current

Links

238000007738 vacuum evaporation Methods 0.000 title abstract 3
238000001704 evaporation Methods 0.000 title abstract 2
230000008020 evaporation Effects 0.000 title abstract 2
239000000463 material Substances 0.000 abstract 3
238000005452 bending Methods 0.000 abstract 1
VJYFKVYYMZPMAB-UHFFFAOYSA-N ethoprophos Chemical compound CCCSP(=O)(OCC)SCCC VJYFKVYYMZPMAB-UHFFFAOYSA-N 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S159/00—Concentrating evaporators
- Y10S159/26—Electric field

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Physical Vapour Deposition (AREA)
Electrodes Of Semiconductors (AREA)
Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

FR7832805A 1977-11-22 1978-11-21 Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide Granted FR2409596A1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH1423577A CH624435A5 (2)	1977-11-22	1977-11-22

Publications (2)

Publication Number	Publication Date
FR2409596A1 true FR2409596A1 (fr)	1979-06-15
FR2409596B1 FR2409596B1 (2)	1983-12-09

Family

ID=4399104

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR7832805A Granted FR2409596A1 (fr)	1977-11-22	1978-11-21	Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide

Country Status (8)

Country	Link
US (1)	US4221629A (2)
JP (1)	JPS5499562A (2)
CH (1)	CH624435A5 (2)
DE (1)	DE2849933C2 (2)
FR (1)	FR2409596A1 (2)
GB (1)	GB2008849B (2)
IT (1)	IT1101171B (2)
NL (1)	NL7800612A (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH663037A5 (de) *	1985-02-05	1987-11-13	Balzers Hochvakuum	Dampfquelle fuer vakuumbeschichtungsanlagen.
US20050020368A1 (en) *	1998-04-15	2005-01-27	Burkholder Roy A.	Bowling lane advertising and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB826132A (en) *	1955-12-20	1959-12-31	Nat Res Dev	Zone melting and refining of refractory materials
US3389210A (en) *	1965-03-29	1968-06-18	Everette M. Whitson	Multiple crucible for a permanent magnet transverse electron beam evaporation source
DE1521252A1 (de) *	1966-05-03	1969-05-08	Bayer Ag	Vorrichtung zum Verdampfen von hochschmelzenden Materialien wie Quarz od.dgl
DE1941215B2 (de) *	1969-08-13	1971-04-08	Leybold Heraeus Gmbh & Co Kg	Verfahren und anordnung zum vakuumaufdampfen von nicht metallischen hochschmelzenden stoffen mittels elektronen strahlen
GB1340701A (en) *	1971-04-19	1973-12-12	Craswell K B	Apparatus for use in coating a body with an evaporant

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3202794A (en) *	1963-02-18	1965-08-24	Thermionics Lab Inc	Permanent magnet transverse electron beam evaporation source
US3277865A (en) *	1963-04-01	1966-10-11	United States Steel Corp	Metal-vapor source with heated reflecting shield
US3582529A (en) *	1969-09-24	1971-06-01	Air Reduction	Electron beam heating apparatus and control system therein

1977
- 1977-11-22 CH CH1423577A patent/CH624435A5/de not_active IP Right Cessation
1978
- 1978-01-18 NL NL7800612A patent/NL7800612A/xx not_active Application Discontinuation
- 1978-11-16 IT IT29838/78A patent/IT1101171B/it active
- 1978-11-17 DE DE2849933A patent/DE2849933C2/de not_active Expired
- 1978-11-17 US US05/961,544 patent/US4221629A/en not_active Expired - Lifetime
- 1978-11-20 JP JP14324578A patent/JPS5499562A/ja active Pending
- 1978-11-20 GB GB7845224A patent/GB2008849B/en not_active Expired
- 1978-11-21 FR FR7832805A patent/FR2409596A1/fr active Granted

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB826132A (en) *	1955-12-20	1959-12-31	Nat Res Dev	Zone melting and refining of refractory materials
US3389210A (en) *	1965-03-29	1968-06-18	Everette M. Whitson	Multiple crucible for a permanent magnet transverse electron beam evaporation source
DE1521252A1 (de) *	1966-05-03	1969-05-08	Bayer Ag	Vorrichtung zum Verdampfen von hochschmelzenden Materialien wie Quarz od.dgl
DE1941215B2 (de) *	1969-08-13	1971-04-08	Leybold Heraeus Gmbh & Co Kg	Verfahren und anordnung zum vakuumaufdampfen von nicht metallischen hochschmelzenden stoffen mittels elektronen strahlen
GB1340701A (en) *	1971-04-19	1973-12-12	Craswell K B	Apparatus for use in coating a body with an evaporant

Also Published As

Publication number	Publication date
JPS5499562A (en)	1979-08-06
NL7800612A (nl)	1979-05-25
IT7829838A0 (it)	1978-11-16
GB2008849A (en)	1979-06-06
FR2409596B1 (2)	1983-12-09
GB2008849B (en)	1982-03-10
US4221629A (en)	1980-09-09
IT1101171B (it)	1985-09-28
DE2849933A1 (de)	1979-05-23
CH624435A5 (2)	1981-07-31
DE2849933C2 (de)	1983-01-20

Similar Documents

Publication	Publication Date	Title
FR2534933B1 (fr)	1985-07-19	Cellule d'evaporation par effusion pour des installations de metallisation sous vide
FR2439244A1 (2)	1980-05-16
CA923568A (en)	1973-03-27	Procede et dispositif pour l'obtention d'une soudure rectiligne sur des pieces en longueurs illimitees
JPS5274580A (en)	1977-06-22	Boat for vacuum evaporation
FR2409596A1 (fr)	1979-06-15	Dispositif d'evaporation a faisceau electronique pour des installations de depot par evaporation sous vide
BE846470A (fr)	1977-01-17	Dispositif de changement d'electrodes pour installation de refusion sous laitier
FR2733253B1 (fr)	1997-06-13	Dispositif pour deposer un materiau par evaporation sur des substrats de grande surface
BE879585A (fr)	1980-02-15	Procede de soudage par faisceau electronique, sous pression assez elevee de 10 mbar et au dela et dispositif pour execution de ce procede
BE834557A (fr)	1976-04-16	Creuset vaporisateur pour installations de metallisation sous vide
FR2531104B1 (fr)	1989-07-28	Creuset de vaporisation pour installations de depot de materiaux vaporises sous vide
JPS5250615A (en)	1977-04-22	Outline compensation circuit
JPS5419249A (en)	1979-02-13	Heat insulating device
JPS5296414A (en)	1977-08-13	Supporting pipes
JPS52112305A (en)	1977-09-20	Electromagnetic pick-up
JPS52150959A (en)	1977-12-15	Electronic microscope or its similar device
JPS547277A (en)	1979-01-19	Fine adjustment unit for stage
JPS542069A (en)	1979-01-09	Semiconductor device
JPS56149929A (en)	1981-11-20	Paper feeder
JPS52107599A (en)	1977-09-09	Installation device for ferrite magnet
JPS5434152A (en)	1979-03-13	High frequency heating device door sealing device
JPS5582075A (en)	1980-06-20	Dial plate for portable watch
SU1560023A1 (ru)	1994-04-30	Кварцевый резонатор
JPS5457730A (en)	1979-05-09	Structure of crawler
JPS5570532A (en)	1980-05-28	Device for positioning surface material
JPS5565928A (en)	1980-05-17	Liquid crystal display device

Legal Events

Date	Code	Title	Description
1986-09-19	ST	Notification of lapse