DD283792A5 - Verfahren zur herstellung von siliziumnitrid mit einem hohen gehalt an alfa-phase - Google Patents
Verfahren zur herstellung von siliziumnitrid mit einem hohen gehalt an alfa-phase Download PDFInfo
- Publication number
- DD283792A5 DD283792A5 DD89328830A DD32883089A DD283792A5 DD 283792 A5 DD283792 A5 DD 283792A5 DD 89328830 A DD89328830 A DD 89328830A DD 32883089 A DD32883089 A DD 32883089A DD 283792 A5 DD283792 A5 DD 283792A5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- silicon
- mass
- silicon nitride
- metal
- phase
- Prior art date
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 58
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 107
- 239000010703 silicon Substances 0.000 claims abstract description 107
- 238000000034 method Methods 0.000 claims abstract description 79
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 48
- 230000008569 process Effects 0.000 claims abstract description 42
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 238000005121 nitriding Methods 0.000 claims abstract description 23
- -1 ammonium halides Chemical class 0.000 claims abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 107
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 88
- 229910052757 nitrogen Inorganic materials 0.000 claims description 44
- 239000000654 additive Substances 0.000 claims description 43
- 230000000996 additive effect Effects 0.000 claims description 41
- 239000003153 chemical reaction reagent Substances 0.000 claims description 29
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 26
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 8
- 229910021529 ammonia Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 150000004820 halides Chemical class 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 229910000039 hydrogen halide Inorganic materials 0.000 claims description 3
- 239000012433 hydrogen halide Substances 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 229910001507 metal halide Inorganic materials 0.000 claims description 2
- 150000005309 metal halides Chemical class 0.000 claims description 2
- 230000035939 shock Effects 0.000 claims description 2
- 230000000704 physical effect Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 30
- 239000007795 chemical reaction product Substances 0.000 abstract description 6
- 239000002994 raw material Substances 0.000 abstract description 4
- 230000008859 change Effects 0.000 abstract description 2
- 230000002950 deficient Effects 0.000 abstract description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 28
- 238000006243 chemical reaction Methods 0.000 description 25
- 238000002485 combustion reaction Methods 0.000 description 22
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 19
- 239000000843 powder Substances 0.000 description 18
- 235000019270 ammonium chloride Nutrition 0.000 description 14
- 238000010304 firing Methods 0.000 description 11
- 238000006396 nitration reaction Methods 0.000 description 9
- 238000002156 mixing Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000012467 final product Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000011863 silicon-based powder Substances 0.000 description 5
- XZXYQEHISUMZAT-UHFFFAOYSA-N 2-[(2-hydroxy-5-methylphenyl)methyl]-4-methylphenol Chemical compound CC1=CC=C(O)C(CC=2C(=CC=C(C)C=2)O)=C1 XZXYQEHISUMZAT-UHFFFAOYSA-N 0.000 description 4
- 229940107816 ammonium iodide Drugs 0.000 description 4
- 238000004886 process control Methods 0.000 description 4
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 4
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 230000000977 initiatory effect Effects 0.000 description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 230000000802 nitrating effect Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000002604 ultrasonography Methods 0.000 description 3
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000000543 intermediate Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 235000013024 sodium fluoride Nutrition 0.000 description 2
- 239000011775 sodium fluoride Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003674 animal food additive Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002801 charged material Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000003716 rejuvenation Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Ceramic Products (AREA)
- Silicon Compounds (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU884422423A SU1696385A1 (ru) | 1988-05-24 | 1988-05-24 | Способ получени нитрида кремни |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD283792A5 true DD283792A5 (de) | 1990-10-24 |
Family
ID=21373743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD89328830A DD283792A5 (de) | 1988-05-24 | 1989-05-23 | Verfahren zur herstellung von siliziumnitrid mit einem hohen gehalt an alfa-phase |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5032370A (cs) |
| EP (1) | EP0377751A4 (cs) |
| JP (1) | JPH03500640A (cs) |
| CN (1) | CN1017609B (cs) |
| CS (1) | CS274772B2 (cs) |
| DD (1) | DD283792A5 (cs) |
| HU (1) | HU202451B (cs) |
| SU (1) | SU1696385A1 (cs) |
| WO (1) | WO1989011447A1 (cs) |
| YU (1) | YU46271B (cs) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2001877C1 (ru) * | 1992-01-30 | 1993-10-30 | Малое предпри тие "ДЖИПЛА ЛИМИТЕД" | Способ получени нитридов |
| JPH0733411A (ja) * | 1993-07-16 | 1995-02-03 | Shin Etsu Chem Co Ltd | 高α型窒化ケイ素粉末の製造方法 |
| ES2116154B1 (es) * | 1994-06-04 | 1999-04-01 | Shs Prometheus Espana A I E | Procedimiento de obtencion de fibras mono y policristalinas de nitruro de silicio mediante tecnologia de sintesis autopropagada a alta temperatura. |
| ES2188298B1 (es) * | 1999-06-15 | 2004-08-16 | Fundacion Inasmet | Procedimiento continuo de fabricacion de materiales en polvo por combustion y reactor para la puesta en practica del mismo. |
| EP1452578A1 (de) * | 2003-02-28 | 2004-09-01 | von Görtz & Finger Techn. Entwicklungs Ges.m.b.H. | Verfahren zur Reduzierung des Stickstoffgehaltes in Brenngasen |
| RU2257338C1 (ru) * | 2004-03-23 | 2005-07-27 | Томский научный центр СО РАН | Способ получения нитрида кремния |
| CN101229916B (zh) * | 2007-01-26 | 2011-01-12 | 中国科学院理化技术研究所 | 以聚四氟乙烯为添加剂燃烧合成氮化硅粉体的方法 |
| RU2461090C1 (ru) * | 2010-12-23 | 2012-09-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Кабардино-Балкарский государственный университет им. Х.М. Бербекова" (КБГУ) | Способ изготовления полупроводниковой структуры |
| RU2550882C1 (ru) * | 2014-03-26 | 2015-05-20 | Федеральное государственное бюджетное учреждение науки Институт структурной макрокинетики и проблем материаловедения Российской академии наук | Способ получения альфа-фазы нитрида кремния методом свс |
| CN104671795B (zh) * | 2015-02-05 | 2016-09-28 | 武汉科技大学 | 一种单相α-Si3N4超细粉体及其制备方法 |
| JP7240800B2 (ja) * | 2015-12-24 | 2023-03-16 | エルジー・ケム・リミテッド | α窒化ケイ素の製造方法 |
| CN112028655A (zh) * | 2020-09-16 | 2020-12-04 | 江苏隆达超合金航材有限公司 | 一种高温合金钢锭模用模底砖的制备方法 |
| CN115072677A (zh) * | 2022-06-22 | 2022-09-20 | 大连理工大学 | 一种高质量氮化硅粉体合成方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3726643A (en) * | 1970-04-09 | 1973-04-10 | I Khim Fiz Akademii Nauk | Method of producing refractory carbides,borides,silicides,sulfides,and nitrides of metals of groups iv,v,and vi of the periodic system |
| GB1448915A (en) * | 1973-10-30 | 1976-09-08 | Ford Motor Co | Process for making silicon nitride articles |
| US4122220A (en) * | 1977-09-06 | 1978-10-24 | Rosenthal Aktiengesellschaft | Method for reducing the gas permeability of a sintered porous silicon nitride body |
| JPS57175711A (en) * | 1981-04-21 | 1982-10-28 | Asahi Glass Co Ltd | Synthesis of silicon nitride |
| JPS5884108A (ja) * | 1981-11-16 | 1983-05-20 | Denki Kagaku Kogyo Kk | 高純度α型窒化珪素の製法 |
| US4579699A (en) * | 1983-09-29 | 1986-04-01 | The Boeing Company | Method for making α-Si3 N4 whiskers and articles therefrom |
| JPS63170202A (ja) * | 1987-01-07 | 1988-07-14 | Shin Etsu Chem Co Ltd | α型窒化けい素の製造方法 |
-
1988
- 1988-05-24 SU SU884422423A patent/SU1696385A1/ru active
-
1989
- 1989-04-03 WO PCT/SU1989/000086 patent/WO1989011447A1/ru not_active Ceased
- 1989-04-03 JP JP1506232A patent/JPH03500640A/ja active Pending
- 1989-04-03 EP EP19890906495 patent/EP0377751A4/de not_active Withdrawn
- 1989-04-03 HU HU893400A patent/HU202451B/hu not_active IP Right Cessation
- 1989-04-03 US US07/457,825 patent/US5032370A/en not_active Expired - Fee Related
- 1989-05-15 YU YU100089A patent/YU46271B/sh unknown
- 1989-05-22 CN CN89104609.7A patent/CN1017609B/zh not_active Expired
- 1989-05-23 DD DD89328830A patent/DD283792A5/de not_active IP Right Cessation
- 1989-05-24 CS CS312189A patent/CS274772B2/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| HUT52737A (en) | 1990-08-28 |
| YU46271B (sh) | 1993-05-28 |
| EP0377751A4 (en) | 1990-12-12 |
| CN1017609B (zh) | 1992-07-29 |
| YU100089A (en) | 1990-06-30 |
| CN1038250A (zh) | 1989-12-27 |
| CS312189A2 (en) | 1990-10-12 |
| WO1989011447A1 (en) | 1989-11-30 |
| HU202451B (en) | 1991-03-28 |
| SU1696385A1 (ru) | 1991-12-07 |
| EP0377751A1 (de) | 1990-07-18 |
| HU893400D0 (en) | 1990-07-28 |
| CS274772B2 (en) | 1991-10-15 |
| US5032370A (en) | 1991-07-16 |
| JPH03500640A (ja) | 1991-02-14 |
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