DE3852995D1 - Regelungsverfahren und -vorrichtung mit verschiebung des sollwertes. - Google Patents

Regelungsverfahren und -vorrichtung mit verschiebung des sollwertes.

Info

Publication number
DE3852995D1
DE3852995D1 DE3852995T DE3852995T DE3852995D1 DE 3852995 D1 DE3852995 D1 DE 3852995D1 DE 3852995 T DE3852995 T DE 3852995T DE 3852995 T DE3852995 T DE 3852995T DE 3852995 D1 DE3852995 D1 DE 3852995D1
Authority
DE
Germany
Prior art keywords
set point
statistical measures
shifting
control method
statistical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852995T
Other languages
English (en)
Other versions
DE3852995T2 (de
Inventor
Francis Shinskey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schneider Electric Systems USA Inc
Original Assignee
Foxboro Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foxboro Co filed Critical Foxboro Co
Publication of DE3852995D1 publication Critical patent/DE3852995D1/de
Application granted granted Critical
Publication of DE3852995T2 publication Critical patent/DE3852995T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B21/00—Systems involving sampling of the variable controlled
    • G05B21/02—Systems involving sampling of the variable controlled electric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)
  • Complex Calculations (AREA)
  • Vehicle Body Suspensions (AREA)
  • Selective Calling Equipment (AREA)
  • Electrophonic Musical Instruments (AREA)
DE3852995T 1987-07-13 1988-07-05 Regelungsverfahren und -vorrichtung mit verschiebung des sollwertes. Expired - Fee Related DE3852995T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/073,798 US4855897A (en) 1987-07-13 1987-07-13 Method and apparatus for statistical set point bias control
PCT/US1988/002248 WO1989000723A1 (en) 1987-07-13 1988-07-05 Method and apparatus for statistical set point bias control

Publications (2)

Publication Number Publication Date
DE3852995D1 true DE3852995D1 (de) 1995-03-23
DE3852995T2 DE3852995T2 (de) 1995-06-08

Family

ID=22115866

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852995T Expired - Fee Related DE3852995T2 (de) 1987-07-13 1988-07-05 Regelungsverfahren und -vorrichtung mit verschiebung des sollwertes.

Country Status (6)

Country Link
US (1) US4855897A (de)
EP (1) EP0324006B1 (de)
JP (1) JP2950513B2 (de)
AT (1) ATE118282T1 (de)
DE (1) DE3852995T2 (de)
WO (1) WO1989000723A1 (de)

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US5541833A (en) * 1987-03-30 1996-07-30 The Foxboro Company Multivariable feedforward adaptive controller
US4996647A (en) * 1989-03-27 1991-02-26 Sperry Marine Inc. Digital statistical processing for signal parameter determination
US5406474A (en) * 1990-07-16 1995-04-11 The Foxboro Company Self-tuning controller
US5394322A (en) * 1990-07-16 1995-02-28 The Foxboro Company Self-tuning controller that extracts process model characteristics
US5587896A (en) * 1990-07-16 1996-12-24 The Foxboro Company Self-tuning controller
US5150289A (en) * 1990-07-30 1992-09-22 The Foxboro Company Method and apparatus for process control
US5239456A (en) * 1990-07-30 1993-08-24 The Foxboro Company Method and apparatus for process control with opimum setpoint determination
US5196997A (en) * 1991-01-22 1993-03-23 International Business Machines Corporation Method and apparatus for quality measure driven process control
US5341288A (en) * 1992-05-27 1994-08-23 The Foxboro Company Method and apparatus for analyzing process characteristics
US5335165A (en) * 1992-05-27 1994-08-02 The Foxboro Company Method and apparatus for adaptive deadtime process control
US5319539A (en) * 1992-05-27 1994-06-07 The Foxboro Company Method and apparatus for generating an optimal gain of process control equipment
US5420785A (en) * 1993-05-26 1995-05-30 The Foxboro Company Self-tuning deadtime process controller
US5392226A (en) * 1993-06-17 1995-02-21 Icom, Inc. Computer-implemented method and apparatus for monitoring statistical process control data
US5537388A (en) * 1994-03-02 1996-07-16 The Foxboro Company Method and apparatus for characterizing and compensating for non-linear components
US5583797A (en) * 1994-11-03 1996-12-10 Ford Motor Company Method and apparatus for wheel alignment audit
US5677853A (en) * 1994-11-16 1997-10-14 Delco Electronics Corp. Product testing by statistical profile of test variables
US5691896A (en) * 1995-08-15 1997-11-25 Rosemount, Inc. Field based process control system with auto-tuning
EP0852030B1 (de) * 1995-09-22 2002-07-03 Rosemount Inc. Adaptiver versatzregler
GB9608953D0 (en) * 1996-04-29 1996-07-03 Pulp Paper Res Inst Automatic control loop monitoring and diagnostics
KR100399225B1 (ko) * 1999-07-13 2003-09-22 주식회사 포스코 소결생석회의 절출량 제어방법
RU2189067C2 (ru) * 2000-06-23 2002-09-10 Липецкий государственный технический университет Способ автоматической настройки многопараметрических систем автоматического управления на оптимальные условия
RU2189069C2 (ru) * 2000-08-07 2002-09-10 Липецкий государственный технический университет Способ адаптивной автоматической самонастройки многопараметрических систем автоматического управления на оптимальные условия
RU2189068C2 (ru) * 2000-08-07 2002-09-10 Липецкий государственный технический университет Способ адаптивной автоматической настройки многопараметрических систем автоматического управления на оптимальные условия
RU2251134C2 (ru) * 2003-04-02 2005-04-27 Липецкий Государственный Технический Университет (Лгту) Способ адаптивной автоматической самонастройки многопараметрических систем автоматического управления на оптимальные условия
RU2254602C2 (ru) * 2003-04-04 2005-06-20 Липецкий Государственный Технический Университет (Лгту) Способ адаптивной автоматической самонастройки многопараметрических систем автоматического управления на оптимальные условия
RU2271030C2 (ru) * 2004-04-28 2006-02-27 Открытое акционерное общество "Научно-производственное предприятие "Рубин" (ОАО "НПП "Рубин") Способ автоматического регулирования положения привода
US8501631B2 (en) 2009-11-19 2013-08-06 Lam Research Corporation Plasma processing system control based on RF voltage
US9114666B2 (en) 2012-02-22 2015-08-25 Lam Research Corporation Methods and apparatus for controlling plasma in a plasma processing system
US9842725B2 (en) 2013-01-31 2017-12-12 Lam Research Corporation Using modeling to determine ion energy associated with a plasma system
US10157729B2 (en) 2012-02-22 2018-12-18 Lam Research Corporation Soft pulsing
US9320126B2 (en) 2012-12-17 2016-04-19 Lam Research Corporation Determining a value of a variable on an RF transmission model
US10128090B2 (en) 2012-02-22 2018-11-13 Lam Research Corporation RF impedance model based fault detection
US9462672B2 (en) 2012-02-22 2016-10-04 Lam Research Corporation Adjustment of power and frequency based on three or more states
US9295148B2 (en) 2012-12-14 2016-03-22 Lam Research Corporation Computation of statistics for statistical data decimation
US9155182B2 (en) 2013-01-11 2015-10-06 Lam Research Corporation Tuning a parameter associated with plasma impedance
US9620337B2 (en) 2013-01-31 2017-04-11 Lam Research Corporation Determining a malfunctioning device in a plasma system
US9502221B2 (en) 2013-07-26 2016-11-22 Lam Research Corporation Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching
US9594105B2 (en) 2014-01-10 2017-03-14 Lam Research Corporation Cable power loss determination for virtual metrology
US10950421B2 (en) 2014-04-21 2021-03-16 Lam Research Corporation Using modeling for identifying a location of a fault in an RF transmission system for a plasma system
AU2018285617B2 (en) * 2017-06-12 2020-11-26 Honeywell International Inc. Apparatus and method for identifying impacts and causes of variability or control giveaway on model-based controller performance
RU2736961C1 (ru) * 2020-01-31 2020-11-23 Частное образовательное учреждение высшего образования "Московский Университет им. С.Ю. Витте" Способ управления производственным процессом в режиме мягкого реального времени

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US3515860A (en) * 1967-11-06 1970-06-02 Industrial Nucleonics Corp Process controller with dynamic set-point adjustment responsive to the statistical variance of the controlled property
GB1318871A (en) * 1969-03-14 1973-05-31 Kodak Ltd Process control system
US3648035A (en) * 1969-06-02 1972-03-07 Industrial Nucleonics Corp System and method for optimizing processor or equipment profit
US3876872A (en) * 1971-10-14 1975-04-08 Industrial Nucleonics Corp Process control system and method with integral-action set-point optimization using statistically-variable gain control responsive to fraction defective
US3781533A (en) * 1972-04-07 1973-12-25 Exxon Research Engineering Co Constraint control system for optimizing performance of process units
US3995478A (en) * 1972-06-09 1976-12-07 Industrial Nucleonics Corporation Plural interrelated set point controller
US3758762A (en) * 1972-07-10 1973-09-11 Leeds & Northrup Co Decoupled feedforward-feedback control system
US4008386A (en) * 1976-01-13 1977-02-15 Leeds & Northrup Company Method and means for producing a control signal for process control including removable means for increasing gain as a time integral of error
JPS548829A (en) * 1977-06-22 1979-01-23 Hitachi Ltd Cooler for oil-filled equipment
JPS5499883A (en) * 1978-01-24 1979-08-07 Toshiba Corp Process supervisory controller
US4320463A (en) * 1980-02-25 1982-03-16 S. Himmelstein And Company Production control system
US4481567A (en) * 1982-03-01 1984-11-06 The Babcock & Wilcox Company Adaptive process control using function blocks
EP0159103B1 (de) * 1984-04-13 1989-08-30 Kabushiki Kaisha Toshiba Prozessregeleinrichtung
US4736316A (en) * 1986-08-06 1988-04-05 Chevron Research Company Minimum time, optimizing and stabilizing multivariable control method and system using a constraint associated control code

Also Published As

Publication number Publication date
ATE118282T1 (de) 1995-02-15
JP2950513B2 (ja) 1999-09-20
US4855897A (en) 1989-08-08
WO1989000723A1 (en) 1989-01-26
EP0324006A1 (de) 1989-07-19
EP0324006B1 (de) 1995-02-08
DE3852995T2 (de) 1995-06-08
JPH02500471A (ja) 1990-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee