EP0411346A2 - Machine de superfinition pour rodage, superfinition ou polissage - Google Patents

Machine de superfinition pour rodage, superfinition ou polissage Download PDF

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Publication number
EP0411346A2
EP0411346A2 EP90113033A EP90113033A EP0411346A2 EP 0411346 A2 EP0411346 A2 EP 0411346A2 EP 90113033 A EP90113033 A EP 90113033A EP 90113033 A EP90113033 A EP 90113033A EP 0411346 A2 EP0411346 A2 EP 0411346A2
Authority
EP
European Patent Office
Prior art keywords
working
disk
lapping
finishing machine
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90113033A
Other languages
German (de)
English (en)
Other versions
EP0411346A3 (en
Inventor
Dieter Dr.-Ing. Simpfendörfer
Alexander Dipl.-Ing. Hofsess
Klaus Biebesheimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diskus Werke Frankfurt am Main AG
Original Assignee
Diskus Werke Frankfurt am Main AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19893925274 external-priority patent/DE3925274A1/de
Priority claimed from DE8915458U external-priority patent/DE8915458U1/de
Application filed by Diskus Werke Frankfurt am Main AG filed Critical Diskus Werke Frankfurt am Main AG
Publication of EP0411346A2 publication Critical patent/EP0411346A2/fr
Publication of EP0411346A3 publication Critical patent/EP0411346A3/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Definitions

  • the invention relates to a finishing machine for lapping, fine grinding or polishing.
  • Finishing machines for this purpose are known with two separately drivable, ring-shaped, vertical-axis working disks, with a drivable, inner and preferably a stationary, outer pin ring being provided in the area of the lower disk, between which holders for workpiece machining are arranged, which are used for their planetary movement engage the disk axis in both pin rings by means of teeth, preferably in a cantilever or portal construction with a horizontally movable upper working disk, a control circuit being provided to influence the axial force acting on the upper working disk.
  • the task of the finishing machine is the constant control of the preselected engagement pressure between the active partners during machining and dressing, as well as the automatic height adjustment of the working disks and setting of optimal speed ratios during machining and dressing with the help of a program stored in the controller memory to achieve reproducible work results in the process-inherent accuracy limit range with a high degree of automation of the machine and a lower required operator qualification.
  • the finishing machine for lapping, fine grinding or polishing according to the preamble of claim 1 according to the invention is characterized in that the axial force can be derived via force transducers on the underframe of the machine with medium or direct contact with the lower working disc, the upper one , preferably pendulum-mounted working disc is pneumatically or hydraulically actuated and the axially supported bearing unit of the lower working disc, which is supported by force transducers on the machine base frame, is secured against twisting by preferably thin strips arranged in a plane parallel to the working plane and braced between the frame and the bearing unit.
  • a signal which is dependent on the axial actual force is thus generated by means of the aforementioned high-resolution measuring system, for example based on a strain gauge, located in the base of the machine.
  • This signal is compared with a signal that corresponds to the axial nominal force.
  • the difference signal is the control deviation. It changes the pressure within the load unit in such a way that the pressure of engagement between the active partners remains constant within narrowly specified tolerance limits; an essential criterion for achieving reproducible process relationships.
  • the height of the upper quill-guided working disc adjustable in height using a pneumatic or hydraulic lifting and loading device secured by means of guide rods, but the height of the lower working disc can also be changed using a quill adjustment or several axially parallel and mutually synchronized screw drives with a cross-beam, in order to maintain constant wear to enable the height of the active surface.
  • the finishing machine is characterized in that the stepless adjustment and optional combination of the speeds of the two working disks and the inner and optionally outer pin ring in the area of the lower working disk and thus the planetary movement of the workpiece holder for workpiece machining or the dressing rings is program-controlled .
  • this makes it difficult to set suitable speeds when machining and dressing with a program stored in the controller's memory), which involves the user-friendly entry of recommended parameters - the type of relative movement of the active partners, - the relative speed of the active partners and - the position of the parts within the holder or the size of the dressing rings ensures optimal movement conditions.
  • Entering data of this type offers the advantage that the reproducibility and quality of the work and dressing results are independent of the qualifications and experience of the machine operator.
  • the machine structure 1 can be seen with the axially movable quill 2 and the hollow shaft 3 which supports it and serves for torque transmission.
  • the sleeve 2 is received in a form-fitting manner in the bearing area 4 of the hollow shaft 3 which is supported on the machine structure 1 via the roller bearings 6 and 7.
  • the sleeve 2, on which the upper working disk 8 is suspended in a pendulum manner via its spherical bearing 5, is set in rotation by the rim drive 9 via the hollow shaft 3.
  • the lifting and loading device consisting of two hydraulic cylinders 10 serves to apply the axial pressure via the crossbar 11 with the support bearing 12, while the torque resulting from the bearing friction is absorbed via the guide rods 13.
  • the lapping mixture when fed via the stripping device 14 with strippers 15, enters the ring channel 16 and through bores 17 in the upper working disk 8 into the active zone.
  • the drive motor 18 of the scraper device 14 is arranged on the machine structure 1 in such a way that rotation about the axis of the upper working disk 8 is suppressed, but its pendulum movement is also carried out.
  • the machine structure 1 as not shown in detail here, can be made in portal construction, e.g. executed according to DE-PS 24 42 081 and thus can be moved horizontally with respect to the machine base 19 with the bearing unit and the upper working disk 8.
  • the machine base 19 can be seen with the hollow shaft 20 and the height-adjustable guide housing 21.
  • the hollow shaft 20 which serves to drive the lower working disk 22 is received by the roller bearings 23 and 24 and the guide housing 21 is mounted in a height-adjustable manner with guide rods 27 by means of a plurality of screw thread drives 25, which are arranged equidistantly from the central axis and are synchronized, with a crossbar 26.
  • the hollow shaft 20 is via the belt drive 28 rotatable.
  • a height adjustment of the lower working disc 22 in this way has the advantage that a lowering of the working height as a result of the disc wear can be compensated for.
  • the possibility of keeping the height of the active surface of the lower working disk 22 largely constant is a necessary prerequisite for to see the automatability of the machine loading.
  • the adjustability of the height of the lower work wheel is also suitable for integrating wear measurement and the subsequent removal of unevenness in the work wheel, which is associated with a deterioration in the achievable part shape accuracy, with the additional use of a radially arranged measuring and twisting device in an automatic sequence.
  • the bearing unit 29 of the lower working disc 22 is supported on the base frame 19 of the machine by force transducers 30, the bearing unit 29 being secured against rotation in a plane parallel to the working plane by means of thin bands 31 braced between the frame 19 and the bearing unit 29.
  • the force transducers 30 on the base frame 19 are used for constant control of the axial force to be applied by the lifting and loading device 10.
  • FIG. 2 also shows the inner pin ring 33 driven from 32 and the outer pin ring 34 which is stationary here and has a workpiece holder 35 for workpieces 36, the holders 35 engaging in the inner and outer pin rings 33, 34.
  • the regulation of the axial force F is then shown schematically in FIG.
  • the upper and lower working disks 8 and 22 can be seen in the machine structure 1 and the machine base frame 19 with workpieces 36 between them, the force transducer 30 in the base frame 19 and the lifting and loading device 10 as hydraulic cylinders in the structure 1 with the signal converter 37
  • a hydraulic or pneumatic loading unit 10 generates an axially acting force due to the differential pressure ⁇ p H prevailing in the cylinder.
  • This force F which acts as the actual force, acts on the upper working disk 8 in such a way that, depending on the contact surface between the active partners, a characteristic engagement pressure Pe results.
  • the actual force introduced into the bearing system of the lower working disk 22 in this way is derived via pressure force transducers 30 arranged preferably equidistant from the axis of the working disks in the underframe 19 of the machine.
  • a summatory voltage signal u act which is proportional to the actual force, is generated and is compared with a voltage signal u soll corresponding to the nominal axial force.
  • the difference signal ⁇ u is the control deviation. It changes the differential pressure ⁇ p H within the pressure cylinder - load unit 10 - in such a way that the engagement pressure Pe remains constant within narrowly specified limits.
  • the arrangement of the pressure force transducers 30 in the base frame 19 of the machine has the advantage over known solutions that the flow of force guided through the effective zone is recorded in an unadulterated manner.
  • the measurement result is therefore not impaired by friction losses and stick-slip effects at the bearing points of the upper working disk or within the loading device.
  • the control concept therefore provides for the user-guided input of recommended characteristic values, which are converted into speed control signals of the motors M of the two working disks 8 and 22 and of the inner pin ring 33 with the aid of a program stored in the control's memory without further operator intervention.
  • the arbitrary selection of the characteristic values allows, in particular, the stepless setting and combination of the speeds in such a way that there are optimal movement conditions between the active partners during machining and dressing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP19900113033 1989-07-31 1990-07-07 Precision grinding machine for lapping, precision grinding or polishing Withdrawn EP0411346A3 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19893925274 DE3925274A1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren
DE3925274 1989-07-31
DE8915458U 1989-07-31
DE8915458U DE8915458U1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum Läppen, Feinschleifen oder Polieren

Publications (2)

Publication Number Publication Date
EP0411346A2 true EP0411346A2 (fr) 1991-02-06
EP0411346A3 EP0411346A3 (en) 1991-04-10

Family

ID=25883567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900113033 Withdrawn EP0411346A3 (en) 1989-07-31 1990-07-07 Precision grinding machine for lapping, precision grinding or polishing

Country Status (2)

Country Link
US (1) US5197230A (fr)
EP (1) EP0411346A3 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114888651A (zh) * 2022-04-25 2022-08-12 长春理工大学 一种飞轮盘半制品磨抛修复装置和修复方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329732A (en) 1992-06-15 1994-07-19 Speedfam Corporation Wafer polishing method and apparatus
US5733175A (en) 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5556322A (en) * 1995-09-05 1996-09-17 Sommer & Maca Industries, Inc. Pneumatic mechanism for the application of uniform pressure to a mechanically adjustable spindle
US5697832A (en) * 1995-10-18 1997-12-16 Cerion Technologies, Inc. Variable speed bi-directional planetary grinding or polishing apparatus
US5738568A (en) * 1996-10-04 1998-04-14 International Business Machines Corporation Flexible tilted wafer carrier
US5816892A (en) * 1997-02-06 1998-10-06 Cobra Machine Tool Co., Inc. Positioning control for combined milling machine and internally positioned grinding wheel
US5810648A (en) * 1997-03-05 1998-09-22 Hmt Technology Corporation Device for texturing a disc substrate
US5928067A (en) * 1997-10-14 1999-07-27 Beloit Technologies, Inc. Headbox apron finishing and lapping device
US6254463B1 (en) 1998-10-09 2001-07-03 International Business Machines Corporation Chemical planar head dampening system
JP2000127033A (ja) * 1998-10-27 2000-05-09 Speedfam-Ipec Co Ltd 研磨装置
US7364495B2 (en) * 2002-03-28 2008-04-29 Etsu Handotai Co., Ltd. Wafer double-side polishing apparatus and double-side polishing method
US6875076B2 (en) 2002-06-17 2005-04-05 Accretech Usa, Inc. Polishing machine and method
IT1396287B1 (it) * 2009-09-28 2012-11-16 Biesse Spa Distributore in continuo
US20120003900A1 (en) * 2010-07-01 2012-01-05 Artisan Industries Inc. Apparatus and Method for Refinishing a Surface In-Situ

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Publication number Priority date Publication date Assignee Title
DE218300C (fr) *
CH244291A (de) * 1943-11-27 1946-09-15 Ag Ryter Maschine zum Polieren der Stirnflächen von Werksteinen.
US2973605A (en) * 1959-11-09 1961-03-07 Carman Lab Inc Lapping machine
DE1577322A1 (de) * 1966-11-26 1970-01-08 Deutsche Edelstahlwerke Ag Vorrichtung an Ein- oder Zweischeiben-Horizontallaeppmaschinen
DE2440978C3 (de) * 1974-08-27 1979-05-17 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Dosiervorrichtung für Läppmittel
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
JPS55144958A (en) * 1979-04-18 1980-11-12 Tsutomu Kimura Lapping machine
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
FR2564360B1 (fr) * 1984-05-21 1986-10-17 Crismatec Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante
JPS63120077A (ja) * 1986-11-08 1988-05-24 Otani Reiji ロボツト装填・装出用ラツピング及びポリシングマシン駆動方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114888651A (zh) * 2022-04-25 2022-08-12 长春理工大学 一种飞轮盘半制品磨抛修复装置和修复方法

Also Published As

Publication number Publication date
US5197230A (en) 1993-03-30
EP0411346A3 (en) 1991-04-10

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