EP0144522A3 - Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen - Google Patents

Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Download PDF

Info

Publication number
EP0144522A3
EP0144522A3 EP84109511A EP84109511A EP0144522A3 EP 0144522 A3 EP0144522 A3 EP 0144522A3 EP 84109511 A EP84109511 A EP 84109511A EP 84109511 A EP84109511 A EP 84109511A EP 0144522 A3 EP0144522 A3 EP 0144522A3
Authority
EP
European Patent Office
Prior art keywords
getter
vacuum
gas discharge
pump
heat accumulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109511A
Other languages
English (en)
French (fr)
Other versions
EP0144522A2 (de
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0144522A2 publication Critical patent/EP0144522A2/de
Publication of EP0144522A3 publication Critical patent/EP0144522A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Sorptions­ pumpe mit mindestens einem Getterkörper (3) aus nichtver­ dampfendem Gettermaterial und einem zugehörigen Heize­ lement (1). Bei dieser Getterpumpe soll eine hohe Pumpge­ schwindigkeit durch eine extrem große Oberfläche auf kleinstem Raum erreicht werden. Die Erfindung sieht hierzu vor, daß das Heizelement (1) in einem Isolierrohr (2) angeordnet ist, und daß eine Vielzahl von Einzel-­ Getterkörpern (3) voneinander beabstandet auf dem Isolier­ rohr (2) angebracht ist.
Eine erfindungsgemäße Getterpumpe findet in Hochva­ kuum- und Gasentladungsanlagen Verwendung.
EP84109511A 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Withdrawn EP0144522A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3332606 1983-09-09
DE19833332606 DE3332606A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number Publication Date
EP0144522A2 EP0144522A2 (de) 1985-06-19
EP0144522A3 true EP0144522A3 (de) 1986-10-15

Family

ID=6208667

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109511A Withdrawn EP0144522A3 (de) 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen

Country Status (3)

Country Link
US (1) US4571158A (de)
EP (1) EP0144522A3 (de)
DE (1) DE3332606A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0238908A1 (de) * 1986-03-19 1987-09-30 Siemens Aktiengesellschaft Kryosorptionspumpe für ein thermisches Isoliervakuum im Läufer einer elektrischen Maschine mit supraleitender Erregerwicklung
JP3073590B2 (ja) * 1992-03-16 2000-08-07 富士通株式会社 電子化データ保護システム、使用許諾者側装置および使用者側装置
USRE39802E1 (en) 1992-03-16 2007-08-28 Fujitsu Limited Storage medium for preventing an irregular use by a third party
US5317900A (en) * 1992-10-02 1994-06-07 The Lyle E. & Barbara L. Bergquist Trust Ultrasensitive helium leak detector for large systems
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
EP1012478A2 (de) * 1997-04-18 2000-06-28 SAES PURE GAS, Inc. In-situ getterpumpsystem und verfahren
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
RU2140015C1 (ru) * 1998-04-02 1999-10-20 Инновационный фонд Республики Татарстан Способ вакуумирования гермообъема
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
US6988924B2 (en) * 2003-04-14 2006-01-24 Hewlett-Packard Development Company, L.P. Method of making a getter structure
US7909583B2 (en) * 2004-03-23 2011-03-22 Osaka Vacuum, Ltd. Pump apparatus and pump unit thereof
JP6095586B2 (ja) * 2013-01-25 2017-03-15 有限会社真空実験室 ゲッター部材収納具、ゲッター装置及びゲッターポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899257A (en) * 1959-08-11 Getter for electron discharge device
US2130190A (en) * 1936-03-18 1938-09-13 Rca Corp Getter for vacuum tubes
US3081413A (en) * 1952-07-19 1963-03-12 Gen Electric X-ray tube with gas gettering means
US2890319A (en) * 1957-09-16 1959-06-09 Tung Sol Electric Inc Fast-heating hydrogen reservoir
US3167678A (en) * 1961-06-19 1965-01-26 Gen Electric Getter operating at various temperatures to occlude various gases
US3381805A (en) * 1966-07-08 1968-05-07 Getters Spa Getter assembly having support of low thermal conductivity
US3390758A (en) * 1967-03-21 1968-07-02 Union Carbide Corp Getter assembly
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
JPS53121210A (en) * 1977-03-30 1978-10-23 Hitachi Ltd Non-evaporation type getter pump
JPS53131511A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Non-evaporation type cetter pump
US4515528A (en) * 1983-07-05 1985-05-07 General Electric Company Hydrocarbon getter pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Also Published As

Publication number Publication date
US4571158A (en) 1986-02-18
EP0144522A2 (de) 1985-06-19
DE3332606A1 (de) 1985-03-28

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Effective date: 19870326

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18W Application withdrawn

Withdrawal date: 19880613

RIN1 Information on inventor provided before grant (corrected)

Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.