CL2016002175A1 - Metodo para la correccion automatica del astigmatismo. - Google Patents
Metodo para la correccion automatica del astigmatismo.Info
- Publication number
- CL2016002175A1 CL2016002175A1 CL2016002175A CL2016002175A CL2016002175A1 CL 2016002175 A1 CL2016002175 A1 CL 2016002175A1 CL 2016002175 A CL2016002175 A CL 2016002175A CL 2016002175 A CL2016002175 A CL 2016002175A CL 2016002175 A1 CL2016002175 A1 CL 2016002175A1
- Authority
- CL
- Chile
- Prior art keywords
- vector
- image
- astigmator
- configuration
- fourier
- Prior art date
Links
- 201000009310 astigmatism Diseases 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 238000001228 spectrum Methods 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/153—Correcting image defects, e.g. stigmators
- H01J2237/1532—Astigmatism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/22—Treatment of data
- H01J2237/221—Image processing
- H01J2237/223—Fourier techniques
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Image Analysis (AREA)
- Optical Head (AREA)
- Image Processing (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
<p>EL METODO ES PARA LA CORRECION AUTOMATICA DEL ASTIGMATISMO DE UN SISTEMA DE LENTE, SE PROVEE UNA PRIMERA IMAGEN QUE NO ESTA ENFOCADA EN UNA PRIMERA CONFIGURACION DE UN ASTIGMADOR DE UN CONJUNTO DE LENTES, UN DISPOSITIVO DE CALCULO CALCULA UNA PRIMERA IMAGEN DE ESPECTRO DE FOURIER CORRESPONDIENTE, SE DETERMINA UNA DISTRIBUCION Y UNA DIRECCION DE PIXELES DE LA IMAGEN DE ESPECTRO DE FOURIER AL CALCULAR UN PRIMER VECTOR Y UN SEGUNDO VECTOR EL PRIMER VECTOR SE COMPARA CON EL SEGUNDO VECTOR, EL SISTEMA DE LENTES SE CAMBIA A PARTIR DE UNA PRIMERA CONFIGURACION DEL ASTIGMADOR A UNA SEGUNDA CONFIGURACION DEL ASTIGMADOR PARA PROVEER UNA SEGUNDA IMAGEN, SE CALCULA UNA SEGUNDA IMAGEN DE ESPECTRO DE FOURIER CORRESPONDIENTE, LA DISTRIBUCION Y LA DIRECCION DE LOS PIXELES DE LA SEGUNDA IMAGEN DE ESPECTRO DE FOURIER SE DETERMINA AL CALCULAR UN TERCER VECTOR Y UN CUARTO VECTOR, EL TERCER VECTOR SE COMPARA CON EL CUARTO VECTOR, SE SELECCIONA LA IMAGEN QUE TIENE LA RELACION O PROPORCION DE VECTOR MAS BAJA.</p>
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462027505P | 2014-07-22 | 2014-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CL2016002175A1 true CL2016002175A1 (es) | 2016-12-23 |
Family
ID=55163506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CL2016002175A CL2016002175A1 (es) | 2014-07-22 | 2016-08-30 | Metodo para la correccion automatica del astigmatismo. |
Country Status (23)
| Country | Link |
|---|---|
| US (1) | US9711323B2 (es) |
| EP (1) | EP3172757B1 (es) |
| JP (1) | JP6684717B2 (es) |
| KR (1) | KR102193285B1 (es) |
| CN (1) | CN106062917B (es) |
| AP (1) | AP2016009363A0 (es) |
| AU (1) | AU2015294547B2 (es) |
| BR (1) | BR112016026681B1 (es) |
| CA (1) | CA2934972C (es) |
| CL (1) | CL2016002175A1 (es) |
| DK (1) | DK3172757T3 (es) |
| EA (1) | EA035058B1 (es) |
| ES (1) | ES2776453T3 (es) |
| HU (1) | HUE048003T2 (es) |
| IL (1) | IL247695B (es) |
| MA (1) | MA39558B1 (es) |
| MX (1) | MX2017000334A (es) |
| MY (1) | MY181462A (es) |
| PL (1) | PL3172757T3 (es) |
| PT (1) | PT3172757T (es) |
| SG (1) | SG11201606864WA (es) |
| UA (1) | UA121864C2 (es) |
| WO (1) | WO2016014177A1 (es) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12073541B2 (en) * | 2019-08-09 | 2024-08-27 | The Board Of Regents Of The University Of Texas System | Methods for high-performance electron microscopy |
| CN111477529B (zh) * | 2020-05-19 | 2024-05-14 | 桂林狮达技术股份有限公司 | 自动消像散电子枪及电子枪自动消像散方法 |
| CN112924477B (zh) * | 2021-01-23 | 2022-02-11 | 北京大学 | 电镜定量消除像散的方法 |
| EP4191637A1 (en) * | 2021-12-02 | 2023-06-07 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Method for automatic focusing and astigmatism correction for an electron microscope |
| EP4531072A1 (en) * | 2023-09-28 | 2025-04-02 | ASML Netherlands B.V. | Method of assessing a charged particle beam, and method of assessing a beam grid |
| CN117612018B (zh) * | 2024-01-23 | 2024-04-05 | 中国科学院长春光学精密机械与物理研究所 | 用于光学遥感载荷像散的智能判别方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4180738A (en) * | 1977-07-30 | 1979-12-25 | National Research Development Corporation | Astigmatism in electron beam probe instruments |
| JPS5775473U (es) * | 1980-10-24 | 1982-05-10 | ||
| DE3587871T2 (de) * | 1984-12-10 | 1994-10-13 | Fuji Photo Film Co Ltd | Verfahren zur Feststellung eines Fokussierungsfehlers eines elektronen-mikroskopischen Bildes. |
| JPH07220669A (ja) * | 1994-01-31 | 1995-08-18 | Jeol Ltd | 非点・入射軸補正装置を備えた電子顕微鏡 |
| JP3340327B2 (ja) * | 1996-09-30 | 2002-11-05 | 株式会社東芝 | 非点収差補正方法及び非点収差補正装置 |
| US20060060781A1 (en) * | 1997-08-11 | 2006-03-23 | Masahiro Watanabe | Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection |
| JP4069545B2 (ja) * | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
| US6552340B1 (en) * | 2000-10-12 | 2003-04-22 | Nion Co. | Autoadjusting charged-particle probe-forming apparatus |
| JP3951590B2 (ja) * | 2000-10-27 | 2007-08-01 | 株式会社日立製作所 | 荷電粒子線装置 |
| JP3645198B2 (ja) * | 2001-06-15 | 2005-05-11 | 独立行政法人理化学研究所 | 電子顕微鏡及びその焦点位置制御方法 |
| KR101060982B1 (ko) * | 2003-11-28 | 2011-08-31 | 가부시키가이샤 니콘 | 노광 방법 및 디바이스 제조 방법, 노광 장치, 그리고 프로그램을 기록한 컴퓨터 판독가능 기록 매체 |
| WO2006078687A2 (en) * | 2005-01-19 | 2006-07-27 | Optopo Inc. D/B/A. Centice Corporation | Static two-dimensional aperture coding for multimodal multiplex spectroscopy |
| US7619220B2 (en) * | 2005-11-30 | 2009-11-17 | Jeol Ltd. | Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
| JP4790567B2 (ja) * | 2005-11-30 | 2011-10-12 | 日本電子株式会社 | ロンチグラムを用いた収差測定方法及び収差補正方法及び電子顕微鏡 |
| JP2010504129A (ja) * | 2006-09-22 | 2010-02-12 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 肺結節の高度コンピュータ支援診断 |
| EP2511936B1 (en) * | 2011-04-13 | 2013-10-02 | Fei Company | Distortion free stigmation of a TEM |
| EP2584584A1 (en) * | 2011-10-19 | 2013-04-24 | FEI Company | Method for adjusting a STEM equipped with an aberration corrector |
-
2015
- 2015-06-17 DK DK15824198.4T patent/DK3172757T3/da active
- 2015-06-17 AP AP2016009363A patent/AP2016009363A0/en unknown
- 2015-06-17 SG SG11201606864WA patent/SG11201606864WA/en unknown
- 2015-06-17 UA UAA201613146A patent/UA121864C2/uk unknown
- 2015-06-17 KR KR1020167032232A patent/KR102193285B1/ko not_active Expired - Fee Related
- 2015-06-17 EA EA201600651A patent/EA035058B1/ru not_active IP Right Cessation
- 2015-06-17 MY MYPI2016703717A patent/MY181462A/en unknown
- 2015-06-17 US US15/124,099 patent/US9711323B2/en not_active Expired - Fee Related
- 2015-06-17 PL PL15824198T patent/PL3172757T3/pl unknown
- 2015-06-17 CA CA2934972A patent/CA2934972C/en active Active
- 2015-06-17 HU HUE15824198A patent/HUE048003T2/hu unknown
- 2015-06-17 CN CN201580006977.7A patent/CN106062917B/zh not_active Expired - Fee Related
- 2015-06-17 MX MX2017000334A patent/MX2017000334A/es active IP Right Grant
- 2015-06-17 JP JP2016555328A patent/JP6684717B2/ja not_active Expired - Fee Related
- 2015-06-17 PT PT158241984T patent/PT3172757T/pt unknown
- 2015-06-17 WO PCT/US2015/036117 patent/WO2016014177A1/en not_active Ceased
- 2015-06-17 EP EP15824198.4A patent/EP3172757B1/en active Active
- 2015-06-17 MA MA39558A patent/MA39558B1/fr unknown
- 2015-06-17 AU AU2015294547A patent/AU2015294547B2/en not_active Ceased
- 2015-06-17 BR BR112016026681-1A patent/BR112016026681B1/pt not_active IP Right Cessation
- 2015-06-17 ES ES15824198T patent/ES2776453T3/es active Active
-
2016
- 2016-08-30 CL CL2016002175A patent/CL2016002175A1/es unknown
- 2016-09-08 IL IL247695A patent/IL247695B/en active IP Right Grant
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