EP0401996A3 - Herstellungsverfahren von thermischen Tintenstrahldruckköpfen sowie auf diese Weise erzeugte Köpfe - Google Patents

Herstellungsverfahren von thermischen Tintenstrahldruckköpfen sowie auf diese Weise erzeugte Köpfe Download PDF

Info

Publication number: EP0401996A3
Authority: EP; European Patent Office
Prior art keywords: heads; jet printing; ink jet; layer; thermal ink
Prior art date: 1989-06-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP19900305432

Other languages

English (en)

French (fr)

Other versions

EP0401996A2 (de

Inventor

Renato Conta

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

TIM SpA

Original Assignee

Ing C Olivetti and C SpA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-06-08

Filing date

1990-05-18

Publication date

1991-12-04

1990-05-18 Application filed by Ing C Olivetti and C SpA filed Critical Ing C Olivetti and C SpA

1990-12-12 Publication of EP0401996A2 publication Critical patent/EP0401996A2/de

1991-12-04 Publication of EP0401996A3 publication Critical patent/EP0401996A3/de

Status Withdrawn legal-status Critical Current

Links

238000000034 method Methods 0.000 title abstract 4
238000007641 inkjet printing Methods 0.000 title abstract 2
238000004519 manufacturing process Methods 0.000 title 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
239000002184 metal Substances 0.000 abstract 2
229910052751 metal Inorganic materials 0.000 abstract 2
239000011347 resin Substances 0.000 abstract 2
229920005989 resin Polymers 0.000 abstract 2
229910052710 silicon Inorganic materials 0.000 abstract 2
239000010703 silicon Substances 0.000 abstract 2
238000005530 etching Methods 0.000 abstract 1
238000010438 heat treatment Methods 0.000 abstract 1
239000011810 insulating material Substances 0.000 abstract 1
150000002739 metals Chemical class 0.000 abstract 1
238000005488 sandblasting Methods 0.000 abstract 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Particle Formation And Scattering Control In Inkjet Printers (AREA)

EP19900305432 1989-06-08 1990-05-18 Herstellungsverfahren von thermischen Tintenstrahldruckköpfen sowie auf diese Weise erzeugte Köpfe Withdrawn EP0401996A3 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
IT6745889		1989-06-08
IT8967458A IT1234800B (it)	1989-06-08	1989-06-08	Procedimento di fabbricazione di testine termiche di stampa a getto d'inchiostro e testine cosi' ottenute

Publications (2)

Publication Number	Publication Date
EP0401996A2 EP0401996A2 (de)	1990-12-12
EP0401996A3 true EP0401996A3 (de)	1991-12-04

Family

ID=11302549

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP19900305432 Withdrawn EP0401996A3 (de)	1989-06-08	1990-05-18	Herstellungsverfahren von thermischen Tintenstrahldruckköpfen sowie auf diese Weise erzeugte Köpfe

Country Status (2)

Country	Link
EP (1)	EP0401996A3 (de)
IT (1)	IT1234800B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5308442A (en) *	1993-01-25	1994-05-03	Hewlett-Packard Company	Anisotropically etched ink fill slots in silicon
US5387314A (en) *	1993-01-25	1995-02-07	Hewlett-Packard Company	Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
US5658471A (en) *	1995-09-22	1997-08-19	Lexmark International, Inc.	Fabrication of thermal ink-jet feed slots in a silicon substrate
US6126277A (en) *	1998-04-29	2000-10-03	Hewlett-Packard Company	Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens
TW368479B (en) *	1998-05-29	1999-09-01	Ind Tech Res Inst	Manufacturing method for ink passageway
ITTO980562A1 (it)	1998-06-29	1999-12-29	Olivetti Lexikon Spa	Testina di stampa a getto di inchiostro
US6238269B1 (en) *	2000-01-26	2001-05-29	Hewlett-Packard Company	Ink feed slot formation in ink-jet printheads
US6675476B2 (en)	2000-12-05	2004-01-13	Hewlett-Packard Development Company, L.P.	Slotted substrates and techniques for forming same
US6648732B2 (en) *	2001-01-30	2003-11-18	Hewlett-Packard Development Company, L.P.	Thin film coating of a slotted substrate and techniques for forming slotted substrates
US6527378B2 (en)	2001-04-20	2003-03-04	Hewlett-Packard Company	Thermal ink jet defect tolerant resistor design
US6979077B2 (en) *	2002-02-20	2005-12-27	Brother Kogyo Kabushiki Kaisha	Ink-jet head and ink-jet printer having ink-jet head
ITTO20020876A1 (it)	2002-10-10	2004-04-11	Olivetti I Jet Spa	Dispositivo di stampa a getto di inchiostro in parallelo
US7429335B2 (en)	2004-04-29	2008-09-30	Shen Buswell	Substrate passage formation
US7267431B2 (en)	2004-06-30	2007-09-11	Lexmark International, Inc.	Multi-fluid ejection device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0197723A2 (de) *	1985-04-03	1986-10-15	Xerox Corporation	Thermischer Tintenstrahldruckkopf und Verfahren zur Herstellung
EP0224937A2 (de) *	1985-12-06	1987-06-10	Hewlett-Packard Company	Aufbau eines Wärmetintendüsen-Druckkopfes
US4789425A (en) *	1987-08-06	1988-12-06	Xerox Corporation	Thermal ink jet printhead fabricating process
US4835553A (en) *	1988-08-25	1989-05-30	Xerox Corporation	Thermal ink jet printhead with increased drop generation rate

1989
- 1989-06-08 IT IT8967458A patent/IT1234800B/it active
1990
- 1990-05-18 EP EP19900305432 patent/EP0401996A3/de not_active Withdrawn

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0197723A2 (de) *	1985-04-03	1986-10-15	Xerox Corporation	Thermischer Tintenstrahldruckkopf und Verfahren zur Herstellung
EP0224937A2 (de) *	1985-12-06	1987-06-10	Hewlett-Packard Company	Aufbau eines Wärmetintendüsen-Druckkopfes
US4789425A (en) *	1987-08-06	1988-12-06	Xerox Corporation	Thermal ink jet printhead fabricating process
US4835553A (en) *	1988-08-25	1989-05-30	Xerox Corporation	Thermal ink jet printhead with increased drop generation rate

Also Published As

Publication number	Publication date
EP0401996A2 (de)	1990-12-12
IT1234800B (it)	1992-05-27
IT8967458A0 (it)	1989-06-08

Legal Events

Date	Code	Title	Description
1990-10-27	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1990-12-12	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): DE FR GB
1991-10-11	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1991-12-04	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): DE FR GB
1991-12-04	RHK1	Main classification (correction)	Ipc: B41J 2/16
1992-07-29	17P	Request for examination filed	Effective date: 19920526
1994-01-19	17Q	First examination report despatched	Effective date: 19931207
1994-11-03	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
1994-12-21	18D	Application deemed to be withdrawn	Effective date: 19940618

Publication	Publication Date	Title
EP0244214B1 (de)	1991-07-10	Thermischer Tintenstrahldruckkopf
EP0401996A3 (de)	1991-12-04	Herstellungsverfahren von thermischen Tintenstrahldruckköpfen sowie auf diese Weise erzeugte Köpfe
US5305018A (en)	1994-04-19	Excimer laser-ablated components for inkjet printhead
JP2957003B2 (ja)	1999-10-04	印字ヘッドチップの精密な接合縁を作る方法
CA2084390C (en)	2003-09-16	Laser ablated nozzle member for inkjet printhead
US5959643A (en)	1999-09-28	Modular drop-on-demand printing apparatus method of manufacture thereof, and method of drop-on-demand printing
US5192959A (en)	1993-03-09	Alignment of pagewidth bars
US5408738A (en)	1995-04-25	Method of making a nozzle member including ink flow channels
US5678290A (en)	1997-10-21	Method of manufacturing a page wide ink jet printhead
JPH04229279A (ja)	1992-08-18	インクジェット印字ヘッドのチャンネル板を製造する方法
EP0309146A3 (en)	1989-05-03	Manufacture of nozzles for ink jet printers
JPH05193142A (ja)	1993-08-03	印字ヘッド用ノズル板の製作方法
JP4749546B2 (ja)	2011-08-17	インクジェット印刷ヘッド
CA2048277A1 (en)	1992-03-06	Control of energy to thermal inkjet heating elements
KR20020009828A (ko)	2002-02-02	잉크 젯 프린트 헤드의 비아홀 형성방법
JPS627556A (ja)	1987-01-14	インクジエツトプリンタ
GB2157232A (en)	1985-10-23	Ink jet recording head
JPS6018357A (ja)	1985-01-30	インクジエツト印刷ヘツド
JPS5839069B2 (ja)	1983-08-27	インクジェットヘッドの製造方法
US5410340A (en)	1995-04-25	Off center heaters for thermal ink jet printheads
JP3335736B2 (ja)	2002-10-21	インク噴射記録ヘッド
US6668453B1 (en)	2003-12-30	Method for manufacturing ink jet recording head
US6386687B1 (en)	2002-05-14	Barrier adhesion by patterning gold
JPH023311A (ja)	1990-01-08	インクジェットヘッドおよびその製造方法
JPS6190520U (de)	1986-06-12