EP0144522A2 - Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz - Google Patents

Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Download PDF

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Publication number
EP0144522A2
EP0144522A2 EP84109511A EP84109511A EP0144522A2 EP 0144522 A2 EP0144522 A2 EP 0144522A2 EP 84109511 A EP84109511 A EP 84109511A EP 84109511 A EP84109511 A EP 84109511A EP 0144522 A2 EP0144522 A2 EP 0144522A2
Authority
EP
European Patent Office
Prior art keywords
getter
sorption pump
individual
pump
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109511A
Other languages
German (de)
English (en)
Other versions
EP0144522A3 (fr
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0144522A2 publication Critical patent/EP0144522A2/fr
Publication of EP0144522A3 publication Critical patent/EP0144522A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Definitions

  • the invention relates to a getter sorption pump for high vacuum and gas discharge systems with at least one getter body made of non-evaporating getter material and an associated heating element.
  • the working temperature either had to be varied or the individual getters had to be kept at different temperatures with at least two heating circuits.
  • the invention has for its object to increase the specific performance of getter pumps with a simultaneous reduction in the required heating power and to stabilize long-term with the help of heat storage and to achieve a high pumping speed through an extremely large surface area in the smallest space.
  • the pumping speed of a getter body increases with its surface, i.e. also with its porosity, but the capacity with its mass. Both factors together determine the temporal stability over the amount of gas sorbed. Furthermore, this stability is influenced by the working temperature depending on the type of gas.
  • the reduction in the required heating output compared to the use of many individual getters results from the more economical use of the heating output from the heating element, e.g. a heating coil (less radiation losses).
  • the heat storage is achieved by the ceramic mass integrated in the construction.
  • the possibilities are extremely versatile and can be optimized in a practical way.
  • Another advantage of energy-saving heat storage is that the heat-related good pumping effect is retained for a long time after the heating voltage has been switched off. For example, such a cut-off 'is essential required in nuclear accelerator facilities to avoid interference from external fields.
  • the slow cooling of the getter body has an advantageous effect in that the temperature-sensitive selective optimal pumping areas pass very slowly and thus all important gas type-related sorption maxima are recorded.
  • the getter sorption pump shown in Fig. 1 consists essentially of the heating element 1, which is arranged in an insulating tube 2.
  • the plurality of single getter bodies 3 is spaced apart on the insulating. tube 2 attached.
  • This arrangement is surrounded by a pump vessel 7, which can be connected to the high vacuum system with a pump flange 8.
  • the heating connections 9 are passed through the pump vessel 7.
  • the insulating tube 2 again shows the insulating tube 2, which is provided with the heating element 1 and is preferably made of ceramic and serves as a heat store.
  • the individual getter bodies 3 are on metal disks 5 brought.
  • the metal disks 5 are provided with spacer beads 6.
  • the metal disks 5 can also be designed as tubular attachment parts. This creates both a good heat-conducting connection with the insulating tube 2 and the desired distance between the individual metal disks.
  • FIG. 3 shows a getter sorption pump in which the individual getter bodies 3 applied to the insulating tube 2, in which the heating element 1 runs, are spaced apart from one another by metal or ceramic rings 4.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP84109511A 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Withdrawn EP0144522A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833332606 DE3332606A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen
DE3332606 1983-09-09

Publications (2)

Publication Number Publication Date
EP0144522A2 true EP0144522A2 (fr) 1985-06-19
EP0144522A3 EP0144522A3 (fr) 1986-10-15

Family

ID=6208667

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109511A Withdrawn EP0144522A3 (fr) 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz

Country Status (3)

Country Link
US (1) US4571158A (fr)
EP (1) EP0144522A3 (fr)
DE (1) DE3332606A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0238908A1 (fr) * 1986-03-19 1987-09-30 Siemens Aktiengesellschaft Pompe à cryosorption pour l'isolation thermique par le vide du rotor d'une machine électrique à enroulement inducteur supraconducteur
US5555304A (en) * 1992-03-16 1996-09-10 Fujitsu Limited Storage medium for preventing an illegal use by a third party
WO1996017171A3 (fr) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Pompe et systeme getter
EP0753663A1 (fr) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Pompe à sorbeur, en particulier pour un instrument portatif d'analyse chimique
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
USRE39802E1 (en) 1992-03-16 2007-08-28 Fujitsu Limited Storage medium for preventing an irregular use by a third party

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317900A (en) * 1992-10-02 1994-06-07 The Lyle E. & Barbara L. Bergquist Trust Ultrasensitive helium leak detector for large systems
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule
KR20010006278A (ko) * 1997-04-18 2001-01-26 사이스 푸어 가스 인코포레이티드 인시튜 게터펌프시스템 및 방법
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
RU2140015C1 (ru) * 1998-04-02 1999-10-20 Инновационный фонд Республики Татарстан Способ вакуумирования гермообъема
US6988924B2 (en) * 2003-04-14 2006-01-24 Hewlett-Packard Development Company, L.P. Method of making a getter structure
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
KR100852063B1 (ko) * 2004-03-23 2008-08-13 고쿠리츠 다이가쿠 호진 교토 다이가쿠 펌프 장치 및 그 펌프 유닛
JP6095586B2 (ja) * 2013-01-25 2017-03-15 有限会社真空実験室 ゲッター部材収納具、ゲッター装置及びゲッターポンプ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899257A (en) * 1959-08-11 Getter for electron discharge device
US2130190A (en) * 1936-03-18 1938-09-13 Rca Corp Getter for vacuum tubes
US3081413A (en) * 1952-07-19 1963-03-12 Gen Electric X-ray tube with gas gettering means
US2890319A (en) * 1957-09-16 1959-06-09 Tung Sol Electric Inc Fast-heating hydrogen reservoir
US3167678A (en) * 1961-06-19 1965-01-26 Gen Electric Getter operating at various temperatures to occlude various gases
US3381805A (en) * 1966-07-08 1968-05-07 Getters Spa Getter assembly having support of low thermal conductivity
US3390758A (en) * 1967-03-21 1968-07-02 Union Carbide Corp Getter assembly
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
JPS53121210A (en) * 1977-03-30 1978-10-23 Hitachi Ltd Non-evaporation type getter pump
JPS53131511A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Non-evaporation type cetter pump
US4515528A (en) * 1983-07-05 1985-05-07 General Electric Company Hydrocarbon getter pump

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727724A (en) * 1986-03-19 1988-03-01 Siemens Aktiengesellschaft Crysosorption pump for the rotor of an electric machine having a superconducting exciter winding
EP0238908A1 (fr) * 1986-03-19 1987-09-30 Siemens Aktiengesellschaft Pompe à cryosorption pour l'isolation thermique par le vide du rotor d'une machine électrique à enroulement inducteur supraconducteur
US5796824A (en) * 1992-03-16 1998-08-18 Fujitsu Limited Storage medium for preventing an irregular use by a third party
US5555304A (en) * 1992-03-16 1996-09-10 Fujitsu Limited Storage medium for preventing an illegal use by a third party
USRE39802E1 (en) 1992-03-16 2007-08-28 Fujitsu Limited Storage medium for preventing an irregular use by a third party
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5980213A (en) * 1994-10-31 1999-11-09 Saes Getters S.P.A. Getter pump module and system
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
WO1996017171A3 (fr) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Pompe et systeme getter
US5772404A (en) * 1995-07-10 1998-06-30 Saes Getters S.P.A. Compact getter pump with nested thermally insulating shields
EP0753663A1 (fr) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Pompe à sorbeur, en particulier pour un instrument portatif d'analyse chimique

Also Published As

Publication number Publication date
US4571158A (en) 1986-02-18
EP0144522A3 (fr) 1986-10-15
DE3332606A1 (de) 1985-03-28

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Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.