DE69126830D1 - Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung - Google Patents

Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung

Info

Publication number
DE69126830D1
DE69126830D1 DE69126830T DE69126830T DE69126830D1 DE 69126830 D1 DE69126830 D1 DE 69126830D1 DE 69126830 T DE69126830 T DE 69126830T DE 69126830 T DE69126830 T DE 69126830T DE 69126830 D1 DE69126830 D1 DE 69126830D1
Authority
DE
Germany
Prior art keywords
measuring sensor
electrodes
driving
processing device
information processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69126830T
Other languages
English (en)
Other versions
DE69126830T2 (de
Inventor
Toshihiko Miyazaki
Hiroyasu Nose
Takayuki Yagi
Toshimitsu Kawase
Katsuhiko Shinjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21376590A external-priority patent/JPH0495804A/ja
Priority claimed from JP25145290A external-priority patent/JPH04128603A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69126830D1 publication Critical patent/DE69126830D1/de
Publication of DE69126830T2 publication Critical patent/DE69126830T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1409—Heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Measurement Of Radiation (AREA)
DE69126830T 1990-08-14 1991-08-08 Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung Expired - Fee Related DE69126830T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21376590A JPH0495804A (ja) 1990-08-14 1990-08-14 カンチレバー型プローブ及びそれを用いた走査型トンネル電流検知装置、情報処理装置
JP25145290A JPH04128603A (ja) 1990-09-19 1990-09-19 カンチレバー型プローブ、該プローブを備えた走査型トンネル顕微鏡及び情報処理装置

Publications (2)

Publication Number Publication Date
DE69126830D1 true DE69126830D1 (de) 1997-08-21
DE69126830T2 DE69126830T2 (de) 1997-11-20

Family

ID=26519980

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126830T Expired - Fee Related DE69126830T2 (de) 1990-08-14 1991-08-08 Biegebalkenmessfühler und mit dem Messfühler ausgestattete Informationsverarbeitungsvorrichtung

Country Status (5)

Country Link
US (1) US5187367A (de)
EP (1) EP0471511B1 (de)
AT (1) ATE155579T1 (de)
CA (1) CA2048968C (de)
DE (1) DE69126830T2 (de)

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* Cited by examiner, † Cited by third party
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JP2756254B2 (ja) * 1988-03-25 1998-05-25 キヤノン株式会社 記録装置及び再生装置
JP2961452B2 (ja) * 1990-09-05 1999-10-12 キヤノン株式会社 情報処理装置
JP2761801B2 (ja) * 1990-10-04 1998-06-04 キヤノン株式会社 角度的位置関係検出方法及びこれを用いたエンコーダ
JP3000492B2 (ja) * 1991-04-22 2000-01-17 キヤノン株式会社 情報処理装置
EP0871165B1 (de) * 1991-07-17 2002-10-02 Canon Kabushiki Kaisha Informationsaufzeichnungs-/-wiedergabegerät oder -verfahren zur Informationsaufzeichnung/- wiedergabe auf/von einem Informationsaufzeichnungsmedium unter Verwendung einer Vielzahl von Sondenelektroden
US5329122A (en) * 1991-08-29 1994-07-12 Canon Kabushiki Kaisha Information processing apparatus and scanning tunnel microscope
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi, Ltd., Tokio/Tokyo Verfahren und Vorrichtung zum Beobachten einer Fläche
JP3029916B2 (ja) * 1992-03-07 2000-04-10 キヤノン株式会社 情報処理装置
JPH06132579A (ja) * 1992-09-01 1994-05-13 Canon Inc 変位素子及びそれを用いたプローブ、同プローブを有する機器
JP3140223B2 (ja) * 1992-11-11 2001-03-05 キヤノン株式会社 マイクロアクチュエータおよびその作製方法
US5323377A (en) * 1992-11-27 1994-06-21 Chen Zhi Q Electrical data recording and retrieval based on impedance variation
JP3025120B2 (ja) * 1992-12-21 2000-03-27 キヤノン株式会社 記録再生装置
JP2743761B2 (ja) * 1993-03-19 1998-04-22 松下電器産業株式会社 走査型プローブ顕微鏡および原子種同定方法
US5661403A (en) * 1994-03-14 1997-08-26 Mackenzie; Franklin F. Apparatus and method for testing a solid electrolyte
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US5550483A (en) * 1994-11-18 1996-08-27 International Business Machines High speed test probe positioning system
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
JP3576655B2 (ja) * 1995-09-14 2004-10-13 キヤノン株式会社 微小探針の製造方法及びその製造用雌型基板、並びにその微小探針を有するプローブの製造方法
US5781649A (en) * 1996-04-15 1998-07-14 Phase Metrics, Inc. Surface inspection of a disk by diffraction pattern sampling
JPH10282130A (ja) * 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
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US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US7260051B1 (en) * 1998-12-18 2007-08-21 Nanochip, Inc. Molecular memory medium and molecular memory integrated circuit
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US6670208B2 (en) * 2000-06-23 2003-12-30 Nec Corporation Optical circuit in which fabrication is easy
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US20020138301A1 (en) * 2001-03-22 2002-09-26 Thanos Karras Integration of a portal into an application service provider data archive and/or web based viewer
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JP2556492B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 再生装置及び再生法
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH02206043A (ja) * 1989-02-03 1990-08-15 Olympus Optical Co Ltd 記憶装置

Also Published As

Publication number Publication date
EP0471511A2 (de) 1992-02-19
CA2048968A1 (en) 1992-02-15
DE69126830T2 (de) 1997-11-20
EP0471511B1 (de) 1997-07-16
US5187367A (en) 1993-02-16
CA2048968C (en) 1997-09-30
ATE155579T1 (de) 1997-08-15
EP0471511A3 (de) 1992-03-04

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