JPH01298631A - 電子銃 - Google Patents
電子銃Info
- Publication number
- JPH01298631A JPH01298631A JP1088164A JP8816489A JPH01298631A JP H01298631 A JPH01298631 A JP H01298631A JP 1088164 A JP1088164 A JP 1088164A JP 8816489 A JP8816489 A JP 8816489A JP H01298631 A JPH01298631 A JP H01298631A
- Authority
- JP
- Japan
- Prior art keywords
- bushing
- electron gun
- high vacuum
- screw
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract description 2
- 239000013585 weight reducing agent Substances 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS2400-88 | 1988-04-08 | ||
| CS882400A CS268377B1 (en) | 1988-04-08 | 1988-04-08 | Electron gun for electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01298631A true JPH01298631A (ja) | 1989-12-01 |
Family
ID=5361045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1088164A Pending JPH01298631A (ja) | 1988-04-08 | 1989-04-10 | 電子銃 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPH01298631A (cs) |
| CN (1) | CN1037615A (cs) |
| CS (1) | CS268377B1 (cs) |
| DE (1) | DE3911446A1 (cs) |
| GB (1) | GB2217104A (cs) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE903017C (de) * | 1951-01-31 | 1954-02-01 | Sueddeutsche Lab G M B H | Herstellung kleiner Kugeln aus hochschmelzbaren Materialien |
| US3636346A (en) * | 1968-03-17 | 1972-01-18 | Hitachi Ltd | Electron beam generator for electron microscope or the like apparatus |
| BE793443A (fr) * | 1971-12-29 | 1973-04-16 | Aquitaine Petrole | Tube a gaz d'emission d'electrons pour spectrometrie a rayons xpar excitation directe |
| JPS5937540B2 (ja) * | 1974-09-06 | 1984-09-10 | 株式会社日立製作所 | 電界放射形走査電子顕微鏡 |
-
1988
- 1988-04-08 CS CS882400A patent/CS268377B1/cs unknown
-
1989
- 1989-03-15 CN CN 89101491 patent/CN1037615A/zh active Pending
- 1989-03-29 GB GB8907103A patent/GB2217104A/en not_active Withdrawn
- 1989-04-07 DE DE19893911446 patent/DE3911446A1/de not_active Withdrawn
- 1989-04-10 JP JP1088164A patent/JPH01298631A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2217104A (en) | 1989-10-18 |
| DE3911446A1 (de) | 1989-10-19 |
| GB8907103D0 (en) | 1989-05-10 |
| CS240088A1 (en) | 1989-08-14 |
| CN1037615A (zh) | 1989-11-29 |
| CS268377B1 (en) | 1990-03-14 |
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