EP0364514B1 - Agencements pour lapidaires a deux disques - Google Patents

Agencements pour lapidaires a deux disques Download PDF

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Publication number
EP0364514B1
EP0364514B1 EP89902018A EP89902018A EP0364514B1 EP 0364514 B1 EP0364514 B1 EP 0364514B1 EP 89902018 A EP89902018 A EP 89902018A EP 89902018 A EP89902018 A EP 89902018A EP 0364514 B1 EP0364514 B1 EP 0364514B1
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EP
European Patent Office
Prior art keywords
spindle
disk
tool
column
tool disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89902018A
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German (de)
English (en)
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EP0364514A1 (fr
Inventor
Arthur Werner STÄHLI
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Individual
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Individual
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Publication of EP0364514A1 publication Critical patent/EP0364514A1/fr
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Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the present invention relates to a device on a two-disc lapping machine for bringing an upper tool disc into its working position according to the preamble of patent claim 1.
  • Two-disc lapping machines have been known for around 40 to 50 years. Workpieces to be machined are drawn through and machined by so-called rotor disks by means of an inner and outer pin ring between the two tool disks. With double-disc lapping machines, it is possible to achieve a very high degree of parallelism between the machined surfaces of the workpieces. With the advent of new technologies, such as the production of silicon wafers for integrated circuits, the production of quartz or the finest ceramic plates, ever increasing demands were placed on lapping machines. Especially when machining extremely thin-walled materials, the working pressure control of the upper tool disc of double disc lapping machines should be given the greatest attention.
  • the upper tool disc In today's known types of double-disc lapping machines, the upper tool disc is in most cases suspended from a motor-driven and axially displaceable spindle.
  • the spindle is connected to a radially swiveling column stand of the lapping machine via a bearing component.
  • Via a hydraulic or pneumatic cylinder drive which engages the axially displaceable spindle, the upper tool disk attached to the lower end of the spindle can be fed to, placed on and pressed onto the workpiece.
  • the cylinder drive must first compensate for the weight of the upper tool disc, which weighs up to several 1,000 Newtons, bring the tool disc to the workpiece, slowly set it down as already described, and begin the load by reducing the weight compensation.
  • the machine equipped with the device according to the invention is structurally much simpler in construction.
  • the invention solves this problem according to the features listed in the characterizing part of claim 1.
  • the lapping machine comprises a column stand 3 which is mounted and guided in a stand guide 2.
  • the stand guide 2 is rigidly connected to the frame of the machine in a manner not shown.
  • a bar 11 is arranged essentially at right angles thereto and is pivotably mounted approximately in the middle.
  • the beam 11 consists of two essentially parallel to mutually extending longitudinal beams 11 a, which are connected at their rear end 28 by cross members 11 b and at their front end 13 by a headstock 14.
  • an axis 12 extends at right angles to the longitudinal beams 11a through a bore in the latter and in the column stand.
  • the beam 11 is pivotally supported by the axis 12.
  • the headstock 14 arranged at the front end between the longitudinal beams 11a supports the tool spindle 15.
  • the upper tool disk 21 is articulated via a joint head 20.
  • an electric motor as the first drive means 17 is preferably arranged on the front part of the beam behind the headstock 14 and connected to the latter.
  • the electric motor 17 is equipped with a reduction gear 18 and, via a transmission means 19, for example a belt drive, serves to drive the tool spindle 15.
  • the tool spindle 15 which preferably has a longitudinal bore, there is a sensor 16 for measuring the workpiece thickness, through the mentioned bore , assembled. It is an essential feature of the present invention that the tool spindle 15 is mounted in the headstock 14 without the possibility of axial displacement.
  • the column stand 3 has in its upper region a counter-holder 27 pointing rearward and running essentially parallel to the beam 11.
  • the counter-holder 27 comprises two carriers 27a which run parallel to one another and are essentially tangentially connected to the column stand 3 and have a spacing from one another.
  • At the rear end 28 of the beam 11 there is a first adjustment means between the longitudinal beams 11a via a first bearing axis 31 29 pivotally connected to the beam 11.
  • the first adjusting means 29 has the task of compensating for the weight of the upper tool disk 21 by up to several 1,000 Newtons and to keep the bar 11 in a substantially horizontal position.
  • a travel limiting device 37, 38, 41 arranged at the rear end 28 of the beam 11 has the task of limiting the pivoting movement of the beam 11.
  • the construction is designed so that the mentioned pivoting movement of the beam 11 at the front end 13 is at most 20 mm.
  • the path limiting device consists of a groove 41 which is incorporated into a cross member 11b of the beam 11 at the rear beam end 28.
  • the pivoting movement of the beam 11 can also be adjusted with an adjustable stop 38 arranged in the counter holder 27.
  • the column stand 3 has at its lower end a concentrically arranged one with an internal thread Hole 5 on.
  • a lifting spindle 4 which can be driven by means of, for example, an electric motor 6 as a second drive means via a gear 7, engages in the thread of the bore 5 for lifting and lowering the column stand 3.
  • the motor 6 with the gear 7 and the lifting spindle 4 are connected to the frame of the lapping machine.
  • Another essential feature of the device according to the invention is that there is a functional separation between bringing the tool disk 21 into its working position and controlling the working pressure of the tool disk 21 on the surface of the workpieces 23.
  • the feeding takes place by the lowering movement of the column stand 3 by means of the lifting spindle 4 and the control of the working pressure takes place by applying a deflecting force to the beam 11 via the second cylinder drive 30.
  • the first and the second measuring means 8, 39 and the sensor 16 for measuring the workpiece thickness are connected to a control device, not shown, of the lapping machine.
  • the control device processes the signals received from the measuring means 8, 39 and from the sensor 16 to control the lifting spindle 4 and the cylinder drives 29, 30.
  • the lower end of the column stand 3 is flanged to a swivel cylinder 10.
  • the swivel cylinder 10 serves to swivel the column stand 3 with the upper tool disk 21.
  • the swivel position is shown in FIG. 2.
  • the latter can be locked by means of a clamping cylinder 9 arranged in the stand guide 2.
  • the upper working disk 21 always has a position parallel to the lower working disk 22 despite the pivoting movement of the beam 11, the upper tool disk is connected to the lower end of the tool spindle via a joint head 20.
  • the lateral offset of the upper tool disk 21 relative to the lower tool disk 22 that occurs as a result is negligible.
  • a lapping process with the device according to the invention on a two-disc lapping machine is described below.
  • the column stand 3 is in a raised position and the upper tool disk 21 is in the pivoted-out position.
  • the workpieces 23 to be machined are placed in the receiving openings of the rotor disk 24 on the surface of the lower tool disk 22.
  • the upper tool disk 21, which is in the swiveled-out position, is swiveled in with the swivel cylinder 10.
  • the pivoting position is limited, for example, by a stop (not shown) in such a way that the two tool disks 21, 22 lie one above the other centrally.
  • the thickness of the unworked workpieces plus a tolerance of preferably 0.2 mm is entered into the control device (not shown) as the feed dimension for the upper tool disk.
  • the upper tool disk 21 is rapidly lowered in the direction of the surface of the workpieces 23 via the lifting spindle 4.
  • the control device monitors the signal from the first measuring means 8 and ensures that the lowering movement of the column stand 3 is stopped in time, just before the upper tool disk 21 touches the surface of the workpieces 23.
  • the first cylinder drive 29 keeps the bar 11 permanently in a horizontal position. With the second cylinder drive 30, a small, upward force is applied. As a result, the upper tool disk 21 lowers slowly and without any appreciable working pressure onto the surface of the workpieces 23.
  • the lapping process can begin.
  • a time program which is stored, for example, in the control device of the lapping machine, which is not shown, a lapping process begins, the control device continuously monitoring the workpiece thickness on the basis of the signal supplied by the sensor 16 and the working pressure of the tool disk 21 via the second cylinder drive 30 on the basis of the set one controls the program dependent on the workpiece to be machined.
  • the vertical position of the column stand 3 is secured with the clamping cylinder 9.
  • the working pressure of the upper tool disc is reduced and the beam 11 is brought into the horizontal position by the first cylinder drive 29.
  • the rotational movements of the tool disks 21, 22, the pin rings 25 and / or 26 are switched off.
  • the column stand 3 is raised by actuating the lifting spindle 4.
  • the swivel cylinder 10 With the swivel cylinder 10, the upper tool disk 21 is brought back into the swiveled-out position.
  • the lapping machine can be unloaded and equipped with new workpieces 23 to be machined.
  • the two cylinder drives 29, 30 enable the upper tool disk 21 to be precisely controlled in terms of working pressure, since the otherwise customary shifting cylinder with the known disadvantageous holding torque (slip-stik) and with the pressure reversal occurring during the working process are eliminated.
  • the column stand 3 is loaded relatively little by the balance beam principle. The uplifting of the column stand known from other designs of double-disc lapping machines is thereby avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Une poutre (11) est montée par son milieu sur l'extrémité supérieure d'un montant (3) radialement pivotable, perpendiculairement à celui-ci, de manière à osciller. Une broche d'outil (15) est montée de manière à osciller. Une broche d'outil (15) est montée de manière fixe dans le sens axial à l'extrémité antérieure de la poutree (11) dans une poupée fixe (14) reliée à la poutre et peut être entraînée par un premier dispositif d'entraînement (17). Le disque supérieur de lapidage (21) est fixé par une tête articulée (20) à l'extrémité inférieure de la broche d'outil (15). Afin d'amener le disque de lapidage (21) à sa position de travail le montant (3) monté et guidé dans le guide (2) peut être levé et abaissé par une tige de montée et de descente (4) susceptible d'être levé et abaissé par une tige de montée et de descente (4) suceptible d'être entraînée par une deuxième dispositif d'entraînement (6). Un premier organe d'ajustement (29) qui accroche l'extrémité postérieure (28) de la poutre (11) sert à maintenir celle-ci dans une position essentiellement horizontale. Un deuxième organe d'ajustement (30) qui accroche lui aussi l'extrémité postérieure (28) de la poutre sert à ajuster la pression de travail du disque de lapidage (21). En supprimant la mobilité axiale de la broche d'outil (15), cet agencement permet de résoudre avec une construction très simple le problème de la suspension, du montage et de l'entraînement du disque de travail (21). La pression de travail du disque de travail peut être ajustée de manière extrêmement précise. Les lapidaires ainsi agencés conviennent en particulier pour usiner des tranches, des quartz et des plaquettes en céramique à parois minces.

Claims (8)

1. Dispositif pour lapidaire à deux disques pour amener un disque à outil (21) supérieur dans sa position de travail, avec une colonne (3) fixe ou orientable radialement, sur laquelle est disposée une poutre (11) pivotante essentiellement rectangulaire montée sur paliers approximativement centriques, un premier moyen d'entraînement (17) actionnant le disque à outil (21) supérieur par l'entremise d'un organe à arbre (15), caractérisé en ce que la colonne (3) levable ou baissable grâce à un arbre d'élévation (4) qui est actionné par un deuxième moyen d'entraînement (6) pour réaliser un mouvement de conduite du disque à outil (21) supérieur, l'organe à arbre (15) immobile axialement est disposé contre la poupée fixe (14) qui est solidement liée à l'extrémité antérieure de la barre (13), un premier moyen d'ajustage (29) est disposé à l'extrémité arrière de la barre (28) afin de maintenir la barre (11) dans une position essentiellement horizontale, et un deuxième moyen d'ajustage (30), entre le contre-appui (27) lié de façon fixe à la colonne (3) et l'extrémité arrière de la barre (28), est présent pour commander la pression de fonctionnement du disque à outil (21) supérieur.
2. Dispositif selon la revendication 1, caractérisé en ce que le premier ainsi que le deuxième moyen d'ajustage (29, 30) sont actionnés de façon pneumatique ou hydraulique.
3. Dispositif selon la revendication 1 ou 2, caractérisé en ce que le mouvement d'oscillation de la barre (11) est limité grâce à un dispositif de limitation de course (37, 38, 41).
4. Dispositif selon la revendication 3, caractérisé en ce que le mouvement d'oscillation de la barre (11) se limite à 20 mm à son extrémité antérieure (13).
5. Dispositif selon l'une des revendications 1 à 4, caractérisé en ce que le premier moyen d'entraînement (17) est lié à l'organe à arbre (15) grâce à un mécanisme de réduction (18) ainsi qu'un moyen de transmission (19) disposés de préférence sur la partie antérieure de la poutre.
6. Dispositif selon l'une des revendications 1 à 5, caractérisé en ce que le disque à outil (21) est attaché de façon flexible à l'extrémité inférieure de l'organe à arbre (15).
7. Dispositif selon l'une des revendications 1 à 6, caractérisé en ce que des premiers moyens de mesure (8) sont présents afin de mesurer la position verticale de la colonne (3).
8. Dispositif selon l'une des revendications 1 à 7, caractérisé en ce que des seconds moyens de mesure (39) sont présents afin de mesurer le mouvement oscillant de la barre (11).
EP89902018A 1988-04-07 1989-02-17 Agencements pour lapidaires a deux disques Expired - Lifetime EP0364514B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1277/88 1988-04-07
CH1277/88A CH684321A5 (de) 1988-04-07 1988-04-07 Einrichtung an einer Zweischeibenläppmaschine.

Publications (2)

Publication Number Publication Date
EP0364514A1 EP0364514A1 (fr) 1990-04-25
EP0364514B1 true EP0364514B1 (fr) 1991-12-18

Family

ID=4206657

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89902018A Expired - Lifetime EP0364514B1 (fr) 1988-04-07 1989-02-17 Agencements pour lapidaires a deux disques

Country Status (4)

Country Link
US (1) US5317837A (fr)
EP (1) EP0364514B1 (fr)
CH (1) CH684321A5 (fr)
WO (1) WO1989009679A1 (fr)

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CN105904324A (zh) * 2015-05-28 2016-08-31 海宁奇晟轴承有限公司 一种自动双盘研磨机

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GB9402140D0 (en) * 1994-02-04 1994-03-30 Actis Uk Limited Grainger Alla Lapping machine
JPH08257902A (ja) * 1995-03-28 1996-10-08 Ebara Corp ポリッシング装置
US5632669A (en) * 1995-05-26 1997-05-27 Censtor Corporation Interactive method for lapping transducers
US5653624A (en) * 1995-09-13 1997-08-05 Ebara Corporation Polishing apparatus with swinging structures
USRE38340E1 (en) * 1996-11-04 2003-12-02 Seagate Technology Llc Multi-point bending of bars during fabrication of magnetic recording heads
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
US6475064B2 (en) 1996-12-13 2002-11-05 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US6287170B1 (en) 1996-12-13 2001-09-11 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
TW377467B (en) * 1997-04-22 1999-12-21 Sony Corp Polishing system, polishing method, polishing pad, and method of forming polishing pad
JPH11207608A (ja) * 1998-01-22 1999-08-03 Speedfam Co Ltd 平面研磨装置における上定盤昇降機構
US6217425B1 (en) * 1998-06-12 2001-04-17 Tdk Corporation Apparatus and method for lapping magnetic heads
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
ITTV20020049A1 (it) * 2002-04-22 2003-10-22 Luca Toncelli Struttura di sostegno del mandrino in una macchina utensile e procedimento per la sua realizzazione
CN102380800A (zh) * 2010-09-06 2012-03-21 无锡瑞茂光电科技有限公司 连体式主轴编码器
CN113211212A (zh) * 2021-05-08 2021-08-06 万冬冬 一种用于基层墙面校平便于粉刷石膏砂浆涂刷的辅助装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904324A (zh) * 2015-05-28 2016-08-31 海宁奇晟轴承有限公司 一种自动双盘研磨机
CN105904324B (zh) * 2015-05-28 2017-11-03 海宁奇晟轴承有限公司 一种自动双盘研磨机

Also Published As

Publication number Publication date
WO1989009679A1 (fr) 1989-10-19
EP0364514A1 (fr) 1990-04-25
US5317837A (en) 1994-06-07
CH684321A5 (de) 1994-08-31

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