EP0828080A3 - Gasreibungspumpe - Google Patents

Gasreibungspumpe Download PDF

Info

Publication number
EP0828080A3
EP0828080A3 EP97111700A EP97111700A EP0828080A3 EP 0828080 A3 EP0828080 A3 EP 0828080A3 EP 97111700 A EP97111700 A EP 97111700A EP 97111700 A EP97111700 A EP 97111700A EP 0828080 A3 EP0828080 A3 EP 0828080A3
Authority
EP
European Patent Office
Prior art keywords
cylindrical components
pump
rotor element
another
holweck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97111700A
Other languages
English (en)
French (fr)
Other versions
EP0828080A2 (de
Inventor
Armin Conrad
Heinrich Lotz
Carsten Dr. Reese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0828080A2 publication Critical patent/EP0828080A2/de
Publication of EP0828080A3 publication Critical patent/EP0828080A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung beschreibt eine Gasreibungspumpe nach der Bauart von Holweck. Mehrere zylindrische Bauteile (5) sind koaxial zueinander angeordnet und bilden das Rotorelement. Das Statorelement besteht entsprechend aus mehreren koaxial zueinander angeordneten zylindrischen Bauteilen (6). Diese umgeben die zylindrischen Bauteile des Rotorelementes. Parallele Förderkanäle (7) des Statorelementes sind jeweils den äußeren bzw. inneren glatten Oberflächen der zylindrischen Bauteile des Rotorelementes gegenüber angeordnet, so daß parallele Förderräume (9) entstehen. Durch die erfindungsgemäße Anordnung wird das Saugvermögen einer Holweck-Pumpe beträchtlich erhöht, wobei der Arbeitsbereich innerhalb des molekularen Strömungsgebietes bleibt. Die Vorteile werden besonders offensichtlich im Zusammenwirken mit einer Turbomolekularpumpe.
EP97111700A 1996-08-10 1997-07-10 Gasreibungspumpe Withdrawn EP0828080A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19632375 1996-08-10
DE19632375A DE19632375A1 (de) 1996-08-10 1996-08-10 Gasreibungspumpe

Publications (2)

Publication Number Publication Date
EP0828080A2 EP0828080A2 (de) 1998-03-11
EP0828080A3 true EP0828080A3 (de) 1998-10-14

Family

ID=7802360

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97111700A Withdrawn EP0828080A3 (de) 1996-08-10 1997-07-10 Gasreibungspumpe

Country Status (4)

Country Link
US (1) US5893702A (de)
EP (1) EP0828080A3 (de)
JP (1) JP3971821B2 (de)
DE (1) DE19632375A1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10149366A1 (de) 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
JP3961273B2 (ja) 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
FR2854933B1 (fr) * 2003-05-13 2005-08-05 Cit Alcatel Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
ITTO20030420A1 (it) * 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
GB0614928D0 (en) * 2006-07-27 2006-09-06 Boc Group Plc Molecular Drag Pumping Mechanism
JP4935509B2 (ja) * 2007-06-05 2012-05-23 株式会社島津製作所 ターボ分子ポンプ
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008063131A1 (de) 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
KR101823705B1 (ko) * 2010-09-28 2018-01-30 에드워즈 가부시키가이샤 배기 펌프
DE202011002809U1 (de) 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
DE102011112691A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102011119506A1 (de) 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
EP2620649B1 (de) 2012-01-27 2019-03-13 Edwards Limited Gastransfervakuumpumpe
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
US8597553B1 (en) 2012-05-31 2013-12-03 Mohawk Industries, Inc. Systems and methods for manufacturing bulked continuous filament
US9636860B2 (en) 2012-05-31 2017-05-02 Mohawk Industries, Inc. Method of manufacturing bulked continuous filament
US10487422B2 (en) 2012-05-31 2019-11-26 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from colored recycled pet
US10532495B2 (en) 2012-05-31 2020-01-14 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from recycled PET
US10695953B2 (en) 2012-05-31 2020-06-30 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous carpet filament
US11045979B2 (en) 2012-05-31 2021-06-29 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous filament from recycled PET
US9630353B2 (en) 2012-05-31 2017-04-25 Mohawk Industries, Inc. Method of manufacturing bulked continuous filament
US10538016B2 (en) 2012-05-31 2020-01-21 Aladdin Manufacturing Corporation Methods for manufacturing bulked continuous carpet filament
CN104541063B (zh) 2012-09-26 2018-08-31 埃地沃兹日本有限公司 转子及具备该转子的真空泵
DE102012110691A1 (de) * 2012-11-08 2014-05-08 Pfeiffer Vacuum Gmbh Vorrichtung zur kinetischen Energiespeicherung
DE102013207269A1 (de) 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
EP3205884B1 (de) * 2016-02-12 2020-11-11 Enrichment Technology Company Ltd. Zweigniederlassung Deutschland Selbstpumpendes vakuum-rotorsystem
US10751915B2 (en) 2016-11-10 2020-08-25 Aladdin Manufacturing Corporation Polyethylene terephthalate coloring systems and methods
EA201991807A1 (ru) 2017-01-30 2019-12-30 Аладдин Мэньюфэкчеринг Корпорейшн Способы для изготовления объемной непрерывной нити из окрашенного вторичного полиэтилентерефталата
US11279071B2 (en) 2017-03-03 2022-03-22 Aladdin Manufacturing Corporation Method of manufacturing bulked continuous carpet filament
HUE061237T2 (hu) 2017-09-15 2023-05-28 Aladdin Mfg Corp Eljárás ömlesztett folytonos szõnyegszál elõállítására
US11242622B2 (en) 2018-07-20 2022-02-08 Aladdin Manufacturing Corporation Bulked continuous carpet filament manufacturing from polytrimethylene terephthalate
EP3980587A1 (de) 2019-06-05 2022-04-13 Aladdin Manufacturing Corporation Verfahren zur herstellung von gebauschtem endlosteppichfaden

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1010235B (de) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe
DE4113122A1 (de) * 1990-04-25 1991-10-31 Seiko Seiki Kk Vakuumpumpe
EP0779434A1 (de) * 1995-12-12 1997-06-18 The BOC Group plc Verbesserungen in Vakuumpumpen
EP0805275A2 (de) * 1996-05-03 1997-11-05 The BOC Group plc Vakuumpumpen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPH0765592B2 (ja) * 1986-02-22 1995-07-19 守彦 木俣 タ−ボ分子ポンプ
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
EP0464292B1 (de) * 1990-07-06 1995-01-18 Alcatel Cit Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit
JPH05248386A (ja) * 1992-03-04 1993-09-24 Osaka Shinku Kiki Seisakusho:Kk ねじ溝型真空ポンプ
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1010235B (de) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe
DE4113122A1 (de) * 1990-04-25 1991-10-31 Seiko Seiki Kk Vakuumpumpe
EP0779434A1 (de) * 1995-12-12 1997-06-18 The BOC Group plc Verbesserungen in Vakuumpumpen
EP0805275A2 (de) * 1996-05-03 1997-11-05 The BOC Group plc Vakuumpumpen

Also Published As

Publication number Publication date
DE19632375A1 (de) 1998-02-19
JP3971821B2 (ja) 2007-09-05
EP0828080A2 (de) 1998-03-11
US5893702A (en) 1999-04-13
JPH1077990A (ja) 1998-03-24

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