EP0146685A3 - Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen - Google Patents

Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Download PDF

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Publication number
EP0146685A3
EP0146685A3 EP84109515A EP84109515A EP0146685A3 EP 0146685 A3 EP0146685 A3 EP 0146685A3 EP 84109515 A EP84109515 A EP 84109515A EP 84109515 A EP84109515 A EP 84109515A EP 0146685 A3 EP0146685 A3 EP 0146685A3
Authority
EP
European Patent Office
Prior art keywords
getter
vacuum
gas discharge
sorption pump
heat accumulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109515A
Other languages
English (en)
French (fr)
Other versions
EP0146685A2 (de
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0146685A2 publication Critical patent/EP0146685A2/de
Publication of EP0146685A3 publication Critical patent/EP0146685A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Sorptions­ pumpe mit mindestens einem Getterkörper (1) aus nichtver­ dampfendem Gettermaterial und einem zugehörigen Heize­ lement (5). Es soll die spezifische Leistungsfähigkeit von Getterpumpen bei gleichzeitiger Herabsetzung der erforderli­ chen Heizleistung erhöht und mit Hilfe einer Wärmespeiche­ rung langzeitig stabilisiert werden. Die Erfindung sieht hierzu vor, daß der Getterkörper (1) auf seiner Außenoberfläche von einer Draht- Gaze (2) oder einem porösen, gasdurchläs­ sigen Sinterrohr (3) eingehüllt ist, und mit seiner Innenober­ fläche an mindestens ein wärmespeicherndes Isolierrohr (4) angrenzt, das außerdem als Träger für das Heizelement (5) dient.
Eine erfindungsgemäße Getterpumpe findet in Hochva­ kuumund Gasentladungsanlagen Verwendung.
EP84109515A 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Withdrawn EP0146685A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3332647 1983-09-09
DE19833332647 DE3332647A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number Publication Date
EP0146685A2 EP0146685A2 (de) 1985-07-03
EP0146685A3 true EP0146685A3 (de) 1986-10-01

Family

ID=6208693

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109515A Withdrawn EP0146685A3 (de) 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen

Country Status (2)

Country Link
EP (1) EP0146685A3 (de)
DE (1) DE3332647A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
ITMI20011341A1 (it) 2001-06-26 2002-12-26 Getters Spa Dispositivo getter evaporabile per tubi a raggi catodici
CN112169528B (zh) * 2020-09-24 2022-07-12 有研工程技术研究院有限公司 一种内加热式吸气剂片及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609062A (en) * 1968-10-28 1971-09-28 Getters Spa Getter pump
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
US3780501A (en) * 1968-08-10 1973-12-25 Getters Spa Getter pumps
US4297082A (en) * 1979-11-21 1981-10-27 Hughes Aircraft Company Vacuum gettering arrangement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3780501A (en) * 1968-08-10 1973-12-25 Getters Spa Getter pumps
US3609062A (en) * 1968-10-28 1971-09-28 Getters Spa Getter pump
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
US4297082A (en) * 1979-11-21 1981-10-27 Hughes Aircraft Company Vacuum gettering arrangement

Also Published As

Publication number Publication date
DE3332647A1 (de) 1985-03-28
EP0146685A2 (de) 1985-07-03

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Withdrawal date: 19880613

RIN1 Information on inventor provided before grant (corrected)

Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.