DK0414871T3 - Kapacitiv trykføler og fremgangsmåde til fremstilling heraf - Google Patents

Kapacitiv trykføler og fremgangsmåde til fremstilling heraf

Info

Publication number
DK0414871T3
DK0414871T3 DK90904295.4T DK90904295T DK0414871T3 DK 0414871 T3 DK0414871 T3 DK 0414871T3 DK 90904295 T DK90904295 T DK 90904295T DK 0414871 T3 DK0414871 T3 DK 0414871T3
Authority
DK
Denmark
Prior art keywords
manufacture
pressure sensor
capacitive pressure
capacitive
sensor
Prior art date
Application number
DK90904295.4T
Other languages
English (en)
Inventor
Frank Hegner
Manfred Frank
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Application granted granted Critical
Publication of DK0414871T3 publication Critical patent/DK0414871T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DK90904295.4T 1989-03-21 1990-03-15 Kapacitiv trykføler og fremgangsmåde til fremstilling heraf DK0414871T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3909185A DE3909185A1 (de) 1989-03-21 1989-03-21 Kapazitiver drucksensor und verfahren zu seiner herstellung

Publications (1)

Publication Number Publication Date
DK0414871T3 true DK0414871T3 (da) 1993-06-28

Family

ID=6376817

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90904295.4T DK0414871T3 (da) 1989-03-21 1990-03-15 Kapacitiv trykføler og fremgangsmåde til fremstilling heraf

Country Status (8)

Country Link
US (1) US5050035A (da)
EP (1) EP0414871B1 (da)
JP (1) JP2655534B2 (da)
CA (1) CA2028115C (da)
DE (2) DE3909185A1 (da)
DK (1) DK0414871T3 (da)
ES (1) ES2042284T3 (da)
WO (1) WO1990011502A1 (da)

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JP2871381B2 (ja) * 1993-03-30 1999-03-17 本田技研工業株式会社 圧力センサー
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
DK0780674T3 (da) * 1995-12-22 2000-04-03 Envec Mess Und Regeltechn Gmbh Trykmåleindretning med skærmelektrode
EP0797084B1 (de) 1996-03-23 2001-01-17 Endress + Hauser GmbH + Co. Verfahren zum Herstellen von kapazitiven, in Nullpunkt-Langzeit-Fehlerklassen sortierten Keramik-Absolutdruck-Sensoren
US5854846A (en) * 1996-09-06 1998-12-29 Northrop Grumman Corporation Wafer fabricated electroacoustic transducer
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US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
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US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6267009B1 (en) 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
US6374680B1 (en) 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
EP1039284A1 (de) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Kapazitiver Drucksensor bzw. kapazitiver Differenzdrucksensoren
EP1039283A1 (de) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Kapazitiver Drucksensor bzw. kapazitive Differenzdrucksensoren
DE60108217T2 (de) 2000-01-06 2005-12-29 Rosemount Inc., Eden Prairie Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems)
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor
US7378125B2 (en) * 2001-10-31 2008-05-27 Canon Kabushiki Kaisha Method for screen printed lacquer deposition for a display device
US6848316B2 (en) 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US7100432B2 (en) * 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
DE10235046A1 (de) * 2002-07-31 2004-02-12 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
US7402425B2 (en) * 2004-03-02 2008-07-22 The Charles Stark Draper Laboratory, Inc. Stress-based electrostatic monitoring of chemical reactions and binding
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US20090014340A1 (en) * 2007-06-15 2009-01-15 Williams John R Devices, systems, and methods for measuring glucose
US8181531B2 (en) * 2008-06-27 2012-05-22 Edwin Carlen Accessible stress-based electrostatic monitoring of chemical reactions and binding
DE102008064654A1 (de) 2008-08-05 2010-04-15 Endress + Hauser Gmbh + Co. Kg Verfahren zur Herstellung eines elastischen Körpers aus Al2O3- Keramik
US9011670B2 (en) * 2008-08-14 2015-04-21 The Charles Stark Draper Laboratory, Inc. Three-dimensional metal ion sensor arrays on printed circuit boards
DE102009046844A1 (de) * 2009-11-18 2011-05-19 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle
DE102010063723A1 (de) 2010-12-21 2012-06-21 Endress + Hauser Gmbh + Co. Kg Keramischer Drucksensor mit Überlastschutz
DE102011004722A1 (de) 2011-02-25 2012-08-30 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
FR2995279B1 (fr) * 2012-09-10 2017-05-26 European Aeronautic Defence & Space Co Eads France Panneau raidi
JP7048042B2 (ja) * 2017-11-01 2022-04-05 国立研究開発法人宇宙航空研究開発機構 圧力測定用シート、圧力測定用シートの製造方法及び圧力測定方法
EP3753607B1 (en) * 2019-06-17 2025-02-26 Marioff Corporation OY Sprinkler bulb
US12210716B1 (en) * 2023-11-15 2025-01-28 Elo Touch Solutions, Inc. 5-wire resistive touchscreens with metal electrodes

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Also Published As

Publication number Publication date
JP2655534B2 (ja) 1997-09-24
US5050035A (en) 1991-09-17
EP0414871A1 (de) 1991-03-06
EP0414871B1 (de) 1993-06-09
CA2028115A1 (en) 1990-09-22
CA2028115C (en) 1998-05-19
ES2042284T3 (es) 1993-12-01
DE59001685D1 (de) 1993-07-15
JPH03501060A (ja) 1991-03-07
WO1990011502A1 (de) 1990-10-04
DE3909185A1 (de) 1990-09-27

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