EP0816018A1 - Polierscheibe-Träger und Polierverfahren - Google Patents

Polierscheibe-Träger und Polierverfahren Download PDF

Info

Publication number: EP0816018A1
Authority: EP; European Patent Office
Prior art keywords: polishing; coating; disc; layer; samples
Prior art date: 1996-06-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP97401394A

Other languages

English (en)

French (fr)

Other versions

EP0816018B1 (de

Inventor

Georges Henri Les Terrasses de Genève Broido

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Dite Lam-Plan Sa Ste

Lam Plan SA

Original Assignee

Dite Lam-Plan Sa Ste

Lam Plan SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-06-28

Filing date

1997-06-18

Publication date

1998-01-07

1997-06-18 Application filed by Dite Lam-Plan Sa Ste, Lam Plan SA filed Critical Dite Lam-Plan Sa Ste

1998-01-07 Publication of EP0816018A1 publication Critical patent/EP0816018A1/de

1999-08-04 Application granted granted Critical

1999-08-04 Publication of EP0816018B1 publication Critical patent/EP0816018B1/de

2017-06-18 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000005498 polishing Methods 0.000 title claims abstract description 35
238000000034 method Methods 0.000 title claims 2
239000000463 material Substances 0.000 claims abstract description 25
229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 5
239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 5
239000011248 coating agent Substances 0.000 claims description 35
238000000576 coating method Methods 0.000 claims description 35
-1 polytetrafluoroethylene Polymers 0.000 claims description 4
229910052782 aluminium Inorganic materials 0.000 abstract description 20
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 20
239000004744 fabric Substances 0.000 abstract description 4
239000000853 adhesive Substances 0.000 abstract description 2
230000001070 adhesive effect Effects 0.000 abstract description 2
238000005507 spraying Methods 0.000 abstract description 2
239000004411 aluminium Substances 0.000 abstract 1
229910052751 metal Inorganic materials 0.000 description 11
239000002184 metal Substances 0.000 description 11
229920000915 polyvinyl chloride Polymers 0.000 description 10
239000004800 polyvinyl chloride Substances 0.000 description 10
229910000831 Steel Inorganic materials 0.000 description 9
239000010959 steel Substances 0.000 description 9
229920003023 plastic Polymers 0.000 description 5
239000004033 plastic Substances 0.000 description 5
238000005299 abrasion Methods 0.000 description 4
230000000052 comparative effect Effects 0.000 description 3
238000002360 preparation method Methods 0.000 description 2
239000000758 substrate Substances 0.000 description 2
229920003319 Araldite® Polymers 0.000 description 1
229910001018 Cast iron Inorganic materials 0.000 description 1
230000002238 attenuated effect Effects 0.000 description 1
239000007787 solid Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1

Images

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Definitions

the invention relates to a disk support for polishing which overcomes the disadvantages mentioned above by changing the polishing disc without the abrasion being too strong during the first few seconds of use, and while getting however good flatness.
the following polishing disc holder the invention consists of a disc-shaped body.
a support centering hole is provided in the center of one of the faces of the body.
a training hole for cooperate with a device training finger rotational drive is provided eccentrically in this same face.
a coating of more material tender that that of the body is applied to the other side in a thickness between 5 ⁇ m and 4 mm.
the coating has a hardness shore D greater than 12 so as not to obtain a profile dented in the sample to be polished.
the coating is polytetrafluoroethylene. This makes it possible to take off and re-stick an abrasive paper or polishing cloth used previously, for example for polishing a different material, repositioning a sandpaper or polishing cloth that would have been improperly applied to the substrate and self-eliminating most air bubbles that have been trapped accidentally when laying sandpaper or polishing cloth. Due to the very low power sticky polytetrafluoroethylene, air bubbles are driven off by the pressure applied to the workpiece.
the coating can be applied by spraying, for example by applying three successive layers of 25 microns, but we can also apply the sheet coating if necessary laminated, these leaves undergoing treatment chemical on one side which allows them to be glued on a support with araldite or double adhesive face.
the coating can also be in the form a grid or a canvas, just like the disc-shaped body.
the body can also be laminate, aluminum plate or other hard material 1 to 5 mm thick being bonded to a substrate cast iron or aluminum.
Figure 1 is a bottom view of a disk carrier polishing according to the invention and Figure 2 is a sectional view.
the support comprises a body 1 made of aluminum disc shape with two faces 2 and 3. In the center of the face 2 is formed a blind hole 4 for centering, while that on this same face 2 are formed seven holes 5 and 7 training blinds intended to cooperate with a finger drive of a rotary drive motor.
the arrangement of holes 5 and 7 is as it is always one able to cooperate with the finger of a machine whatever the polisher.
a coating 6 in polytetrafluoroethylene in one thickness 100 microns is applied.
Polisher equipped with an uncoated solid aluminum plate Material of the abrasive paper carrier plate aluminum Average coating hardness nil Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Plate rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.48 g
Polisher equipped with an aluminum plate with PVC coating 3 ⁇ Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 3 ⁇ Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.48 g
Polisher equipped with an aluminum plate with 10 ⁇ PVC coating Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 10 ⁇ Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.27 g The profile of the sample is good.
Polisher equipped with an aluminum plate with 50 ⁇ PVC coating Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 50 ⁇ Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.22 g The profile of the sample is good.
Polisher equipped with an aluminum plate with 100 ⁇ PVC coating Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 100 ⁇ Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.22 g The profile of the sample is good.
Polisher fitted with an aluminum plate with 500 ⁇ PVC coating Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 500 microns Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.23 g The sample profile is excellent.
Polisher equipped with an aluminum plate with 2000 ⁇ PVC coating (2 mm) Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 2000 microns Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.23 g The sample profile is excellent.
Polisher equipped with an aluminum plate with PVC coating 4000 ⁇ (4 mm) Material of the abrasive paper carrier plate aluminum Coating thickness on carrier plate 4000 microns Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.28 g The profile of the sample is still satisfactory.
Polisher equipped with a MASSIF PVC plate (thickness 12 mm) Material of the abrasive paper carrier plate PVC Coating thickness on carrier plate 12 mm Average coating hardness 80 SHR D Sandpaper grain P240 Polishing time 3mn 45 Pressure on samples 449g / cm 2 Tray rotation speed 250 rpm Processed samples 3 Polished material steel Underwater polishing Yes Metal removal 0.27 g The profile of the sample is rounded.

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)
Grinding Of Cylindrical And Plane Surfaces (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

EP97401394A 1996-06-28 1997-06-18 Polierscheibe-Träger und Polierverfahren Expired - Lifetime EP0816018B1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR9608076A FR2750354B1 (fr)	1996-06-28	1996-06-28	Support de disque de polissage et procede de polissage
FR9608076		1996-06-28

Publications (2)

Publication Number	Publication Date
EP0816018A1 true EP0816018A1 (de)	1998-01-07
EP0816018B1 EP0816018B1 (de)	1999-08-04

Family

ID=9493524

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP97401394A Expired - Lifetime EP0816018B1 (de)	1996-06-28	1997-06-18	Polierscheibe-Träger und Polierverfahren

Country Status (10)

Country	Link
US (1)	US6048261A (de)
EP (1)	EP0816018B1 (de)
JP (1)	JPH1076471A (de)
AT (1)	ATE182829T1 (de)
CA (1)	CA2208430A1 (de)
DE (2)	DE69700374D1 (de)
DK (1)	DK0816018T3 (de)
ES (1)	ES2136460T3 (de)
FR (1)	FR2750354B1 (de)
ZA (1)	ZA975747B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE20106228U1 (de)	2001-04-09	2001-06-28	Jobra Metall GmbH, 84056 Rottenburg	Trägerteller für Lamellenschleifscheiben
EP2939788A1 (de) *	2010-10-05	2015-11-04	Black & Decker Inc.	Universal-schleifscheibe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2013896A1 (en) *	1970-03-23	1971-10-14	Alkor Werk, Karl Lissmann KG, 8000 München	Semiconductor lapping machine
EP0658401A1 (de) *	1993-12-14	1995-06-21	Shin-Etsu Handotai Company Limited	Polierteil und Wafer-Poliervorrichtung
EP0713897A1 (de) *	1994-05-10	1996-05-29	Asahi Kasei Kogyo Kabushiki Kaisha	Fluorharzschaum und dessen herstellungsverfahren

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2747343A (en) *	1954-09-02	1956-05-29	Contur Abrasive Company Inc	Abrasive articles and the like and holders therefor
JPH01193166A (ja) *	1988-01-28	1989-08-03	Showa Denko Kk	半導体ウェハ鏡面研磨用パッド
JPH09321001A (ja) *	1996-05-31	1997-12-12	Komatsu Electron Metals Co Ltd	半導体ウェハの研磨方法
JP2738392B1 (ja) *	1996-11-05	1998-04-08	日本電気株式会社	半導体装置の研磨装置及び研磨方法

1996
- 1996-06-28 FR FR9608076A patent/FR2750354B1/fr not_active Expired - Lifetime
1997
- 1997-06-18 DE DE69700374A patent/DE69700374D1/de not_active Expired - Lifetime
- 1997-06-18 ES ES97401394T patent/ES2136460T3/es not_active Expired - Lifetime
- 1997-06-18 AT AT97401394T patent/ATE182829T1/de not_active IP Right Cessation
- 1997-06-18 DE DE69700374T patent/DE69700374T4/de not_active Expired - Lifetime
- 1997-06-18 EP EP97401394A patent/EP0816018B1/de not_active Expired - Lifetime
- 1997-06-18 DK DK97401394T patent/DK0816018T3/da active
- 1997-06-19 CA CA002208430A patent/CA2208430A1/fr not_active Abandoned
- 1997-06-27 ZA ZA975747A patent/ZA975747B/xx unknown
- 1997-06-27 JP JP9187357A patent/JPH1076471A/ja active Pending
- 1997-06-30 US US08/885,421 patent/US6048261A/en not_active Expired - Lifetime

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2013896A1 (en) *	1970-03-23	1971-10-14	Alkor Werk, Karl Lissmann KG, 8000 München	Semiconductor lapping machine
EP0658401A1 (de) *	1993-12-14	1995-06-21	Shin-Etsu Handotai Company Limited	Polierteil und Wafer-Poliervorrichtung
EP0713897A1 (de) *	1994-05-10	1996-05-29	Asahi Kasei Kogyo Kabushiki Kaisha	Fluorharzschaum und dessen herstellungsverfahren

Also Published As

Publication number	Publication date
ZA975747B (en)	1998-12-28
FR2750354A1 (fr)	1998-01-02
ES2136460T3 (es)	1999-11-16
FR2750354B1 (fr)	1998-08-07
DE69700374T2 (de)	1999-11-25
EP0816018B1 (de)	1999-08-04
DE69700374D1 (de)	1999-09-09
US6048261A (en)	2000-04-11
DK0816018T3 (da)	1999-12-06
DE69700374T4 (de)	2000-04-06
JPH1076471A (ja)	1998-03-24
ATE182829T1 (de)	1999-08-15
CA2208430A1 (fr)	1997-12-28

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