EP0283736A2 - Pompe à vide poussé avec rotor en forme de cloche - Google Patents

Pompe à vide poussé avec rotor en forme de cloche Download PDF

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Publication number
EP0283736A2
EP0283736A2 EP88102562A EP88102562A EP0283736A2 EP 0283736 A2 EP0283736 A2 EP 0283736A2 EP 88102562 A EP88102562 A EP 88102562A EP 88102562 A EP88102562 A EP 88102562A EP 0283736 A2 EP0283736 A2 EP 0283736A2
Authority
EP
European Patent Office
Prior art keywords
rotor
bell
pump
high vacuum
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88102562A
Other languages
German (de)
English (en)
Other versions
EP0283736A3 (fr
Inventor
Heinz-Dieter Bürger
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Publication of EP0283736A2 publication Critical patent/EP0283736A2/fr
Publication of EP0283736A3 publication Critical patent/EP0283736A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to a high vacuum pump with a bell-shaped rotor, the shaft of which is held by roller bearings, which are located inside the rotor bell, with a stator, which together with the cylindrical inner surface of the rotor on the one hand and together with the cylindrical outer surface of the rotor on the other forms a molecular pump stage, of which at least the former is of the Holwecktype, and with a suction connection, which is located in the region of the apex of the bell-shaped rotor.
  • a neutral purge gas e.g. nitrogen
  • Flushing does not work, however, if a sudden increase in pressure or a vigorous outgassing in the connected vacuum system reduces the fore-vacuum pressure to values of e.g. 1000 Pa can rise. In these cases, the extracted gas strikes with its aggressive components through the sealing gap into the engine and storage space and first destroys the bearings.
  • the object of the invention is therefore to provide a high vacuum pump in which no aggressive gases can penetrate into the area of the motor and the bearing even after a sudden increase in pressure.
  • the fore-vacuum connection of the pump is arranged in the region of the bell rim of the rotor and that the Holweck stage is designed as a dynamic seal pumping in the direction of the bell rim, so that a higher vacuum in the area of the roller bearings than at the bell rim of the rotor prevails.
  • the pumping direction of the pump stage acting over the cylindrical inner surface of the rotor has been reversed and this stage has been converted into a dynamic seal which prevents gases from penetrating into the storage space.
  • the pump has a housing 1, which can be connected to a vessel to be evacuated via a flange 2.
  • the suction connection 3 is therefore within this flange in the area of the apex 4 of a bell-shaped rotor 5 which is inserted into the housing 1.
  • a tubular stator 6, firmly connected to the housing, projects from below and has grooves 7 of a Holweck pumping stage on its cylindrical outer surface. Similar grooves 8, but with larger dimensions, are located on the cylindrical inner surface of the housing 1 and form a further Holweck pumping stage in connection with the outer cylindrical surface 9 of the rotor 5.
  • the direction of inclination of the grooves 7 is the same as that of the grooves 8, so that the pumping action in both stages in the figure runs from top to bottom.
  • the gases to be pumped, which are sucked in at the suction connection 3, are thus sucked down by the Holweck pump formed by the grooves 8 and the rotor outer surface 9 and reach a fore-vacuum pump, not shown, via a side connection 11.
  • the rotor is held in the interior of the tubular stator 6 by two roller bearings 12 and 13, which enclose the motor 14 between them.
  • the details of the motor, such as windings, laminated cores, electrical supply, etc., have not been shown, since this is a technique familiar to the person skilled in the art.
  • purge gas can usually be dispensed with here. To increase safety, however, purge gas can still be fed into the engine compartment in a greatly reduced amount if desired.
  • An important advantage of the pump according to the invention is its insensitivity to short-term pressure increases of up to a few thousand Pa. Even very short pressure increases up to atmospheric pressure do not yet lead to the complete breakdown of the vacuum in the engine compartment 15.
  • the invention is not restricted in all details to the pump shown in the figure, especially since its representation is highly schematic.
  • the invention can also be applied to turbomolecular pumps or mixed pumps in which turbo blading is provided instead of or next to the grooves 8.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP88102562A 1987-02-24 1988-02-22 Pompe à vide poussé avec rotor en forme de cloche Withdrawn EP0283736A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3705912 1987-02-24
DE19873705912 DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor

Publications (2)

Publication Number Publication Date
EP0283736A2 true EP0283736A2 (fr) 1988-09-28
EP0283736A3 EP0283736A3 (fr) 1989-03-08

Family

ID=6321656

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88102562A Withdrawn EP0283736A3 (fr) 1987-02-24 1988-02-22 Pompe à vide poussé avec rotor en forme de cloche

Country Status (4)

Country Link
US (1) US4806074A (fr)
EP (1) EP0283736A3 (fr)
JP (1) JPS63208695A (fr)
DE (1) DE3705912A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292A1 (fr) * 1990-07-06 1992-01-08 Alcatel Cit Ensemble mécanique de pompage pour vide secondaire et installation de détection de fuite utilisant un tel ensemble
WO2006037730A1 (fr) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Pompe a vide a friction

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792B1 (fr) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Pompe à effet visqueux avec au moins un étage hélicoidal à côté du refoulement
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
JPH0442296U (fr) * 1990-08-07 1992-04-09
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
WO2009142905A1 (fr) * 2008-05-20 2009-11-26 Sundew Technologies, Llc Procédé et appareil de déposition
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1492846A (en) * 1922-05-11 1924-05-06 Mullard Radio Valve Co Ltd Vacuum pump
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
NL168311C (nl) * 1978-03-01 1982-03-16 Neratoom Afdichtende doorvoer.
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
EP0129709A3 (fr) * 1983-04-26 1985-03-06 Anelva Corporation Pompe moléculaire combinée pour faciliter le nettoyage
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292A1 (fr) * 1990-07-06 1992-01-08 Alcatel Cit Ensemble mécanique de pompage pour vide secondaire et installation de détection de fuite utilisant un tel ensemble
WO2006037730A1 (fr) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Pompe a vide a friction
CN100458171C (zh) * 2004-10-01 2009-02-04 厄利孔莱博尔德真空技术有限责任公司 摩擦真空泵

Also Published As

Publication number Publication date
EP0283736A3 (fr) 1989-03-08
US4806074A (en) 1989-02-21
DE3705912C2 (fr) 1989-03-02
DE3705912A1 (de) 1988-09-01
JPS63208695A (ja) 1988-08-30

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