ECSP055797A - Proceso para la aplicacion por alto vacío de substratos acintados con una capa barrera de óxido de aluminio - Google Patents

Proceso para la aplicacion por alto vacío de substratos acintados con una capa barrera de óxido de aluminio

Info

Publication number
ECSP055797A
ECSP055797A EC2005005797A ECSP055797A ECSP055797A EC SP055797 A ECSP055797 A EC SP055797A EC 2005005797 A EC2005005797 A EC 2005005797A EC SP055797 A ECSP055797 A EC SP055797A EC SP055797 A ECSP055797 A EC SP055797A
Authority
EC
Ecuador
Prior art keywords
aluminum oxide
barrier layer
high vacuum
oxide barrier
vacuum application
Prior art date
Application number
EC2005005797A
Other languages
English (en)
Inventor
Nicolas Schiller
Steffen Straach
Mathias Raebisch
Matthias Fahland
Christoph Charton
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of ECSP055797A publication Critical patent/ECSP055797A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Proceso para la vaporización de substratos acintados con una capa barrera transparente de óxido de aluminio.El invento atañe a un proceso para la vaporización de substratos acintados con una capa barrera transparente, mediante la vaporización reactiva de aluminio y entrada de gas reactivo, en una instalación de vaporización acintada, proceso para el cual, antes del revestimiento con óxido de aluminio, sobre el substrato se expande una capa cerrada incompleta de un metal o de un óxido metálico mediante chisporroteo de magnetrón.
EC2005005797A 2002-11-29 2005-05-16 Proceso para la aplicacion por alto vacío de substratos acintados con una capa barrera de óxido de aluminio ECSP055797A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10255822A DE10255822B4 (de) 2002-11-29 2002-11-29 Verfahren zum Bedampfen bandförmiger Substrate mit einer transparenten Barriereschicht aus Aluminiumoxid

Publications (1)

Publication Number Publication Date
ECSP055797A true ECSP055797A (es) 2005-08-11

Family

ID=32318811

Family Applications (1)

Application Number Title Priority Date Filing Date
EC2005005797A ECSP055797A (es) 2002-11-29 2005-05-16 Proceso para la aplicacion por alto vacío de substratos acintados con una capa barrera de óxido de aluminio

Country Status (14)

Country Link
US (1) US7541070B2 (es)
EP (1) EP1565591B1 (es)
AT (1) ATE375409T1 (es)
AU (1) AU2003274021A1 (es)
BR (1) BR0315699B1 (es)
CA (1) CA2505027C (es)
CO (1) CO5690658A2 (es)
CR (1) CR7821A (es)
DE (2) DE10255822B4 (es)
EC (1) ECSP055797A (es)
ES (1) ES2290496T3 (es)
MX (1) MXPA05005113A (es)
RU (1) RU2352683C2 (es)
WO (1) WO2004050945A2 (es)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8025985B2 (en) * 2005-08-11 2011-09-27 E. I. Du Pont De Nemours And Company Porous metallized sheets coated with an inorganic layer having low emissivity and high moisture vapor permeability
DE102007003766B4 (de) 2006-12-23 2008-09-11 Hvb Hoch-Vakuum-Beschichtungs Gmbh High Vacuum Coating Transparente Barrierefolien für die Verpackungsindustrie
EP2222459A4 (en) * 2007-12-10 2012-12-05 Toray Plastics America Inc BIAXIALLY ORIENTED POLYLACTIC ACID FILM WITH LOW PERMEABILITY BARRIER
CA2733581A1 (en) 2008-08-15 2010-02-18 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with high barrier
US9150004B2 (en) 2009-06-19 2015-10-06 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with improved heat seal properties
EP2480710B1 (en) 2009-09-25 2018-01-24 Toray Plastics (America) , Inc. Multi-layer high moisture barrier polylactic acid film and its method of forming
US9221213B2 (en) 2009-09-25 2015-12-29 Toray Plastics (America), Inc. Multi-layer high moisture barrier polylactic acid film
RU2422556C1 (ru) * 2009-10-22 2011-06-27 Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) Градиентное функциональное покрытие на прозрачной подложке
WO2011123165A1 (en) 2010-03-31 2011-10-06 Toray Plastics (America), Inc. Biaxially oriented polyactic acid film with reduced noise level
US9492962B2 (en) 2010-03-31 2016-11-15 Toray Plastics (America), Inc. Biaxially oriented polylactic acid film with reduced noise level and improved moisture barrier
EP2431995A1 (en) 2010-09-17 2012-03-21 Asociacion de la Industria Navarra (AIN) Ionisation device
JP5649431B2 (ja) * 2010-12-16 2015-01-07 株式会社神戸製鋼所 プラズマｃｖｄ装置
EP2474647A1 (en) 2011-01-05 2012-07-11 Asociacion de la Industria Navarra (AIN) Coating barrier layer and manufacturing process
EP2497636A1 (de) 2011-03-11 2012-09-12 Deutsche SiSi-Werke Betriebs GmbH Verbessertes Verbundsystem für Verpackungen
CN102691062A (zh) * 2011-03-23 2012-09-26 鸿富锦精密工业（深圳）有限公司 壳体及其制造方法
DE102011017403A1 (de) * 2011-04-18 2012-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Barriereschichtsystems
DE102011017404A1 (de) * 2011-04-18 2012-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Barriereschichtsystems
CN103451652B (zh) * 2012-05-29 2015-10-21 吉林师范大学 一种银纳米粒子包覆氧化锌纳米管衬底的制备方法
RU2564650C1 (ru) * 2014-07-22 2015-10-10 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Способ нанесения электропроводящего покрытия для электрообогреваемого элемента органического остекления
RU2704949C2 (ru) * 2014-12-19 2019-10-31 Сандвик Интеллекчуал Проперти Аб Режущий инструмент с хогф-покрытием
RU2676720C1 (ru) * 2018-03-28 2019-01-10 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук Способ вакуумного ионно-плазменного низкотемпературного осаждения нанокристаллического покрытия из оксида алюминия
BR112021021780A2 (pt) * 2019-05-31 2021-12-21 Toyo Boseki Filme de barreira ao gás transparente e método para produção do mesmo

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699798B2 (ja) * 1985-10-29 1994-12-07 東洋メタライジング株式会社 透明ガス遮断性フイルムの製造方法
US5178967A (en) * 1989-02-03 1993-01-12 Alcan International Limited Bilayer oxide film and process for producing same
GB8917888D0 (en) 1989-08-04 1989-09-20 Bowater Packaging Ltd Microwave interactive barrier packaging material
US5792550A (en) * 1989-10-24 1998-08-11 Flex Products, Inc. Barrier film having high colorless transparency and method
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film
GB8928706D0 (en) * 1989-12-20 1990-02-28 Bowater Packaging Ltd Transparent barrier packaging materials
CA2044053C (en) 1990-06-08 2001-11-27 Roger W. Phillips Barrier film having high colorless transparency and method
DE69224808T2 (de) * 1991-12-26 1998-07-09 Toyo Boseki Gassperrfilm
DE4203631C2 (de) * 1992-02-08 2000-06-08 Leybold Ag Vorrichtung für die Behandlung einer Oxidschicht
IT1261918B (it) * 1993-06-11 1996-06-04 Cetev Cent Tecnolog Vuoto Struttura per deposizione reattiva di metalli in impianti da vuoto continui e relativo processo.
DE4343040C1 (de) * 1993-12-16 1995-01-26 Fraunhofer Ges Forschung Barrierefolie
DE4412906C1 (de) * 1994-04-14 1995-07-13 Fraunhofer Ges Forschung Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung
DE4427581A1 (de) * 1994-08-04 1996-02-08 Leybold Ag Verfahren zum Aufbringen einer transparenten Metalloxidschicht auf eine Folie
DE19543781A1 (de) * 1995-11-24 1997-05-28 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
DE19845268C1 (de) * 1998-10-01 2000-01-05 Fraunhofer Ges Forschung Verfahren zum Bedampfen bandförmiger Substrate mit einer transparenten Barriereschicht aus Aluminiumoxid
JP2000192237A (ja) * 1998-12-25 2000-07-11 Teijin Ltd 高透明ガスバリア性フィルムの製造方法
US6492026B1 (en) * 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
TWI293091B (en) 2001-09-26 2008-02-01 Tohcello Co Ltd Deposited film and process for producing the same

Also Published As

Publication number Publication date
CA2505027C (en) 2011-02-22
DE10255822A1 (de) 2004-06-17
MXPA05005113A (es) 2008-03-11
RU2005116674A (ru) 2007-01-10
US20060257585A1 (en) 2006-11-16
EP1565591A2 (de) 2005-08-24
ATE375409T1 (de) 2007-10-15
RU2352683C2 (ru) 2009-04-20
CO5690658A2 (es) 2006-10-31
BR0315699A (pt) 2005-09-06
ES2290496T3 (es) 2008-02-16
WO2004050945A3 (de) 2004-08-12
EP1565591B1 (de) 2007-10-10
WO2004050945A2 (de) 2004-06-17
DE50308370D1 (de) 2007-11-22
CA2505027A1 (en) 2004-06-17
AU2003274021A1 (en) 2004-06-23
BR0315699B1 (pt) 2012-11-27
CR7821A (es) 2005-11-15
AU2003274021A8 (en) 2004-06-23
US7541070B2 (en) 2009-06-02
DE10255822B4 (de) 2004-10-28

Similar Documents

Publication Publication Date Title
ECSP055797A (es) Proceso para la aplicacion por alto vacío de substratos acintados con una capa barrera de óxido de aluminio
US7793653B2 (en) Radiation-selective absorber coating with an adherent oxide layer and method of making same
DE60045413D1 (de) Haftschicht für uv-filter aus metalloxyd
WO2005000758A3 (fr) Substrat revetu d’une couche dielectrique et procede et installation pour sa fabrication
AU2003250246A1 (en) Method for production of a glazed piece provided with a multi-layer coating
JP2017533842A (ja) 耐温度性及び耐腐食性の表面反射体
CA2373441A1 (en) Hard, scratch-resistant coatings for substrates
AU2003290815A1 (en) Atomic layer deposition methods
WO2006041924A3 (en) Thin film coating and temporary protection technology, insulating glazing units, and associated methods
WO2003021690A3 (fr) Procede de depot d'une couche d'oxyde sur un substrat et cellule photovoltaique utilisant ce substrat
EA202192758A8 (ru) Специальное стекло с покрытием для vig в сборе
JP2003177208A (ja) 表示装置用反射防止帯電防止多層構造
SG151324A1 (en) Plasma enhanced chemical vapor deposition of metal oxide
KR960013650A (ko) 알칼리금속 확산 차단 층
WO2005106070A3 (fr) Procede de depot sous vide
US8828564B2 (en) Alkali-barrier layer
WO2002012584A3 (en) CATHODE SPRAYING TARGET
EP0992604A3 (en) Method for controlling the refractive index of a dry plating film
BR0007608A (pt) Processo para a produção de um substrato, processo a baixa pressão para a deposição de uma camada metálica refletiva sobre um substrato, vidro revestido, e uso de um limpador de oxigênio gasoso
GB2411408A (en) Resistance-heated boat and manufacturing method thereof
KR20150030366A (ko) 폴리카보네이트의 내마모성 및 자외선에 대한 내후성 향상을 위한 코팅막 증착 방법 및 이 방법에 의한 코팅막이 증착된 폴리카보네이트
CN104818466A (zh) 钼铝钼金属膜的制备方法
RU93018049A (ru) Способ нанесения вакуумных металлизированных покрытий на диэлектрические подложки
KR980001971A (ko) 기능성 다층 피복제품 및 그의 제조방법
MX2025009621A (es) Acristalamiento de aislamiento termico y/o proteccion solar que comprende una capa de nitruro de titanio depositada por hipims