EP0144523A2 - Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz - Google Patents

Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Download PDF

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Publication number
EP0144523A2
EP0144523A2 EP84109512A EP84109512A EP0144523A2 EP 0144523 A2 EP0144523 A2 EP 0144523A2 EP 84109512 A EP84109512 A EP 84109512A EP 84109512 A EP84109512 A EP 84109512A EP 0144523 A2 EP0144523 A2 EP 0144523A2
Authority
EP
European Patent Office
Prior art keywords
getter
sorption pump
gas discharge
heating element
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109512A
Other languages
German (de)
English (en)
Other versions
EP0144523A3 (fr
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0144523A2 publication Critical patent/EP0144523A2/fr
Publication of EP0144523A3 publication Critical patent/EP0144523A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Definitions

  • the invention relates to a getter sorption pump for high vacuum and gas discharge systems with at least one getter body made of non-evaporating getter material and an associated heating element.
  • the working temperature either had to be varied or the individual getters had to be kept at different temperatures with at least two heating circuits.
  • the invention has for its object to increase the specific performance of getter pumps with a simultaneous reduction in the required heating power and to stabilize long-term with the help of heat storage of the highest heat storage capacity.
  • the pumping speed of a getter body increases with its surface, i.e. also with its porosity, but the capacity with its mass. Both factors together determine the temporal stability over the amount of gas sorbed. Furthermore, this stability is influenced by the working temperature depending on the type of gas.
  • the reduction in the required heating output compared to the use of many individual getters results from the more economical use of the heating output from the heating element, e.g. a heating coil (less radiation losses).
  • the heat storage is achieved by the ceramic mass integrated into the construction.
  • the possibilities are extremely versatile and can be optimized in a practical way.
  • Another advantage of energy-saving heat storage is that the heat-related good pumping effect is retained for a long time after the heating voltage has been switched off. Such a shutdown is e.g. absolutely necessary in nuclear accelerator systems to avoid interference from external fields.
  • the slow cooling of the getter body has an advantageous effect in that the temperature-dependent, optimal pumping areas pass very slowly and thus all important gas type-related sorption maxima are recorded.
  • the figure shows the getter sorption pump schematically in section. This construction is characterized by the highest heat storage capacity.
  • the heating element 1 of the getter sorption pump is attached in the form of a heating spiral to a solid, threaded sintered ceramic body 2. Above this there is an insulating tube 3 made of ceramic and provided with a thread, onto which the getter body 4 is sintered, to be precise automatically toothed due to the shape.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP84109512A 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Withdrawn EP0144523A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3332660 1983-09-09
DE19833332660 DE3332660A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number Publication Date
EP0144523A2 true EP0144523A2 (fr) 1985-06-19
EP0144523A3 EP0144523A3 (fr) 1986-10-08

Family

ID=6208704

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109512A Withdrawn EP0144523A3 (fr) 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz

Country Status (3)

Country Link
US (1) US4534708A (fr)
EP (1) EP0144523A3 (fr)
DE (1) DE3332660A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
CN103306935B (zh) * 2013-06-19 2016-03-30 中国工程物理研究院应用电子学研究所 一种模块化静态真空维持装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2412302A (en) * 1941-12-03 1946-12-10 Raytheon Mfg Co Getter
DE1539153A1 (de) * 1967-01-07 1970-02-19 Leybold Heraeus Gmbh & Co Kg Adsorptionskoerper zur Erzeugung con Hochvakuum sowie Herstellungsverfahren hierzu
DE1947413A1 (de) * 1968-10-28 1970-04-30 Getters Spa Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen
IT963874B (it) * 1972-08-10 1974-01-21 Getters Spa Dispositivo getter perfezionato contenente materiale non evapora bile
US4127361A (en) * 1976-11-29 1978-11-28 S.A.E.S. Getters S.P.A. Air-bakeable water-proof getter device and method of manufacturing same

Also Published As

Publication number Publication date
DE3332660A1 (de) 1985-03-28
EP0144523A3 (fr) 1986-10-08
US4534708A (en) 1985-08-13

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Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.