CN1319948A - 电子元件,电子装置和通信设备 - Google Patents

电子元件,电子装置和通信设备 Download PDF

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Publication number
CN1319948A
CN1319948A CN01108873A CN01108873A CN1319948A CN 1319948 A CN1319948 A CN 1319948A CN 01108873 A CN01108873 A CN 01108873A CN 01108873 A CN01108873 A CN 01108873A CN 1319948 A CN1319948 A CN 1319948A
Authority
CN
China
Prior art keywords
electrode
electronic component
metal
substrate
upper electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN01108873A
Other languages
English (en)
Chinese (zh)
Inventor
田贺重人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN1319948A publication Critical patent/CN1319948A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07231—Techniques
    • H10W72/07236—Soldering or alloying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/923—Bond pads having multiple stacked layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/941—Dispositions of bond pads
    • H10W72/9415—Dispositions of bond pads relative to the surface, e.g. recessed, protruding

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Wire Bonding (AREA)
CN01108873A 2000-02-25 2001-02-26 电子元件,电子装置和通信设备 Pending CN1319948A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000049445 2000-02-25
JP049445/2000 2000-02-25
JP013514/01 2001-01-22
JP2001013514A JP2001313305A (ja) 2000-02-25 2001-01-22 電子部品素子、電子部品装置および通信機装置

Publications (1)

Publication Number Publication Date
CN1319948A true CN1319948A (zh) 2001-10-31

Family

ID=26586108

Family Applications (1)

Application Number Title Priority Date Filing Date
CN01108873A Pending CN1319948A (zh) 2000-02-25 2001-02-26 电子元件,电子装置和通信设备

Country Status (5)

Country Link
US (1) US20040108560A1 (de)
EP (1) EP1128423A3 (de)
JP (1) JP2001313305A (de)
KR (1) KR20010085606A (de)
CN (1) CN1319948A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103531705A (zh) * 2012-07-03 2014-01-22 精工爱普生株式会社 基底基板、电子器件和电子设备

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1313214B1 (de) * 2001-11-16 2020-02-26 SnapTrack, Inc. Verpackungssubstrat, integrierte Schaltungvorrichtung, deren jeweilige Herstellungsverfahren und akustische Oberflächenwellenvorrichtung
JP2003318212A (ja) * 2002-04-26 2003-11-07 Murata Mfg Co Ltd 蒸着リフトオフによるバンプ形成に用いるレジストパターンおよびその形成方法、バンプおよびその形成方法、ならびに弾性表面波素子およびその製造方法
US7141909B2 (en) * 2003-06-17 2006-11-28 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2006202938A (ja) * 2005-01-20 2006-08-03 Kojiro Kobayashi 半導体装置及びその製造方法
US20070069367A1 (en) * 2005-09-28 2007-03-29 Honeywell International Inc. Reduced stress on SAW die with surrounding support structures
JP4770643B2 (ja) 2005-10-12 2011-09-14 エプソントヨコム株式会社 圧電デバイス及び、その製造方法
JP4674555B2 (ja) * 2006-02-20 2011-04-20 エプソントヨコム株式会社 弾性表面波素子及び通信装置
WO2013147741A1 (en) * 2012-03-26 2013-10-03 Empire Technology Development Llc Color tunable substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910006967B1 (ko) * 1987-11-18 1991-09-14 가시오 게이상기 가부시기가이샤 반도체 장치의 범프 전극 구조 및 그 형성 방법
US5156997A (en) * 1991-02-11 1992-10-20 Microelectronics And Computer Technology Corporation Method of making semiconductor bonding bumps using metal cluster ion deposition
DE69223868T2 (de) * 1991-07-17 1998-09-03 Denso Corp Verfahren zur Herstellung von Elektroden eines Halbleiterbauelements
US5587336A (en) * 1994-12-09 1996-12-24 Vlsi Technology Bump formation on yielded semiconductor dies
JP3275775B2 (ja) * 1997-05-16 2002-04-22 株式会社村田製作所 弾性表面波装置
JP3795644B2 (ja) * 1997-09-25 2006-07-12 東芝電子エンジニアリング株式会社 接合方法
JPH11234082A (ja) * 1998-02-13 1999-08-27 Toko Inc 表面弾性波装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103531705A (zh) * 2012-07-03 2014-01-22 精工爱普生株式会社 基底基板、电子器件和电子设备
CN103531705B (zh) * 2012-07-03 2017-03-01 精工爱普生株式会社 基底基板、电子器件和电子设备

Also Published As

Publication number Publication date
EP1128423A2 (de) 2001-08-29
JP2001313305A (ja) 2001-11-09
EP1128423A3 (de) 2004-03-10
US20040108560A1 (en) 2004-06-10
KR20010085606A (ko) 2001-09-07

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Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication