CN1037615A - 主要用于电子显微镜的电子枪组件 - Google Patents

主要用于电子显微镜的电子枪组件 Download PDF

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Publication number
CN1037615A
CN1037615A CN 89101491 CN89101491A CN1037615A CN 1037615 A CN1037615 A CN 1037615A CN 89101491 CN89101491 CN 89101491 CN 89101491 A CN89101491 A CN 89101491A CN 1037615 A CN1037615 A CN 1037615A
Authority
CN
China
Prior art keywords
high pressure
electron gun
lining
pressure vacuum
gun structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 89101491
Other languages
English (en)
Chinese (zh)
Inventor
埃米尔·弗拉特尼切克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TESLA
Tesla Koncernovy Podnik
Original Assignee
TESLA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TESLA filed Critical TESLA
Publication of CN1037615A publication Critical patent/CN1037615A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CN 89101491 1988-04-08 1989-03-15 主要用于电子显微镜的电子枪组件 Pending CN1037615A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CS2400-88 1988-04-08
CS882400A CS268377B1 (en) 1988-04-08 1988-04-08 Electron gun for electron microscope

Publications (1)

Publication Number Publication Date
CN1037615A true CN1037615A (zh) 1989-11-29

Family

ID=5361045

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 89101491 Pending CN1037615A (zh) 1988-04-08 1989-03-15 主要用于电子显微镜的电子枪组件

Country Status (5)

Country Link
JP (1) JPH01298631A (cs)
CN (1) CN1037615A (cs)
CS (1) CS268377B1 (cs)
DE (1) DE3911446A1 (cs)
GB (1) GB2217104A (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE903017C (de) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Herstellung kleiner Kugeln aus hochschmelzbaren Materialien
US3636346A (en) * 1968-03-17 1972-01-18 Hitachi Ltd Electron beam generator for electron microscope or the like apparatus
BE793443A (fr) * 1971-12-29 1973-04-16 Aquitaine Petrole Tube a gaz d'emission d'electrons pour spectrometrie a rayons xpar excitation directe
JPS5937540B2 (ja) * 1974-09-06 1984-09-10 株式会社日立製作所 電界放射形走査電子顕微鏡

Also Published As

Publication number Publication date
CS268377B1 (en) 1990-03-14
DE3911446A1 (de) 1989-10-19
CS240088A1 (en) 1989-08-14
GB8907103D0 (en) 1989-05-10
JPH01298631A (ja) 1989-12-01
GB2217104A (en) 1989-10-18

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C01 Deemed withdrawal of patent application (patent law 1993)
WD01 Invention patent application deemed withdrawn after publication