EP0144523A3 - Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen - Google Patents

Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Download PDF

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Publication number
EP0144523A3
EP0144523A3 EP84109512A EP84109512A EP0144523A3 EP 0144523 A3 EP0144523 A3 EP 0144523A3 EP 84109512 A EP84109512 A EP 84109512A EP 84109512 A EP84109512 A EP 84109512A EP 0144523 A3 EP0144523 A3 EP 0144523A3
Authority
EP
European Patent Office
Prior art keywords
getter
vacuum
gas discharge
sorption pump
heat accumulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109512A
Other languages
English (en)
French (fr)
Other versions
EP0144523A2 (de
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0144523A2 publication Critical patent/EP0144523A2/de
Publication of EP0144523A3 publication Critical patent/EP0144523A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Sorptions­ pumpe mit mindestens einem Getterkörper (4) aus nichtver­ dampfendem Gettermaterial und einem zugehörigen Heize­ lement (1). Es soll die spezifische Leistungsfähigkeit von Getterpumpen bei gleichzeitiger Herabsetzung der erforderli­ chen Heizleistung erhöht und mit Hilfe einer Wärmespeiche­ rung höchster Wärmespeicherkapazität langzeitig stabilisiert werden. Die Erfindung sieht hierzu vor, daß das Heizelement (1) auf einem Sinterkeramikkörper (2) angebracht ist, und daß sich darüber ein Isolierrohr (3) befindet, auf das der Getterkörper (4) aufgesintert ist.
Eine erfindungsgemäße Getterpumpe findet in Hichva­ kuum- und Gasentladungsanlagen Verwendung.
EP84109512A 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen Withdrawn EP0144523A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3332660 1983-09-09
DE19833332660 DE3332660A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number Publication Date
EP0144523A2 EP0144523A2 (de) 1985-06-19
EP0144523A3 true EP0144523A3 (de) 1986-10-08

Family

ID=6208704

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109512A Withdrawn EP0144523A3 (de) 1983-09-09 1984-08-09 Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen

Country Status (3)

Country Link
US (1) US4534708A (de)
EP (1) EP0144523A3 (de)
DE (1) DE3332660A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
CN103306935B (zh) * 2013-06-19 2016-03-30 中国工程物理研究院应用电子学研究所 一种模块化静态真空维持装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539153A1 (de) * 1967-01-07 1970-02-19 Leybold Heraeus Gmbh & Co Kg Adsorptionskoerper zur Erzeugung con Hochvakuum sowie Herstellungsverfahren hierzu
US3609062A (en) * 1968-10-28 1971-09-28 Getters Spa Getter pump
FR2327817A1 (fr) * 1972-08-10 1977-05-13 Getters Spa Dispositif et composition fixateurs de gaz

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2412302A (en) * 1941-12-03 1946-12-10 Raytheon Mfg Co Getter
US4127361A (en) * 1976-11-29 1978-11-28 S.A.E.S. Getters S.P.A. Air-bakeable water-proof getter device and method of manufacturing same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539153A1 (de) * 1967-01-07 1970-02-19 Leybold Heraeus Gmbh & Co Kg Adsorptionskoerper zur Erzeugung con Hochvakuum sowie Herstellungsverfahren hierzu
US3609062A (en) * 1968-10-28 1971-09-28 Getters Spa Getter pump
FR2327817A1 (fr) * 1972-08-10 1977-05-13 Getters Spa Dispositif et composition fixateurs de gaz

Also Published As

Publication number Publication date
EP0144523A2 (de) 1985-06-19
DE3332660A1 (de) 1985-03-28
US4534708A (en) 1985-08-13

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RIN1 Information on inventor provided before grant (corrected)

Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.