EP0143079A3 - Herstellungsverfahren für eine Mikroklappenvorrichtung und Anwendung dieses Verfahrens zur Schaffung eines Lichtmodulators - Google Patents
Herstellungsverfahren für eine Mikroklappenvorrichtung und Anwendung dieses Verfahrens zur Schaffung eines Lichtmodulators Download PDFInfo
- Publication number
- EP0143079A3 EP0143079A3 EP84810556A EP84810556A EP0143079A3 EP 0143079 A3 EP0143079 A3 EP 0143079A3 EP 84810556 A EP84810556 A EP 84810556A EP 84810556 A EP84810556 A EP 84810556A EP 0143079 A3 EP0143079 A3 EP 0143079A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- obtaining
- layer
- producing
- application
- light modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008030 elimination Effects 0.000 abstract 1
- 238000003379 elimination reaction Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011368 organic material Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
- G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH6199/83A CH654686A5 (fr) | 1983-11-18 | 1983-11-18 | Procede de fabrication d'un dispositif a volets miniatures et application d'un tel procede pour l'obtention d'un dispositif de modulation de lumiere. |
| CH6199/83 | 1983-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0143079A2 EP0143079A2 (de) | 1985-05-29 |
| EP0143079A3 true EP0143079A3 (de) | 1986-07-30 |
Family
ID=4305834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP84810556A Withdrawn EP0143079A3 (de) | 1983-11-18 | 1984-11-15 | Herstellungsverfahren für eine Mikroklappenvorrichtung und Anwendung dieses Verfahrens zur Schaffung eines Lichtmodulators |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4584056A (de) |
| EP (1) | EP0143079A3 (de) |
| JP (1) | JPS60120389A (de) |
| CA (1) | CA1256683A (de) |
| CH (1) | CH654686A5 (de) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8402201A (nl) * | 1984-07-12 | 1986-02-03 | Philips Nv | Passieve weergeefinrichting. |
| NL8600697A (nl) * | 1986-01-09 | 1987-08-03 | Philips Nv | Beeldweergeefinrichting en een methode voor de vervaardiging ervan. |
| EP0290093A1 (de) * | 1987-05-07 | 1988-11-09 | Koninklijke Philips Electronics N.V. | Mit einer Flüssigkeit gefüllte elektroskopische Anzeigevorrichtung und Herstellungsverfahren |
| US4960486A (en) * | 1988-06-06 | 1990-10-02 | Brigham Young University | Method of manufacturing radiation detector window structure |
| DE3841488A1 (de) * | 1988-12-09 | 1990-06-13 | Zeiss Carl Fa | Koordinatenmessgeraet mit einem oder mehreren fuehrungselementen aus aluminium |
| CH682523A5 (fr) * | 1990-04-20 | 1993-09-30 | Suisse Electronique Microtech | Dispositif de modulation de lumière à adressage matriciel. |
| DE4237296A1 (de) * | 1992-11-05 | 1994-05-11 | Hahn Schickard Inst Fuer Mikro | Hochauflösendes Display |
| US5463200A (en) * | 1993-02-11 | 1995-10-31 | Lumonics Inc. | Marking of a workpiece by light energy |
| FR2710161B1 (fr) * | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
| WO1999010775A1 (en) * | 1997-08-28 | 1999-03-04 | Mems Optical Inc. | System for controlling light including a micromachined foucault shutter array and a method of manufacturing the same |
| US6201633B1 (en) | 1999-06-07 | 2001-03-13 | Xerox Corporation | Micro-electromechanical based bistable color display sheets |
| US6268908B1 (en) * | 1999-08-30 | 2001-07-31 | International Business Machines Corporation | Micro adjustable illumination aperture |
| US6443637B1 (en) | 2000-03-15 | 2002-09-03 | Eastman Kodak Company | Camera with electrostatic light valve that functions as diaphragm |
| US6325554B1 (en) | 2000-03-15 | 2001-12-04 | Eastman Kodak Company | Camera with electrostatic light valve that functions as image reflecting mirror for viewfinder |
| US20110121179A1 (en) * | 2007-06-01 | 2011-05-26 | Liddiard Steven D | X-ray window with beryllium support structure |
| US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
| WO2009009610A2 (en) * | 2007-07-09 | 2009-01-15 | Brigham Young University | Methods and devices for charged molecule manipulation |
| US8498381B2 (en) | 2010-10-07 | 2013-07-30 | Moxtek, Inc. | Polymer layer on X-ray window |
| EP2190778A4 (de) * | 2007-09-28 | 2014-08-13 | Univ Brigham Young | Kohlenstoff-nanorohr-baugruppe |
| US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
| US20100239828A1 (en) * | 2009-03-19 | 2010-09-23 | Cornaby Sterling W | Resistively heated small planar filament |
| US8247971B1 (en) | 2009-03-19 | 2012-08-21 | Moxtek, Inc. | Resistively heated small planar filament |
| US7983394B2 (en) * | 2009-12-17 | 2011-07-19 | Moxtek, Inc. | Multiple wavelength X-ray source |
| US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
| US8750458B1 (en) | 2011-02-17 | 2014-06-10 | Moxtek, Inc. | Cold electron number amplifier |
| US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
| US9076628B2 (en) | 2011-05-16 | 2015-07-07 | Brigham Young University | Variable radius taper x-ray window support structure |
| US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
| US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
| CN115019651B (zh) * | 2022-06-20 | 2023-05-23 | 昆山国显光电有限公司 | 一种卷曲显示模组及其生产工艺 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2322416A1 (fr) * | 1975-08-27 | 1977-03-25 | Philips Nv | Dispositif de reproduction d'images commande par voie electrostatique |
| GB2071896A (en) * | 1980-03-11 | 1981-09-23 | Centre Electron Horloger | Miniature display device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3574012A (en) * | 1969-01-06 | 1971-04-06 | Aerojet General Co | Trimetallic masks and method |
| FR2094458A5 (de) * | 1970-06-22 | 1972-02-04 | Usine Metal Doloise | |
| DE2512086C3 (de) * | 1975-03-19 | 1978-11-30 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur Herstellung freitragender, dünner Metallstrukturen |
| US4170512A (en) * | 1977-05-26 | 1979-10-09 | Massachusetts Institute Of Technology | Method of manufacture of a soft-X-ray mask |
| JPS5844644A (ja) * | 1981-09-10 | 1983-03-15 | Toshiba Corp | カラ−受像管用マスクの製作法 |
-
1983
- 1983-11-18 CH CH6199/83A patent/CH654686A5/fr not_active IP Right Cessation
-
1984
- 1984-11-13 US US06/670,929 patent/US4584056A/en not_active Expired - Lifetime
- 1984-11-15 EP EP84810556A patent/EP0143079A3/de not_active Withdrawn
- 1984-11-15 CA CA000467912A patent/CA1256683A/fr not_active Expired
- 1984-11-15 JP JP59239617A patent/JPS60120389A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2322416A1 (fr) * | 1975-08-27 | 1977-03-25 | Philips Nv | Dispositif de reproduction d'images commande par voie electrostatique |
| GB2071896A (en) * | 1980-03-11 | 1981-09-23 | Centre Electron Horloger | Miniature display device |
Non-Patent Citations (1)
| Title |
|---|
| ELECTRONICS INTERNATIONAL, vol. 56, no. 14, juillet 1983, pages 81-82, New York, US; R.T. GALLAGHER: "Microshutters flip to form characters in dot-matrix display" * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60120389A (ja) | 1985-06-27 |
| US4584056A (en) | 1986-04-22 |
| CH654686A5 (fr) | 1986-02-28 |
| CA1256683A (fr) | 1989-07-04 |
| EP0143079A2 (de) | 1985-05-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Designated state(s): DE FR GB IT NL |
|
| RTI1 | Title (correction) | ||
| PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
| AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB IT NL |
|
| 17P | Request for examination filed |
Effective date: 19870124 |
|
| 17Q | First examination report despatched |
Effective date: 19880830 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 19890310 |
|
| RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: VUILLEUMIER, RAYMOND Inventor name: PERRET, ANDRE |