EP0208259A2 - Emballage Pour matériaux sensibles à l'humidité - Google Patents

Emballage Pour matériaux sensibles à l'humidité Download PDF

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Publication number
EP0208259A2
EP0208259A2 EP86109050A EP86109050A EP0208259A2 EP 0208259 A2 EP0208259 A2 EP 0208259A2 EP 86109050 A EP86109050 A EP 86109050A EP 86109050 A EP86109050 A EP 86109050A EP 0208259 A2 EP0208259 A2 EP 0208259A2
Authority
EP
European Patent Office
Prior art keywords
packaging
photoresist
film
film tube
water vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86109050A
Other languages
German (de)
English (en)
Other versions
EP0208259B1 (fr
EP0208259A3 (en
Inventor
Hans Dr. Dipl.-Chem. Wilski
Hermann Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoechst AG
Original Assignee
Hoechst AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst AG filed Critical Hoechst AG
Priority to AT86109050T priority Critical patent/ATE56414T1/de
Publication of EP0208259A2 publication Critical patent/EP0208259A2/fr
Publication of EP0208259A3 publication Critical patent/EP0208259A3/de
Application granted granted Critical
Publication of EP0208259B1 publication Critical patent/EP0208259B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
    • B65D65/38—Packaging materials of special type or form
    • B65D65/40—Applications of laminates for particular packaging purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/24—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants
    • B65D81/26—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/24—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants
    • B65D81/26—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators
    • B65D81/266—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators for absorbing gases, e.g. oxygen absorbers or desiccants
    • B65D81/268—Adaptations for preventing deterioration or decay of contents; Applications to the container or packaging material of food preservatives, fungicides, pesticides or animal repellants with provision for draining away, or absorbing, or removing by ventilation, fluids, e.g. exuded by contents; Applications of corrosion inhibitors or desiccators for absorbing gases, e.g. oxygen absorbers or desiccants the absorber being enclosed in a small pack, e.g. bag, included in the package
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1334—Nonself-supporting tubular film or bag [e.g., pouch, envelope, packet, etc.]
    • Y10T428/1338—Elemental metal containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/1355—Elemental metal containing [e.g., substrate, foil, film, coating, etc.]
    • Y10T428/1359—Three or more layers [continuous layer]

Definitions

  • the invention relates to a packaging for dry resist material, which is wound on rolls or stacked in sheet form.
  • So-called dry resists are aqueous-alkaline or photoresists from three-layer systems that can be processed with organic solvents, in which the photopolymer layer is embedded between a carrier film and a protective film.
  • a polyester film such as polyethylene terephthalate, is often used as the carrier film, and a polyolefin film, such as e.g. Polyethylene, related.
  • the photoresists are generally wound on rolls, wrapped in light-tight packaging films and placed in cardboard boxes.
  • the material for the packaging films is often polyethylene, which is colored with soot.
  • Square or rectangular discs are attached to the end faces of the winding cores of the rolls, which are intended to protect the rolls from mechanical damage during transport and handling.
  • the known packaging serves primarily to protect the photoresists from the undesired exposure to light, in particular ultraviolet radiation, from weather influences, from mechanical damage during transport and from contamination.
  • the object of the invention is therefore to prevent the flow of stored dry resist material, regardless of the period between the production and processing of the dry resist material, the duration of storage and the storage conditions.
  • the packaging consists of a largely water vapor impermeable material with a water vapor permeability less than 0.01 grams of water vapor per square meter and day, with a moisture gradient of 97% and an ambient temperature of 23 ° C.
  • the packaging according to the invention can of course also be used for dry resist material which is stacked in sheet form.
  • the advantage is achieved that in the case of the absolutely moisture-impermeable packaged photoresist material, edge escapes practically no longer occur, even if the photoresist material is stored for a very long time.
  • “Absolutely impermeable to moisture” is to be understood here to mean a package whose permeability to the water vapor in the air is so small that it can no longer be detected with the most sensitive measuring devices currently available. The limit of detection is currently at about 0.001 g / m2d. This result is very surprising, since the polyethylene films commonly used for packaging are generally considered to be impermeable to water vapor.
  • FIG. 1 shows the water absorption of a three-layer photoresist sample in which the photoresist was exposed to atmospheric moisture without a carrier and cover film.
  • the photoresist sample is first dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. At room temperature, the sample is saturated after 1.5 hours.
  • FIG. 2 shows the water absorption of a photoresist sample covered on both sides with foils, which, like the aforementioned photoresist sample, consists of three layers. This sample was first also dried over phosphorus pentoxide and then exposed to an atmosphere with 53% relative humidity. The equilibrium has not yet been reached after 20 hours.
  • FIG. 3 shows the viscosities of two different photoresist materials as a function of the water content of the photoresist materials.
  • the water content of the individual photoresist is roughly proportional to the air humidity.
  • the course of the viscosities shows that photoresists are manufactured largely dry and have a high initial viscosity, when stored in air, which generally always has a certain atmospheric humidity, absorb water and thereby become thin, ie, in other words, their viscosity decreases.
  • the respective ambient temperature has an influence on the viscosity of the photoresist in that it decreases with increasing temperature.
  • Water absorption causes swelling of the photoresists, which can lead to an increase in thickness and volume of up to 4.6% and 13.8%, respectively, when the relative humidity of the air is increased from 0% to 97%, at a room temperature of 23 ° C.
  • the packaging according to the invention which reliably ensures the quality of the photoresist material over long periods of time, can be of various types Wise to be executed.
  • a photoresist roll 2 is enclosed by a packaging 1, which consists of a film tube made of water vapor-impermeable material.
  • the film tube is welded or glued at both ends.
  • the winding core of the photoresist roll 2 is closed with end disks, which are not shown.
  • the upper end edges of the roll roll of the photoresist roll 2 are free of photoresist material leaks.
  • the effect of the sealed packaging can be improved further by sucking the air out of the interior of the film tube or replacing it with dry air or a dry gas immediately before the packaging 1 is sealed or glued.
  • the film tube is not damaged.
  • Small holes or cracks enable the passage of air, which always has a certain atmospheric humidity, through the packaging 1, in particular in the event of changes in temperature, so that its effect is partially canceled.
  • the water vapor introduced by the incoming air can be controlled by a container 6, the content of which is a desiccant 10, in the case of damaged packaging 1.
  • the container 6 can be arranged in the packaging 1 in various ways. Either the container 6 with the photoresist roll 2 is also packed in, inserted into a loop or pocket provided on the inside of the packaging 1, or introduced into the inside of the winding core of the photoresist roll.
  • the desiccant in the container 6 only offers protection in the event of minor damage to the packaging 1, but can in no way replace the packaging 1 as such.
  • commercially available silica gel types are suitable as drying agents.
  • a tinplate canister is provided, into which the photoresist rolls are soldered individually or in groups, so that no air humidity can penetrate into the interior of the packaging.
  • Fig. 5 shows schematically in perspective sectional view a photoresist roll 2, which is colored in a black Polyethylene film tube 11 was stored at 97% relative humidity for eleven days.
  • the photoresist roller 2 stored over saturated potassium sulfate solution to maintain 97% relative air humidity shows the schematically indicated photoresist outlets 5 on the front edges, caused by the entry of moist air through the polyethylene film tube 11 serving as packaging, the water vapor permeability of which is generally considerably greater than 1 g / m2d at 85% relative humidity difference and 23 ° C ambient temperature.
  • a film material used for the packaging 1 is shown in section in FIG. 6. It is a polyester-aluminum composite made from a biaxially stretched polyester film 7 as a carrier film, such as a polyethylene terephthalate film (HOSTAPHAN®) from Kalle Niedermik of Hoechst AG, which is laminated with an aluminum film 8 or vapor-coated with aluminum and is laminated with a polyethylene film 9.
  • the polyethylene film 9 can also be extrusion coated.
  • the polyester film 7 has a thickness of approximately 12 ⁇ m, the aluminum film 8 from 7 to 12 ⁇ m and the polyethylene film 9 from 70 to 100 ⁇ m.
  • the first-mentioned material layer namely the polyester film 7 of the composite, is always on the outside of the packaging 1; the last-mentioned layer is facing the packaged goods.
  • the sealing temperature for the film composite is between 130 to 180 ° C.
  • the water vapor permeability is less than 0.001 g / m2d and thus offers sufficient tightness for the storage of the photo resist rolls, even under very unfavorable conditions.
  • a 100 m photoresist roll with a width of 400 mm of the "Ozatec T 138 ®" photoresist from Kalle Niedermik of Hoechst AG was immediately put into a cylindrical tinplate container, closed with a lid and then soldered on.
  • a second roll of photoresist made of the same photoresist material was wrapped in a black colored film made of polyethylene. The ends of the film were loosely inserted into the hollow winding core of the photoresist roll.
  • the two differently packaged photoresist rolls were stored in a plastic container, lying on a wire shelf, at an ambient temperature of 23 ° C for four weeks.
  • the photoresist roll wrapped in the polyethylene film showed strong leakage of photoresist material at the front edges and sticking of these exits, which experience has shown to greatly impair the processability of the photoresist material.
  • Example 2 The procedure was the same as in Example 1, instead of the tinplate canister, a film tube made of the above-described polylester-aluminum composite from Kalle Niederturi of Hoechst AG was used, and the free tube ends were sealed immediately after the photo-roll was packed. After four weeks of storage, the photoresist roll packed in this way showed no changes on the front edges that were completely flawless. In this respect, this result is comparable to the result of the packaging of the photoresist roll in a soldered tinplate canister according to Example 1 without any restriction.
  • Example 1 the photoresist roll loosely packaged in the polyethylene film showed strong emergence of photoresist at the front edges and corresponding gluing of the photoresist exits.
  • Example 1 The test arrangement was the same as in Example 1.
  • a photoresist roll of the same type as in Example 1 was packed in a film tube made of polyester-aluminum composite and welded to it. The film tube was deliberately damaged by repeated bending, only the aluminum film was broken, but not the carrier film and the laminated polyethylene film, as far as this could be assessed visually.
  • a second roll of photoresist of the same type was sealed in a film tube which was treated in the manner described above.
  • a bag of 100 g granular silica gel was packed with this photo resist roll. Both packaged photoresist rolls were then stored for four weeks, as in Example 1, over water. The inspection of the photoresist rolls after this time showed that there was a slight edge leakage at the front edge of the photoresist roll when packaging without desiccant, while the photoresist roll packed with desiccant was in perfect condition.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Food Science & Technology (AREA)
  • Packages (AREA)
  • Materials For Photolithography (AREA)
  • Food Preservation Except Freezing, Refrigeration, And Drying (AREA)
  • Laminated Bodies (AREA)
  • Wrappers (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Pens And Brushes (AREA)
  • Polymerisation Methods In General (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Sealing Material Composition (AREA)
  • Packaging Of Machine Parts And Wound Products (AREA)
EP86109050A 1985-07-12 1986-07-03 Emballage Pour matériaux sensibles à l'humidité Expired - Lifetime EP0208259B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT86109050T ATE56414T1 (de) 1985-07-12 1986-07-03 Verpackung fuer trockenresistmaterial.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3524846 1985-07-12
DE19853524846 DE3524846A1 (de) 1985-07-12 1985-07-12 Verpackung fuer trockenresistmaterial

Publications (3)

Publication Number Publication Date
EP0208259A2 true EP0208259A2 (fr) 1987-01-14
EP0208259A3 EP0208259A3 (en) 1988-08-24
EP0208259B1 EP0208259B1 (fr) 1990-09-12

Family

ID=6275547

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86109050A Expired - Lifetime EP0208259B1 (fr) 1985-07-12 1986-07-03 Emballage Pour matériaux sensibles à l'humidité

Country Status (13)

Country Link
US (1) US4852732A (fr)
EP (1) EP0208259B1 (fr)
JP (1) JPS6216377A (fr)
KR (1) KR870001493A (fr)
AT (1) ATE56414T1 (fr)
AU (1) AU590293B2 (fr)
BR (1) BR8603257A (fr)
DE (2) DE3524846A1 (fr)
ES (1) ES297122Y (fr)
HK (1) HK14993A (fr)
IL (1) IL79108A0 (fr)
SG (1) SG77292G (fr)
ZA (1) ZA865073B (fr)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
DE8812012U1 (de) * 1988-09-22 1988-12-01 Sika AG, vormals Kaspar Winkler & Co, Zürich Verpackungsbeutel für Klebstoffe zum Einlegen in Faßbehälter
US4971196A (en) * 1986-11-25 1990-11-20 Hitachi, Ltd. Surface package type semiconductor package

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US5040678A (en) * 1990-06-07 1991-08-20 Transpan Company Biological sample transport container
US5195689A (en) * 1990-06-15 1993-03-23 Xerox Corporation Moisture proof binding tape cartridge
JPH0560712A (ja) * 1991-09-05 1993-03-12 Nippon Steel Corp 気体中の水分濃度測定方法
US5261535A (en) * 1992-05-29 1993-11-16 Eastman Kodak Company Flexible photographic film package
DE4233817C1 (de) * 1992-10-07 1994-02-24 Kabi Pharmacia Gmbh Verpackungsmaterial für ein gasfreisetzendes Produkt
US5322161A (en) * 1992-11-30 1994-06-21 United States Surgical Corporation Clear package for bioabsorbable articles
DE4311129A1 (de) * 1993-04-05 1994-10-06 Alfill Getraenketechnik Verfahren und Vorrichtung zum Fördern einer Materialbahn
US5846696A (en) * 1995-10-13 1998-12-08 Eastman Kodak Company Blends of polymer and zeolite molecular sieves for packaging inserts
US5789044A (en) * 1996-01-24 1998-08-04 Eastman Kodak Company Zeolite molecular sieves for packaging structures
US6180708B1 (en) * 1996-06-28 2001-01-30 W. R. Grace & Co.-Conn. Thermoplastic adsorbent compositions containing wax and insulating glass units containing such compositions
US6112888A (en) * 1996-06-28 2000-09-05 W. R. Grace & Co.-Conn. Non-reclosable packages containing desiccant matrix
DE19626794A1 (de) * 1996-07-03 1998-01-08 Genova Deutschland Gmbh & Co K Widerstandsflächenheizung
US5975288A (en) * 1997-03-28 1999-11-02 49 Cigar, Llc Humidity altering device
US7337592B2 (en) * 1997-11-20 2008-03-04 Aion Co., Ltd. Porous poly(vinyl acetal) resin body having a high degree of cleanliness, a process of preparing the same, and a method of storing the same
US6224258B1 (en) * 1998-04-06 2001-05-01 Darren W. Dodson Storage system including bag with hole reinforcing structure
US20030209453A1 (en) * 2001-06-22 2003-11-13 Herman Craig Steven Method and package for storing a pressurized container containing a drug
US6089367A (en) 1999-06-11 2000-07-18 Pac One, Inc. Securement of a pad to the inside of a bag
GB0015043D0 (en) * 2000-06-21 2000-08-09 Glaxo Group Ltd Medicament dispenser
US20080110900A1 (en) * 2006-11-13 2008-05-15 Eurokeg B.V. Container for fluids, in particular liquids, and a method of making a container
JP5010952B2 (ja) * 2007-03-28 2012-08-29 株式会社神戸製鋼所 フラックス入りシーム有り溶接用ワイヤ中間品の包装方法およびフラックス入りシーム有り溶接用ワイヤ中間品の包装体
US9458451B2 (en) 2007-06-21 2016-10-04 Gen-Probe Incorporated Multi-channel optical measurement instrument
PL2354035T3 (pl) * 2008-12-01 2013-09-30 Senju Metal Industry Co Zespół opakowania do magazynowania i sposób magazynowania mikrokulek lutowniczych
EP2585384A1 (fr) * 2010-06-22 2013-05-01 Dow Global Technologies LLC Film sensible à l'humidité emballé, enroulé, roulé de manière cylindrique et procédé de fabrication de celui-ci
US20130193007A1 (en) * 2012-01-28 2013-08-01 Honeywell International Inc. Packaging and methods of packaging particulate solids
WO2014052941A1 (fr) * 2012-09-28 2014-04-03 Entegris, Inc. Emballage de brosse de polissage chimico-mécanique
US9284109B2 (en) * 2013-02-20 2016-03-15 Dow Global Technologies Llc Dispenser for flexible sheets
PL3015239T3 (pl) * 2014-11-03 2021-11-08 Mondi Ag Zdzieralna, elastyczna i przezroczysta okładzina procesowa
US10047208B2 (en) * 2014-11-27 2018-08-14 Sumitomo Chemical Company, Limited Method for producing porous film
TWI634051B (zh) * 2016-02-22 2018-09-01 Ｊｘ金屬股份有限公司 高純度錫真空包裝品、將高純度錫真空包裝之方法及高純度錫真空包裝品之製造方法
JP7035763B2 (ja) * 2018-04-25 2022-03-15 セイコーエプソン株式会社 梱包体、梱包体の製造方法、及び液体吐出装置の製造方法
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971196A (en) * 1986-11-25 1990-11-20 Hitachi, Ltd. Surface package type semiconductor package
EP0512579A1 (fr) * 1986-11-25 1992-11-11 Hitachi, Ltd. Emballage d'éléments semi-conducteurs
US5607059A (en) * 1986-11-25 1997-03-04 Hitachi, Ltd. Surface package type semiconductor package and method of producing semiconductor memory
US5803246A (en) * 1986-11-25 1998-09-08 Hitachi, Ltd. Surface package type semiconductor package and method of producing semiconductor memory
US5988368A (en) * 1986-11-25 1999-11-23 Hitachi, Ltd. Resist pattern forming method using anti-reflective layer resist pattern formed and method of etching using resist pattern and product formed
US6223893B1 (en) 1986-11-25 2001-05-01 Hitachi, Ltd. Surface package type semiconductor package and method of producing semiconductor memory
US6443298B2 (en) 1986-11-25 2002-09-03 Hitachi, Ltd. Surface package type semiconductor package and method of producing semiconductor memory
US6981585B2 (en) 1986-11-25 2006-01-03 Renesas Technology Corp. Surface package type semiconductor package and method of producing semiconductor memory
DE8812012U1 (de) * 1988-09-22 1988-12-01 Sika AG, vormals Kaspar Winkler & Co, Zürich Verpackungsbeutel für Klebstoffe zum Einlegen in Faßbehälter

Also Published As

Publication number Publication date
EP0208259B1 (fr) 1990-09-12
ATE56414T1 (de) 1990-09-15
ES297122U (es) 1988-11-16
ES297122Y (es) 1989-06-16
IL79108A0 (en) 1986-09-30
BR8603257A (pt) 1987-02-24
HK14993A (en) 1993-03-05
KR870001493A (ko) 1987-03-14
US4852732A (en) 1989-08-01
JPS6216377A (ja) 1987-01-24
DE3524846A1 (de) 1987-01-15
DE3674092D1 (de) 1990-10-18
EP0208259A3 (en) 1988-08-24
ZA865073B (en) 1987-02-25
AU5973486A (en) 1987-01-15
AU590293B2 (en) 1989-11-02
SG77292G (en) 1992-12-24

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