CN1680186B - 钢琴型微电子机械微镜的隔行阵列 - Google Patents

钢琴型微电子机械微镜的隔行阵列 Download PDF

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Publication number: CN1680186B
Authority: CN; China
Prior art keywords: electrode; pivot; pivot members; hinge; bearing
Prior art date: 2004-04-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CN200510059944.7A

Other languages

English (en)

Chinese (zh)

Other versions

CN1680186A (zh

Inventor

约翰·M.·米勒

金文林

巴里·克沃斯

皮尔·D.·沃尔

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Flex Products Inc

Lumentum Operations LLC

Original Assignee

Lumentum Ottawa Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-04-02

Filing date

2005-04-04

Publication date

2010-10-27

2004-05-21 Priority claimed from US10/850,407 external-priority patent/US6968101B2/en

2005-04-04 Application filed by Lumentum Ottawa Inc filed Critical Lumentum Ottawa Inc

2005-10-12 Publication of CN1680186A publication Critical patent/CN1680186A/zh

2010-10-27 Application granted granted Critical

2010-10-27 Publication of CN1680186B publication Critical patent/CN1680186B/zh

2025-04-04 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Mechanical Light Control Or Optical Switches (AREA)

CN200510059944.7A 2004-04-02 2005-04-04 钢琴型微电子机械微镜的隔行阵列 Expired - Lifetime CN1680186B (zh)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
US55856304P	2004-04-02	2004-04-02
US60/558,563		2004-04-02
US10/850,407		2004-05-21
US10/850,407 US6968101B2 (en)	2002-05-28	2004-05-21	Electrode configuration for piano MEMs micromirror

Publications (2)

Publication Number	Publication Date
CN1680186A CN1680186A (zh)	2005-10-12
CN1680186B true CN1680186B (zh)	2010-10-27

Family

ID=35067082

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CN200510059944.7A Expired - Lifetime CN1680186B (zh)	2004-04-02	2005-04-04	钢琴型微电子机械微镜的隔行阵列

Country Status (2)

Country	Link
CN (1)	CN1680186B (fr)
CA (1)	CA2501012C (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6533947B2 (en) *	2001-02-07	2003-03-18	Transparent Optical, Inc.	Microelectromechanical mirror and mirror array

2005
- 2005-03-16 CA CA2501012A patent/CA2501012C/fr not_active Expired - Lifetime
- 2005-04-04 CN CN200510059944.7A patent/CN1680186B/zh not_active Expired - Lifetime

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6533947B2 (en) *	2001-02-07	2003-03-18	Transparent Optical, Inc.	Microelectromechanical mirror and mirror array

Also Published As

Publication number	Publication date
CA2501012A1 (fr)	2005-10-02
CA2501012C (fr)	2013-12-31
CN1680186A (zh)	2005-10-12

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JP4495095B2 (ja)	2010-06-30	マイクロミラー装置およびミラーアレイ
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Legal Events

Date	Code	Title	Description
2005-10-12	C06	Publication
2005-10-12	PB01	Publication
2007-06-06	C10	Entry into substantive examination
2007-06-06	SE01	Entry into force of request for substantive examination
2010-10-27	C14	Grant of patent or utility model
2010-10-27	GR01	Patent grant
2015-12-16	C41	Transfer of patent application or patent right or utility model
2015-12-16	TR01	Transfer of patent right	Effective date of registration: 20151126 Address after: California, USA Patentee after: Lumentum Operations LLC Address before: California, USA Patentee before: Flex Products Inc. Effective date of registration: 20151126 Address after: California, USA Patentee after: Flex Products Inc. Address before: Ontario Patentee before: JDS Universe Co.,Ltd.
2025-04-22	CX01	Expiry of patent term	Granted publication date: 20101027
2025-04-22	CX01	Expiry of patent term