DE19882290T1 - Optischer Treiber, Spannungssensor mit optischem Ausgangssignal und unter Verwendung dieser Komponenten areitendes IC-Testgerät - Google Patents

Optischer Treiber, Spannungssensor mit optischem Ausgangssignal und unter Verwendung dieser Komponenten areitendes IC-Testgerät

Info

Publication number
DE19882290T1
DE19882290T1 DE19882290T DE19882290T DE19882290T1 DE 19882290 T1 DE19882290 T1 DE 19882290T1 DE 19882290 T DE19882290 T DE 19882290T DE 19882290 T DE19882290 T DE 19882290T DE 19882290 T1 DE19882290 T1 DE 19882290T1
Authority
DE
Germany
Prior art keywords
optical
components
output signal
test device
voltage sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19882290T
Other languages
English (en)
Other versions
DE19882290B4 (de
Inventor
Toshiyuki Okayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE19882290T1 publication Critical patent/DE19882290T1/de
Application granted granted Critical
Publication of DE19882290B4 publication Critical patent/DE19882290B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31728—Optical aspects, e.g. opto-electronics used for testing, optical signal transmission for testing electronic circuits, electro-optic components to be tested in combination with electronic circuits, measuring light emission of digital circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Current Or Voltage (AREA)
DE19882290T 1998-02-05 1998-02-05 Optischer Treiber und diesen verwendendes IC-Testgerät Expired - Fee Related DE19882290B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1998/000478 WO1999040449A1 (en) 1998-02-05 1998-02-05 Optically driven driver, optical output type voltage sensor, and ic testing equipment using these devices

Publications (2)

Publication Number Publication Date
DE19882290T1 true DE19882290T1 (de) 2000-02-24
DE19882290B4 DE19882290B4 (de) 2005-12-22

Family

ID=14207549

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19861240A Expired - Fee Related DE19861240B4 (de) 1998-02-05 1998-02-05 IC-Testgerät
DE19882290T Expired - Fee Related DE19882290B4 (de) 1998-02-05 1998-02-05 Optischer Treiber und diesen verwendendes IC-Testgerät

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19861240A Expired - Fee Related DE19861240B4 (de) 1998-02-05 1998-02-05 IC-Testgerät

Country Status (8)

Country Link
US (1) US6586953B1 (de)
JP (1) JP3403739B2 (de)
KR (2) KR100420726B1 (de)
CN (1) CN1129798C (de)
DE (2) DE19861240B4 (de)
GB (1) GB2339918B (de)
TW (1) TW360793B (de)
WO (1) WO1999040449A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10106557A1 (de) * 2001-02-13 2002-09-12 Infineon Technologies Ag Testanordnung zum parallelen Hochfrequenztest einer Mehrzahl von Halbleiterbausteinen

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040145381A1 (en) * 2001-12-28 2004-07-29 Jun Su Test fixture for die-level testing of planar lightwave circuits
US6765396B2 (en) * 2002-04-04 2004-07-20 Freescale Semiconductor, Inc. Method, apparatus and software for testing a device including both electrical and optical portions
US6815973B1 (en) * 2003-06-13 2004-11-09 Xilinx, Inc. Optical testing port and wafer level testing without probe cards
KR20060133532A (ko) * 2003-11-05 2006-12-26 주식회사 아도반테스토 시험 장치 및 케이블 가이드 유닛
US7673292B2 (en) * 2005-01-11 2010-03-02 International Business Machines Corporation Auto conversion of tests between different functional testing tools
US20060284631A1 (en) * 2005-05-31 2006-12-21 Hamren Steven L Imaging test socket, system, and method of testing an image sensor device
KR20100067487A (ko) 2008-12-11 2010-06-21 삼성전자주식회사 테스트 인터페이스 장치, 테스트 시스템 및 광 인터페이스 메모리 장치
KR101548176B1 (ko) * 2009-02-02 2015-08-31 삼성전자주식회사 메모리 시스템, 메모리 테스트 시스템 및 이의 테스트 방법
US9236958B2 (en) * 2012-08-10 2016-01-12 Skorpios Technologies, Inc. Method and system for performing testing of photonic devices
CN104345291A (zh) * 2013-08-06 2015-02-11 鸿富锦精密工业（深圳）有限公司 静电测试仪检测系统及方法
US9331776B2 (en) * 2013-12-18 2016-05-03 Tektronix, Inc. Extended range electro-optic voltage accessory
US9476960B2 (en) * 2013-12-18 2016-10-25 Tektronix, Inc. Measurement system including accessory with internal calibration signal
US9209593B2 (en) * 2013-12-18 2015-12-08 Tektronix, Inc. Method of controlling electro-optical probe gain and sensitivity
US10707050B2 (en) * 2018-07-26 2020-07-07 Varian Semiconductor Equipment Associates, Inc. System and method to detect glitches
WO2020104015A1 (de) * 2018-11-20 2020-05-28 Lisa Dräxlmaier GmbH Prüfvorrichtung, prüfsystem und prüfverfahren
JP6813763B1 (ja) * 2020-04-07 2021-01-13 株式会社精工技研 光電圧プローブ
CN115980497A (zh) * 2023-02-13 2023-04-18 闽都创新实验室 一种电力线高压检测装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216969A (ja) * 1982-06-11 1983-12-16 Toshiba Corp Ｌｓｉ試験装置
JPS59155764A (ja) * 1983-02-24 1984-09-04 Yokogawa Hokushin Electric Corp 光電圧計
JPS59218915A (ja) * 1983-05-27 1984-12-10 Yokogawa Hokushin Electric Corp 光導波路形センサ
JPS61117472A (ja) * 1984-11-13 1986-06-04 Yokogawa Electric Corp テストシステム
JPS6237940A (ja) * 1985-08-12 1987-02-18 Nippon Denshi Zairyo Kk プロ−ブカ−ド
JPH07104365B2 (ja) * 1987-09-19 1995-11-13 株式会社安川電機 光センサ装置
US4870295A (en) * 1987-12-07 1989-09-26 The United States Of America As Represented By The United States Department Of Energy Photoconductive circuit element pulse generator
JPH0266476A (ja) 1988-08-31 1990-03-06 Nec Kyushu Ltd 半導体回路試験装置
CA2011954C (en) * 1989-03-14 1994-02-22 Fujitsu Limited Optical modulator
JPH02249977A (ja) * 1989-03-24 1990-10-05 Fujitsu Ltd 信号波形検出装置
US5153442A (en) 1989-06-12 1992-10-06 The United States Of America As Represented By The Secretary Of The Army High power, solid state RF pulse generators
JPH0365987A (ja) 1989-08-04 1991-03-20 Fujitsu Ltd ダブルフレームバッファ使用時のウィンド管理方式
JP3006082B2 (ja) * 1990-11-22 2000-02-07 株式会社アドバンテスト 三値駆動回路
US5137359A (en) * 1991-03-18 1992-08-11 Litton Systems, Inc. Digital phase modulator for fiber optic sagnac interferometer
JPH05273315A (ja) * 1992-03-26 1993-10-22 Fujitsu Ltd 半導体試験方法および装置
US5347601A (en) * 1993-03-29 1994-09-13 United Technologies Corporation Integrated optical receiver/transmitter
EP0668507B1 (de) * 1993-07-07 2002-10-09 NEC TOKIN Corporation Fühler für elektrische felder
WO1995002194A1 (en) * 1993-07-07 1995-01-19 Tokin Corporation Electric field sensor
US5654812A (en) * 1994-09-17 1997-08-05 Kabushiki Kaisha Toshiba Light-receiving device, optoelectronic transmission apparatus, and optical demultiplexing method
US5767955A (en) * 1995-02-23 1998-06-16 Advantest Corporation Short-width pulse generating apparatus for measurement of reflection point, sampling apparatus for measurement of reflection point and reflection point measuring apparatus
WO1996035972A1 (en) * 1995-05-08 1996-11-14 Testdesign Corporation Optical fiber interface for integrated circuit test system
JP3411947B2 (ja) * 1995-08-08 2003-06-03 シャープ株式会社 電波−光変換変調装置及びそれを用いた通信システム
JPH0989961A (ja) * 1995-09-26 1997-04-04 Tokin Corp 電界検出装置
JP3591673B2 (ja) 1996-03-22 2004-11-24 株式会社アドバンテスト Ｉｃ試験装置のドライバ
JPH09281182A (ja) 1996-04-10 1997-10-31 Advantest Corp 測定ボードおよびその測定ボードを用いたｉ／ｏ端子試験システム
DE19629260C1 (de) 1996-07-19 1998-02-26 Litef Gmbh Elektrooptischer Phasenmodulator mit richtungsunabhängiger Impulsantwort, Anordnung von elektrooptischen Phasenmodulatoren und Verwendung eines elektrooptischen Phasenmodulators
JPH10115644A (ja) * 1996-10-11 1998-05-06 Toyota Central Res & Dev Lab Inc 光集積化電圧センサ
US6285182B1 (en) * 1998-12-08 2001-09-04 Nxtphase Technologies Srl Electro-optic voltage sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10106557A1 (de) * 2001-02-13 2002-09-12 Infineon Technologies Ag Testanordnung zum parallelen Hochfrequenztest einer Mehrzahl von Halbleiterbausteinen
DE10106557B4 (de) * 2001-02-13 2004-08-19 Infineon Technologies Ag Testanordnung zum parallelen Hochfrequenztest einer Mehrzahl von Halbleiterbausteinen

Also Published As

Publication number Publication date
GB9922292D0 (en) 1999-11-17
CN1129798C (zh) 2003-12-03
DE19882290B4 (de) 2005-12-22
KR100401347B1 (ko) 2003-10-17
GB2339918B (en) 2002-11-27
WO1999040449A1 (en) 1999-08-12
TW360793B (en) 1999-06-11
JP3403739B2 (ja) 2003-05-06
KR20020084840A (ko) 2002-11-11
US6586953B1 (en) 2003-07-01
KR20010006009A (ko) 2001-01-15
KR100420726B1 (ko) 2004-03-02
GB2339918A (en) 2000-02-09
DE19861240B4 (de) 2006-05-24
CN1252131A (zh) 2000-05-03

Similar Documents

Publication Publication Date Title
DE19882290T1 (de) Optischer Treiber, Spannungssensor mit optischem Ausgangssignal und unter Verwendung dieser Komponenten areitendes IC-Testgerät
DE69519777D1 (de) Mehrfach-Spannungssensor und Vorrichtung zur Messung von Strukturspannungen mit diesem Sensor
DE69937220D1 (de) Spannungsmessvorrichtung mit fliegendem kondensator
EP1332720A4 (de) Instrument zur messung von konzentrationen
BR9706664A (pt) Pequeno aparelho eletrônico tendo mostrador funcional
DE69528859D1 (de) Zellpotentialmessvorrichtung mit mehreren Mikroelektroden
DE69922207D1 (de) Tragbare medizinische analysevorrichtung mit unmittelbarem respons
DE69413162D1 (de) Piezoelektrischer Schwingungssensor mit eingebauter Prüfschaltung
DE69729519D1 (de) Optische modulationsvorrichtung, anzeige und elektronisches gerät
DE69814198D1 (de) Messverfahren und Messinstrument mit Triggersonde
DE59707155D1 (de) Steuervorrichtung für einen optischen sensor
DE69734382D1 (de) Kohlenmonoxidsensor und Messvorrichtung unter Verwendung dieses Sensors
DE69621420D1 (de) Halbleiteranordnung mit Modusregistersteuerschaltung
DE69128454D1 (de) Maleimidharzzusammensetzung und kunststoffumhüllte Halbleiteranordnung hergestellt unter Verwendung dieser Zusammensetzung
DE69014927D1 (de) Speiseschaltung und Brücken-Messanordnung mit einer Ausgangssignalausgleichsschaltung.
DE69815989D1 (de) Anzeigevorrichtung mit optischen element
DE69829729D1 (de) Automatische Schaltungsprüfeinrichtung mit Wellenformerfassungsbetriebsarten
DE69739530D1 (de) Anzeigeeinrichtung mit analoger Schnittstelle mit verbesserter Anzeigesignaleinstellung
DE69726487D1 (de) Neigungssensor und diesen verwendendes Vermessungsinstrument
DE69814868D1 (de) Optisches element,abbildeeinheit,abbildevorrichtung,strahlungsabbildungssensor und fingerabdruckanalysator unter verwendung derselben
DE59600753D1 (de) Schraubvorrichtung mit Messeinrichtung
DE69605757D1 (de) IC-Test-Gerät
DE19782244T1 (de) IC-Testverfahren und unter Anwendung dieses IC-Testverfahrens arbeitendes IC-Testgerät
FR2764390B1 (fr) Capteur electro-optique a diviseur de tension massif
DE59603233D1 (de) Optoelektronische sensorvorrichtung und schussfaden-messspeichergerät

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8125 Change of the main classification

Ipc: G01R 31/308

8607 Notification of search results after publication
Q172 Divided out of (supplement):

Ref document number: 19861240

Country of ref document: DE

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee