DK3298374T3 - Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm - Google Patents

Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm Download PDF

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Publication number
DK3298374T3
DK3298374T3 DK16725689T DK16725689T DK3298374T3 DK 3298374 T3 DK3298374 T3 DK 3298374T3 DK 16725689 T DK16725689 T DK 16725689T DK 16725689 T DK16725689 T DK 16725689T DK 3298374 T3 DK3298374 T3 DK 3298374T3
Authority
DK
Denmark
Prior art keywords
bias
regulation
measurement
pressure gauge
emission current
Prior art date
Application number
DK16725689T
Other languages
English (en)
Inventor
Douglas C Hansen
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK3298374T3 publication Critical patent/DK3298374T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK16725689T 2015-07-09 2016-05-12 Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm DK3298374T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/795,729 US9927317B2 (en) 2015-07-09 2015-07-09 Ionization pressure gauge with bias voltage and emission current control and measurement
PCT/US2016/032070 WO2017007531A1 (en) 2015-07-09 2016-05-12 Ionization pressure gauge with bias voltage and emission current control and measurement

Publications (1)

Publication Number Publication Date
DK3298374T3 true DK3298374T3 (da) 2019-11-11

Family

ID=56084395

Family Applications (1)

Application Number Title Priority Date Filing Date
DK16725689T DK3298374T3 (da) 2015-07-09 2016-05-12 Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm

Country Status (7)

Country Link
US (1) US9927317B2 (da)
EP (1) EP3298374B1 (da)
JP (1) JP6814789B2 (da)
KR (1) KR102228612B1 (da)
CN (1) CN107850506B (da)
DK (1) DK3298374T3 (da)
WO (1) WO2017007531A1 (da)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
SG11201809453SA (en) * 2016-05-02 2018-11-29 Mks Instr Inc Cold cathode ionization vacuum gauge with multiple cathodes
WO2019244826A1 (ja) * 2018-06-18 2019-12-26 株式会社アルバック 電離真空計及び制御装置
CN108918026B (zh) * 2018-09-11 2020-12-25 北京东方计量测试研究所 一种热阴极电离真空计电参数校准装置及方法
CN116362179B (zh) * 2023-03-24 2023-11-17 深圳京鸿源科技有限公司 一种基于动态调节mosfet电路功耗的控制方法

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US4158794A (en) * 1978-07-14 1979-06-19 P. R. Mallory & Co. Inc. Drive means and method for vacuum fluorescent display systems
JPS5697865A (en) * 1980-01-07 1981-08-06 Hitachi Ltd Ionization detector
GB2105047B (en) 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
JPS60157151A (ja) * 1984-01-25 1985-08-17 Hitachi Ltd 真空排気制御装置
CN85200112U (zh) * 1985-04-01 1986-09-24 北京大学 饿流放大式电离真空计发射电流稳定器
JP2672950B2 (ja) * 1987-10-20 1997-11-05 株式会社芝浦製作所 エミッションコントロール装置
DE3930699C2 (de) * 1989-09-14 1994-02-03 Perzl Peter Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung
US5250906A (en) 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5608384A (en) 1992-10-23 1997-03-04 Sentech Corporation Method and apparatus for monitoring for the presence of a gas
US5801535A (en) 1996-11-12 1998-09-01 Granville-Phillips Company Ionization gauge and method of using and calibrating same
JP3734913B2 (ja) 1997-01-27 2006-01-11 株式会社アルバック 電離真空計制御装置
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3324522B2 (ja) 1998-09-16 2002-09-17 日本電気株式会社 可変利得増幅回路及び利得制御方法
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計
JP4493139B2 (ja) 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP4092246B2 (ja) 2002-05-27 2008-05-28 インフィネオン テクノロジーズ アクチエンゲゼルシャフト パワースイッチデバイス
US6756785B2 (en) 2002-07-25 2004-06-29 Mks Instruments, Inc. Pressure controlled degas system for hot cathode ionization pressure gauges
US7295015B2 (en) 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
CN1965219A (zh) * 2004-03-12 2007-05-16 布鲁克斯自动化有限公司 电离真空计
JP3108712U (ja) 2004-11-11 2005-04-28 アルプス電気株式会社 可変利得増幅回路
EP1698878A1 (en) 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
EP1890124A4 (en) 2005-05-09 2012-08-22 Ampere Inc IONISIERUNGSUNTERDRUCKMESSVORRICHTUNG
JP2009531925A (ja) 2006-03-27 2009-09-03 エヌエックスピー ビー ヴィ 出力インピーダンスを整合した低電圧で低消費電力の差動ドライバ
US7429863B2 (en) 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
JP5080567B2 (ja) * 2007-04-16 2012-11-21 株式会社アルバック 質量分析計の制御方法及び質量分析計
KR101541273B1 (ko) 2007-12-19 2015-08-03 엠케이에스 인스트루먼츠, 인코포레이티드 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지
CN101990630B (zh) 2008-02-21 2013-08-14 布鲁克机械公司 具有设计用于高压操作的操作参数和几何形状的电离计
JP5136892B2 (ja) * 2008-03-03 2013-02-06 株式会社ネットコムセック 電圧制御装置、電源装置、電子管及び高周波回路システム
JP5223497B2 (ja) 2008-06-27 2013-06-26 富士通セミコンダクター株式会社 ピークホールド回路
CN102159929A (zh) 2008-09-19 2011-08-17 布鲁克机械公司 具有发射电流及偏压电位控制的电离计
JP4636461B2 (ja) 2009-01-13 2011-02-23 セイコーインスツル株式会社 電源電圧監視回路、および該電源電圧監視回路を備える電子回路
JP5054226B2 (ja) 2009-03-18 2012-10-24 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
JP5716346B2 (ja) 2010-10-13 2015-05-13 株式会社リコー 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置
JP2014164577A (ja) 2013-02-26 2014-09-08 Sumitomo Electric Ind Ltd 駆動回路
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement

Also Published As

Publication number Publication date
JP2018519528A (ja) 2018-07-19
EP3298374A1 (en) 2018-03-28
US20170010172A1 (en) 2017-01-12
WO2017007531A1 (en) 2017-01-12
KR20180027542A (ko) 2018-03-14
JP6814789B2 (ja) 2021-01-20
EP3298374B1 (en) 2019-09-25
CN107850506B (zh) 2020-09-11
CN107850506A (zh) 2018-03-27
KR102228612B1 (ko) 2021-03-16
US9927317B2 (en) 2018-03-27

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