CN1239666C - 铈系研磨材料的制造方法 - Google Patents

铈系研磨材料的制造方法 Download PDF

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Publication number
CN1239666C
CN1239666C CNB028036336A CN02803633A CN1239666C CN 1239666 C CN1239666 C CN 1239666C CN B028036336 A CNB028036336 A CN B028036336A CN 02803633 A CN02803633 A CN 02803633A CN 1239666 C CN1239666 C CN 1239666C
Authority
CN
China
Prior art keywords
raw material
cerium
pulverization
abrasive
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028036336A
Other languages
English (en)
Chinese (zh)
Other versions
CN1489625A (zh
Inventor
伊藤昭文
渡边广幸
牛山和哉
桑原滋
内野义嗣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Kinzoku Co Ltd
Original Assignee
Mitsui Mining and Smelting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining and Smelting Co Ltd filed Critical Mitsui Mining and Smelting Co Ltd
Publication of CN1489625A publication Critical patent/CN1489625A/zh
Application granted granted Critical
Publication of CN1239666C publication Critical patent/CN1239666C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/20—Compounds containing only rare earth metals as the metal element
    • C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
    • C01F17/224—Oxides or hydroxides of lanthanides
    • C01F17/235—Cerium oxides or hydroxides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
CNB028036336A 2001-05-29 2002-05-24 铈系研磨材料的制造方法 Expired - Fee Related CN1239666C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP160644/01 2001-05-29
JP160644/2001 2001-05-29
JP2001160644A JP4002740B2 (ja) 2001-05-29 2001-05-29 セリウム系研摩材の製造方法

Publications (2)

Publication Number Publication Date
CN1489625A CN1489625A (zh) 2004-04-14
CN1239666C true CN1239666C (zh) 2006-02-01

Family

ID=19004023

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028036336A Expired - Fee Related CN1239666C (zh) 2001-05-29 2002-05-24 铈系研磨材料的制造方法

Country Status (8)

Country Link
US (1) US6905527B2 (2)
EP (1) EP1391494A1 (2)
JP (1) JP4002740B2 (2)
KR (1) KR100509267B1 (2)
CN (1) CN1239666C (2)
MY (1) MY129185A (2)
TW (1) TWI293981B (2)
WO (1) WO2002097004A1 (2)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6863825B2 (en) 2003-01-29 2005-03-08 Union Oil Company Of California Process for removing arsenic from aqueous streams
JP3949147B2 (ja) * 2004-09-03 2007-07-25 昭和電工株式会社 混合希土類酸化物、混合希土類フッ素化物及びそれらを用いたセリウム系研磨材、並びにそれらの製造方法
JP2006206870A (ja) * 2004-12-28 2006-08-10 Mitsui Mining & Smelting Co Ltd セリウム系研摩材用原料及びセリウム系研摩材用原料の製造方法、並びに、セリウム系研摩材及びセリウム系研摩材の製造方法
US8361419B2 (en) 2005-09-20 2013-01-29 Lg Chem, Ltd. Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same
EP1934142B1 (en) 2005-09-20 2013-05-01 LG Chem, Ltd. Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and cmp slurry comprising the same
KR101450865B1 (ko) * 2006-10-24 2014-10-14 동우 화인켐 주식회사 디스플레이용 유리패널의 연마를 위한 폐연마재의 재생방법
US8066874B2 (en) 2006-12-28 2011-11-29 Molycorp Minerals, Llc Apparatus for treating a flow of an aqueous solution containing arsenic
US7976810B2 (en) 2007-03-16 2011-07-12 Lg Chem, Ltd. Method for preparing cerium carbonate powder
KR100969132B1 (ko) 2007-03-16 2010-07-07 주식회사 엘지화학 우레아를 이용한 탄산세륨 분말의 제조방법
US8252087B2 (en) 2007-10-31 2012-08-28 Molycorp Minerals, Llc Process and apparatus for treating a gas containing a contaminant
US8349764B2 (en) 2007-10-31 2013-01-08 Molycorp Minerals, Llc Composition for treating a fluid
US9233863B2 (en) 2011-04-13 2016-01-12 Molycorp Minerals, Llc Rare earth removal of hydrated and hydroxyl species
CN103923602A (zh) * 2013-01-15 2014-07-16 安阳市岷山有色金属有限责任公司 一种铈系研磨材料的制造方法
MX370462B (es) 2014-03-07 2019-12-13 Secure Natural Resources Llc Oxido de cerio (iv) con propiedades de remocion de arsenico excepcionales.
CN104387989B (zh) * 2014-11-04 2016-08-24 南昌大学 高密度碳酸稀土高温爆裂法制备超细高铈稀土抛光粉的方法
MY192996A (en) * 2017-09-11 2022-09-20 Showa Denko Kk Manufacturing method for starting material for cerium-based abrasive agent, and manufacturing method for cerium-based abrasive agent

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08267355A (ja) * 1995-04-03 1996-10-15 Fujimi Inkooporeetetsudo:Kk 研磨剤微粉末の製造方法
JP2991952B2 (ja) * 1995-07-31 1999-12-20 多木化学株式会社 酸化第二セリウム及びその製造方法
KR100761636B1 (ko) * 1996-09-30 2007-09-27 히다치 가세고교 가부시끼가이샤 산화세륨 입자
US5759917A (en) * 1996-12-30 1998-06-02 Cabot Corporation Composition for oxide CMP
JPH11181404A (ja) * 1997-12-18 1999-07-06 Hitachi Chem Co Ltd 酸化セリウム研磨剤および基板の研磨法
JP3649279B2 (ja) * 1998-12-25 2005-05-18 日立化成工業株式会社 基板の研磨方法
US6428392B1 (en) * 1999-03-23 2002-08-06 Seimi Chemical Co., Ltd. Abrasive
JP2001035818A (ja) 1999-07-16 2001-02-09 Seimi Chem Co Ltd 半導体用研磨剤
WO2002028979A1 (en) * 2000-10-02 2002-04-11 Mitsui Mining & Smelting Co.,Ltd. Cerium based abrasive material and method for producing cerium based abrasive material
WO2002044300A2 (en) * 2000-11-30 2002-06-06 Showa Denko K.K. Cerium-based abrasive and production process thereof

Also Published As

Publication number Publication date
WO2002097004A1 (fr) 2002-12-05
CN1489625A (zh) 2004-04-14
MY129185A (en) 2007-03-30
KR20030093193A (ko) 2003-12-06
JP2002348563A (ja) 2002-12-04
US20040219791A1 (en) 2004-11-04
KR100509267B1 (ko) 2005-08-18
JP4002740B2 (ja) 2007-11-07
TWI293981B (2) 2008-03-01
US6905527B2 (en) 2005-06-14
EP1391494A1 (en) 2004-02-25

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060201

Termination date: 20200524