EP0307403B1 - Tete d'ecriture a l'encre avec membrane a excitation piezoelectrique - Google Patents

Tete d'ecriture a l'encre avec membrane a excitation piezoelectrique Download PDF

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Publication number
EP0307403B1
EP0307403B1 EP87903243A EP87903243A EP0307403B1 EP 0307403 B1 EP0307403 B1 EP 0307403B1 EP 87903243 A EP87903243 A EP 87903243A EP 87903243 A EP87903243 A EP 87903243A EP 0307403 B1 EP0307403 B1 EP 0307403B1
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EP
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Prior art keywords
membrane
ink
layer
writing head
channel
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Expired - Lifetime
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EP87903243A
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German (de)
English (en)
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EP0307403A1 (fr
Inventor
Joachim Heinzl
Manfred Lehmann
Günter Elmar TRAUSCH
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Siemens AG
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Siemens AG
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • the invention relates to an ink writing head and a method for producing an ink writing head according to the preamble of claims 1 and 13.
  • Piezoelectric drive elements in ink pens are generally known.
  • DE-A-21 64 614 describes an arrangement in writing mechanisms for writing with colored liquid on paper, in which a liquid located in an ink chamber is ejected from a writing nozzle via a piezoelectrically operated drive element.
  • the change in volume in the chamber is brought about by an electrically controlled piezoceramic which sits on a metal plate and which bulges into the chamber.
  • the piezo drive element used consists of a continuously polarized piezoceramic layer which is arranged on a metal plate, the metal plate serving as a counter electrode.
  • a suitable voltage pulse is applied, the piezoceramic contracts. Since the ceramic is attached to a metal plate, a bending moment affects this plate. As a result, the central part of the plate bulges into the liquid chamber.
  • the changes in length that can be generated directly piezoelectrically are negligibly small. They are also limited by the electric field strengths that can be applied to the ceramic without causing breakdowns or arcing. Furthermore, the field strengths created must not lead to a polarization reversal, they must also be switchable via appropriate control circuits.
  • the field strength should be less than 1 V / gm in the opposite direction to the polarization.
  • the distances between electrodes in air should also not be less than 1 pmN.
  • the direct change in length that can be achieved in this way is thus around 1%. or about 0.2 ⁇ m at 200 pm layer density, provided the ceramic is thoroughly active and not partially inactive through a burning skin.
  • the drive elements be they piezo tubes or piezo plates, are necessary for a whole range of functions.
  • the object of the invention is therefore to design an ink head of the type mentioned in such a way that it can be easily produced on the one hand in a galvanoplastic process and on the other hand it has a high degree of efficiency.
  • the membrane has a piezoelectrically excitable peripheral region and a piezoelectrically excitable central region, which are controlled in such a way that the membrane in its peripheral region is shortened by transverse contraction and lengthened in its central region to produce a membrane deflection, results in a particularly large one Stroke.
  • This stroke is the result of the exploitation of two effects, namely the exploitation of the transverse contraction in the ceramic itself and the curvature of the bond between adjacent layers, which expand differently.
  • the cross-contraction can increase the stroke of the membrane by reducing the layer thickness and increasing the length dimensions.
  • a particularly advantageous force effect results if the membrane regions are arranged concentrically with one another, so that they bulge out like warts when excited.
  • This wart-like bulge represents the smallest and most compact geometric shape, which starts from a flat layer and widens and closes a cavity. It is rotationally symmetrical about a surface normal and leaves the plane in a toroidal fillet which merges into a lenticular spherical section. The required state of curvature changes at the transition line.
  • the electrodes are accordingly arranged or the corresponding membrane regions are polarized and controlled via the electrodes in such a way that the peripheral region (circular ring) is shortened, but the central region is lengthened.
  • the edge of the membrane does not change its inclination when deflected, which is why it can be firmly clamped.
  • the bending line essentially corresponds to a deflection under internal pressure.
  • a plurality of membranes which can be activated individually and independently of one another are arranged on a common substrate surface, the control lines for the individual membrane regions leading over unpolarized regions of the substrate surface, so that no undesired piezoelectric effects occur when these control lines are activated.
  • a further piezoelectrically excitable layer can be arranged instead of the support layer, which is polarized in the opposite direction to the first piezoelectrically excitable layer. This almost doubles the stroke.
  • a particularly simple, reliably operating ink writing head can be formed in that each ink channel is assigned three membranes which are connected to one another via a pump channel for the writing liquid and form a static pump with two controllable locking slides and a variable cavity.
  • the first membrane area is connected on the one hand to the ink supply system via a supply channel, and on the other hand to the variable cavity and serves as an inlet valve.
  • the second membrane area is associated with the variable cavity and a third membrane area is located between the cavity and the ink channel as an outlet valve.
  • the pump channel connecting the membranes has separating webs in the region of the membranes designed as valves, which cooperate with the membrane surfaces in such a way that the pump channel opens after the membrane surfaces have been deflected via the separating webs and the pump channel in the region of the separating webs via the Membrane surfaces in the undeflected state of the membrane surfaces is interrupted.
  • the separating webs can be designed as continuous webs or as collar-shaped elevations with outlet openings or inlet openings in between.
  • the ink can be filtered considerably better, thus preventing the penetration of dirt into the ink channels.
  • the separator can be cleaned immediately with ultrasound and contaminations on the separator can be ground.
  • the transducer elements keep the ink channels closed as long as the transducer elements are not activated, a mechanical closure of the nozzles between the print head and paper is not necessary and the drive of such a closure can be dispensed with. This makes it possible to reduce the paper gap very much, so that the typeface is less affected by the dispersion of the airspeed and the direction of flight of the drops. Since the pressure on the nozzle can be applied statically, the flight speed can be increased. Crosstalk between the nozzles is eliminated since there is no flow connection when spraying.
  • the spray frequency is not limited by reflections in the channel and not by crosstalk from neighboring nozzles, but only by the eigenvalues of the individual transducer elements. An individual adjustment of the transducer elements can be omitted, since the transducer is coupled to the ink in a much more direct and uniform manner.
  • the ink supply system according to the invention is independent of static negative pressure, it becomes substantially less sensitive, which also means that the acceleration sensitivity of the ink writing head disappears.
  • Static pumping removes air bubbles from the ink channel. Empty channels can be filled electrically controlled.
  • the ink reservoir can be accommodated stationary in the printer without difficulty. Pressure waves from the moving supply hose have no effect on the drop formation.
  • the monitoring of the ink supply is no longer tied to the narrow limits of a static pressure in the reservoir.
  • the entire print head can be produced in a particularly simple manner using planar techniques.
  • the critical part, namely the piezoceramic, can be checked before the actual assembly.
  • a planar transducer made of piezoceramic consists of a piezoelectrically excitable layer 1 made of piezoceramic which is polarized in one direction and a support layer 2, for example made of Nikkel, which is firmly connected to this excitable layer.
  • This electrically controllable membrane thus formed is controlled via corresponding electrodes 3, 4, the support layer 2 serving as a continuous ground electrode and the actual control electrodes consisting of a peripheral control electrode 3 and a central control electrode 4.
  • These control electrodes 3 and 4 define membrane regions arranged concentrically to one another in the form of circular surfaces or circular ring surfaces.
  • the drive electrodes 3 and 4 are now designed according to the invention in connection with the piezoelectrically excitable layer 1 and the support layer 2, which serves as a ground electrode, in such a way that this ideal shape approximately results during the deflection.
  • the circular outer electrode 3 is arranged in the outer region of curvature of the membrane and is subjected to an electrical field such that the piezoelectric layer contracts in this region of curvature.
  • the inner electrode 4, which is arranged concentrically thereto, is in turn subjected to a field such that the central region of the piezoceramic layer 1 expands.
  • the ratio of the electrode areas to one another is now dimensioned such that the desired approximation of the course in FIG. 1a results. This results in an inclination in accordance with FIG. 1b with the associated curvature in FIG. 1c (right side in FIG. 1).
  • a static pump consisting of two controllable gate valves SE and SA and a variable cavity H can be formed.
  • three membrane areas for SE, H, SA are formed in a ceramic substrate.
  • a pump channel P is formed in a carrier layer T carrying the substrate 1 with its associated support layer 2. This pump channel P is connected to a fluid supply V (FIG. 4).
  • a transverse rib Q is formed in the pump channel in the area of the inlet valve SE, against which the membrane made of piezoceramic 1 and support layer 2 is applied in the unexcited state and thus closes the channel. In the excited state according to FIG. 2, the membrane lifts off in a wart-like manner and thus opens the channel P.
  • the pump channel can also be designed in a different way. It is also possible to replace the transverse ribs Q by walls of round inlet and outlet openings A which protrude into the pump channels. The membrane surface then lies in the unexcited state in a manner analogous to that on the transverse rib on this collar and thus closes the inlet or outlet.
  • an ink writing head can be constructed in which e.g. nine writing nozzles S1 to S9 are arranged. Each of these writing nozzles consists of an inlet valve SE, a variable cavity H and an outlet valve SA. The writing nozzles S1 to S9 are connected to the storage area V. In order to be able to form a write head with a larger number of nozzles, it is also possible to pack several substrates 1 with write nozzles one above the other.
  • the writing nozzles S1 to S9 are functionally completely separated from the ink supply V.
  • a mechanical closure of the nozzles between the write head and the paper arranged in front of it and the drive of this closure can thus be dispensed with, since the ink channels are closed by the outlet valves SA as long as these outlet valves SA are not actuated.
  • Crosstalk between the nozzles is eliminated, since the actual one Spraying process there is no flow connection.
  • the spraying processes are not limited by the reflection in the spray channel and not by the crosstalk from neighboring nozzles, but only by the eigenvalues of the individual writing nozzles S1 to S9.
  • Static pumping removes air bubbles from ink channel P and refills empty channels.
  • the ink write head according to the invention can be produced particularly simply using planar technology.
  • a substrate 1 consisting of piezoceramic with a thickness of approximately 200 ⁇ m is first polarized and tested. Then the piezoceramic 1 is metallized on both sides by vacuum evaporation or sputtering (e.g. 50 nm Ti and 500 nm Cu).
  • the support layer 2 is galvanically deposited over the entire surface.
  • the peripheral and central control electrodes 3 and 4 together with supply lines L e.g. 100 ⁇ m Ni
  • supply lines L e.g. 100 ⁇ m Ni
  • a thin intermediate layer Z e.g. 0.2 mm Al or Cu
  • Z e.g. 0.2 mm Al or Cu
  • It is vapor-deposited or sputtered and structured using photolithography and etching technology.
  • the channels P can be formed by electrodeposition of a metal layer W between a photoresist structure (e.g. 50 ⁇ m Ni). After a metallic conductive layer has been applied over the non-conductive photoresist, the support layer T is then galvanically deposited over the entire surface (e.g. 100 ⁇ m Ni). However, the channel walls W can also be produced together with the carrier layer T in one step. For this purpose, a structure K made of photoresite or metal (e.g. Cu) of the shape of the later channels and cavities is produced on the support layer 2. If photoresite is used, then its surface must be made conductive with another thin metal layer. If metal is used, the channel wall support layer metal can be electrodeposited directly on the structure K and the remaining exposed substrate surface 2 (e.g. 100 pm Ni), FIG. 11.
  • a photoresist structure e.g. 50 ⁇ m Ni
  • the support layer T is then galvanically deposited over the entire surface (e.g. 100 ⁇ m Ni).
  • the channel walls W can also be
  • the structure K made of photoresite or metal is then selectively removed from the overall structure and finally the crossbar Q is separated from the wart by removing the intermediate layer.
  • the etchable filler is then removed and the auxiliary layer (Z) is also removed so that the transverse ribs Q can detach from the support layer 2 when the substrate 1 bulges.
  • openings can be provided which are later closed again.
  • a further support layer SS can be applied outside the electrodes on the back of the ceramic layer 1. It is also possible to produce the lines L for the electrodes 3 and 4 (FIG. 10) simultaneously with the support layer, ie from the same material and with the same thickness.
  • the transverse rib Q it is also possible according to FIG. 12 to design the transverse rib in a circular manner, with the axis of the outlet nozzle A then having a direction perpendicular to the substrate surface 1. It is therefore possible to construct the ink writing head so that the outlet nozzles A are arranged on the end face of the substrate or in such a way that they are arranged on the substrate surface. Which is the more advantageous arrangement depends on the intended use. As also shown in FIG. 14, to increase the division view between the raster line RZ the ink writing head can be inclined at an angle to the raster line.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Une tête d'écriture pourvue de canaux éjecteurs d'encre avec leurs éléments transducteurs piézoélectriques, canaux qui sont alimentés en liquide d'écriture par des conduits d'alimentation, comporte des éléments transducteurs avec une membrane excitable électriquement comprenant une première couche à excitation piézoélectrique et une couche protectrice solidement liée à cette dernière. La couche à excitation piézoélectrique possède des régions orientables divisées respectivement en une région périphérique et une région centrale. Pour produire l'orientation nécessaire de la membrane, ses régions sont excitées de manière à raccourcir la région périphérique de préférence par contraction transversale et à agrandir la région centrale.

Claims (19)

1. Tête d'écriture à encre comportant des canaux (P) d'éjection de l'encre et des éléments transducteurs piézoélectriques (3, 4), qui sont associés aux canaux (P) d'éjection de l'encre et qui sont alimentés en encre par l'intermédiaire de conduits d'alimentation (V), les éléments transducteurs (3,4) contenant une membrane, pouvant être commandée électriquement et comportant une première couche (1) pouvant être excitée par voie piézoélectrique et une couche de soutien (2) reliée rigidement à cette couche pouvant être excitée, et l'encre sortant des canaux (P) d'éjection de l'encre étant éjectée sous l'effet de déviations de la membrane, caractérisée par le fait que la couche (1) pouvant être excitée par voie piézoélectrique possède une zone périphérique (3) et ue zone centrale (4), qui sont commandées de manière à produire une déviation de la membrane, nécessaire pour l'opération d'écriture, de telle sorte que la zone périphérique (3) est raccourcie par contraction transversale et la zone centrale (4) est allongée par dilatation.
2. Tête d'écriture à encre suivant la revendication 1, caractérisée par le fait que la couche (1), qui peut être excitée par voie piézoélectrique et qui est polarisée continument dans un sens, possède, sur l'une de ses faces, une électrode continue de masse (2) et, sur son autre face, une première électrode de commande (3) associée à la zone périphérique et une seconde électrode de commande (4) associée à la zone centrale, la zone périphérique et la zone centrale étant chargées, pour la commande, par des champs électriques différents.
3. Tête d'écriture à encre suivant la revendication 1, caractérisée par le fait que la couche pouvant être excitée par voie piézoélectrique, comporte, sur l'une de ses faces, une électrode continue de masse (2) et, sur son autre face, une électrode commune de commande, les zones périphériques et la zone centrale étant polarisées différemment.
4. Tête d'écriture à encre suivant l'une des revendications 1 à 3, caractérisée par le fait que les zones (3,4) de la membrane sont disposées concentriquement entre elles et se cintrent en prenant la forme d'un têton, lors de la commande.
5. Tête d'écriture suivant l'une des revendications 1 à 4, caractérisé par le fait que plusiers zones (3, 4) de la membrane, qui peuvent être activées individuellement, indépendamment les unes des autres, sont disposées sur une surface commune (1) d'un substrat.
6. Tête d'écriture à encre suivant la revendication 5, caractérisée par le fait que les conducteurs de commande (L) pour les différentes zones de la mebrane s'étendent su des zones non polarisées de la suface de la membrane.
7. Tête d'écriture à encre suivant l'une des revendications 1 à 6, caractérisée par le fait qu'à la place de la couche de soutien (2) est prévue une seconde couche, qui peut être excitée par voie piézoélectrique et qui est polarisée en sens opposé par rapport à la première couche qui peut être excitée par voie piézoélectrique.
8. Tête d'écriture à encre suivant l'ue des revendications 1 à 7, caractérisée par le fait qu'à l'état non activé, la membrane ferme mécaniquement les canaux d'adduction d'encre.
9. Tête d'écriture à encre suivant l'une des revendications 1 à 8, caractérisée par le fait qu'à chaque canal d'adduction d'encre sont associées trois zones de la membrane, qui sont reliées entre elles par l'intermédiaire d'un canal (B) de pompage pou l'encre et forment ue pompe statique comportant deux registres d'arrêt commandables (SE, SA) et une cavité variable (H), la première zone (SE) de la membrane étant reliée d'une part par l'intermédiaire d'un canal d'alimentation au système d'alimentation d'encre (V) et d'autre part à la cavité variable (H) et étant disposée en, tant que soupape d'admission entre le canal d'alimentation et la cavité, tandis que la seconde zone (PH) de la membrane produit la course de la pompe, avec sa cavité variable, et qu'une troisième zone (SA) de la membrane est disposée entre la cavité (PH) et la zone de sortie (A) du canal d'adduction d'encre, en tant que soupape de sortie.
10. Tête d'écriture à encre suivant la revendication 9, caractérisée par le fait que le canal de pompage (P), qui relie les zones de la membrane, comporte, au niveau des sufaces de la membrane agencées sous la forme de soupapes, des barrettes de séparation (Q), qui coopèrent avec les surfaces de la membrane de telle sorte que le canal de pompage s'ouvre après l'écartement par cintrage des surfaces de la membrane au-dessus des barmettes de séparation, et que le canal de pompage est interrompu dans la zone des barrettes de séparation (Q) au-dessus des sufaces de la membrane, lorsque les surfaces de la mem- brame sont à l'état non dévié.
11. Tête d'écriture à encre suivant l'une des revendications 1 à 10, caractérisée par le fait que plusieurs surfaces de la membrane sont superposées dans la tête d'écriture à encre.
12. Tête d'écritue à encre suivant l'une des revendications 1 à 11, caractérisée par le fait que pour réduire la subivision entre les lignes de trame (RZ), la tête d'écriture à encre (TS) est inclinée par rapport à ces lignes.
13. Procédé pour fabriquer une tête d'écriture à encre suivant l'une des revendications 1 à 12, caractérisé par le fait qu'on utilise, comme substrat (1), une couche mince formée d'une piézocéramique, sur laquelle la structure nécessaire de la tête à encre est formée par galvanoplastie.
14. Procédé suivant la revendication 13, caractérisé par le fait que la couche de piézocéramique (1) est polarisée avant la structuration galvanoplastique.
15. Procédé suivant l'une des revendications 13 ou 14, caractérisé par le fait que la piézocéramique (1) est métallisée sur ses deux faces par dépôt par évaporation ou par pulvérisation, puis que des électrodes de commande (3,4) ainsi que les conducteurs d'alimentation associés (Z) sont structurés par voie photolithographique-galvanique sur l'une des faces de la piézocéramique, que la couche de soutien (2) est déposée par voie galvanique simultanément sur l'autre face de la piézocéramique et qu'ensuite on produit sur la couche de soutien (2) et on structure une ou plusieurs couches auxiliaires minces, desquelles on peut séparer, par dissolution ultérieure, la membrane de la nervure transversale (Q) située dans la structure (P) du canal.
16. Procédé suivant l'ue des revendications 13 à 15, caractérisé par le fait qu'on dépose les parois (W) de la structure (P) du canal par voie galvanique au-dessus de la couche de soutien (2) et des couches auxiliaires minces (Z) entre des structures de résine photosensible, qu'on dépose une couche métallique mince au-dessus des structures de résine photosensible et de la couche des parois du canal, qu'on dépose sur la surface de l'ensemble, par voie galvanique, la couche de support (T) et qu'on élimine la résine photosensible d'une manière sélective par dissolution.
17. Procédé suivant l'une des revendications 13 à 15, caractérisé par le fait qu'on forme, au-dessus de la couche de soutien (2) et des couches auxiliaires minces (Z), une structure (K) possédant la forme des canaux, et ce au moyen d'une résine photosensible ou d'un métal, que lorsque la structure (K) est constituée par une résine photosensible, on dépose par-dessus une pellicule métallique mince, qu'on dépose ensuite par voie galvanique les parois (W) du canal et la couche de support (T) en commun sous la forme d'ue couche topographique, au-dessus de la couche de soutien (2) et de la structure (K), et qu'enfin on élimine de façon sélective par dissolution la structure (K).
18. Procédé suivant l'une des revendications 13 à 15, caractérisé par le fait que sur les couches auxiliaires minces, on structure les parois (W) des structures des canaux destinées à recevoir l'encre, qu'on remplit ensuite les canaux (P) ainsi formés, avec une substance de remplissage pouvant être éliminée par corrosion et on dépose une couche de revêtement (R) sur les canaux (P) ainsi remplis, et on élimine ensuite la substance de remplissage.
19. Procédé suivant l'une des revendications 16 ou 17, caractérisé par le fait que pour faciliter l'élimination, au moyen d'une technique de corrosion, des couches auxiliaires ou des matériaux formant la structure des canaux (P), on prévoit des ouvertures que l'on obture ultérieurement.
EP87903243A 1986-05-30 1987-05-19 Tete d'ecriture a l'encre avec membrane a excitation piezoelectrique Expired - Lifetime EP0307403B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863618107 DE3618107A1 (de) 1986-05-30 1986-05-30 Tintenschreibkopf mit piezoelektrisch anregbarer membran
DE3618107 1986-05-30

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Publication Number Publication Date
EP0307403A1 EP0307403A1 (fr) 1989-03-22
EP0307403B1 true EP0307403B1 (fr) 1990-08-01

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EP87903243A Expired - Lifetime EP0307403B1 (fr) 1986-05-30 1987-05-19 Tete d'ecriture a l'encre avec membrane a excitation piezoelectrique

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US (1) US4888598A (fr)
EP (1) EP0307403B1 (fr)
JP (1) JPH01500891A (fr)
DE (2) DE3618107A1 (fr)
WO (1) WO1987007217A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0355150A1 (fr) * 1988-02-05 1990-02-28 Debiopharm S.A. Pompe
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US5255016A (en) * 1989-09-05 1993-10-19 Seiko Epson Corporation Ink jet printer recording head
JP3139511B2 (ja) * 1990-11-09 2001-03-05 セイコーエプソン株式会社 インクジェット記録ヘッド
US6601949B1 (en) * 1992-08-26 2003-08-05 Seiko Epson Corporation Actuator unit for ink jet recording head
GB2286157B (en) * 1994-01-31 1998-01-14 Neopost Ltd Ink jet printing device
JPH08108533A (ja) * 1994-10-06 1996-04-30 Sharp Corp インクジェットヘッド、その使用方法およびその製造方法
US5894316A (en) * 1995-04-20 1999-04-13 Seiko Epson Corporation Ink jet head with diaphragm having varying compliance or stepped opposing wall
US6000785A (en) * 1995-04-20 1999-12-14 Seiko Epson Corporation Ink jet head, a printing apparatus using the ink jet head, and a control method therefor
JP3439570B2 (ja) * 1995-05-08 2003-08-25 日本碍子株式会社 ダイヤフラム構造体
EP0755793B1 (fr) * 1995-07-26 2001-04-04 Sony Corporation Imprimante et sa méthode de fabrication
DE19724240C2 (de) * 1997-06-09 2003-06-05 Sascha Bechtel Förderpumpe, insbesondere Mikroförderpumpe
AU755025B2 (en) * 1997-11-28 2002-11-28 Sony Corporation Apparatus and method for driving recording head for ink-jet printer
US6222304B1 (en) * 1999-07-28 2001-04-24 The Charles Stark Draper Laboratory Micro-shell transducer
US6712455B2 (en) 2001-03-30 2004-03-30 Philip Morris Incorporated Piezoelectrically driven printhead array
US7832429B2 (en) * 2004-10-13 2010-11-16 Rheonix, Inc. Microfluidic pump and valve structures and fabrication methods
DE102009002631B4 (de) 2009-04-24 2015-08-20 Michael Förg Piezoelektrischer Antrieb und Mikroventil mit einem solchen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1065880B (fr) * 1959-09-24
DE1165667B (de) * 1962-06-28 1964-03-19 Siemens Ag Piezoelektrischer Biegeschwinger
DE1287135B (de) * 1967-06-16 1969-01-16 Telefunken Patent Elektroakustischer Wandler mit einer Schicht aus Halbleitermaterial bedeckten Membran
JPS58112747A (ja) * 1981-12-26 1983-07-05 Fujitsu Ltd インクジエツト記録装置
EP0095911B1 (fr) * 1982-05-28 1989-01-18 Xerox Corporation Disposition d'éjection de gouttelettes par onde de pression et ensemble
DE3320443C2 (de) * 1983-06-06 1994-08-18 Siemens Ag Flüssigkeitspumpe
DE3320441A1 (de) * 1983-06-06 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern
DE3342844A1 (de) * 1983-11-26 1985-06-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Mikroplanarer tintenstrahldruckkopf
JPS61106259A (ja) * 1984-10-31 1986-05-24 Hitachi Ltd インク滴噴出装置

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EP0307403A1 (fr) 1989-03-22
US4888598A (en) 1989-12-19
DE3764094D1 (de) 1990-09-06
JPH01500891A (ja) 1989-03-30
DE3618107A1 (de) 1987-12-03
WO1987007217A1 (fr) 1987-12-03

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