EP0828080A3 - Pompe à effet visqueux - Google Patents

Pompe à effet visqueux Download PDF

Info

Publication number: EP0828080A3
Authority: EP; European Patent Office
Prior art keywords: cylindrical components; pump; rotor element; another; holweck
Prior art date: 1996-08-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP97111700A

Other languages

German (de)

English (en)

Other versions

EP0828080A2 (fr

Inventor

Armin Conrad

Heinrich Lotz

Carsten Dr. Reese

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-08-10

Filing date

1997-07-10

Publication date

1998-10-14

1997-07-10 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

1998-03-11 Publication of EP0828080A2 publication Critical patent/EP0828080A2/fr

1998-10-14 Publication of EP0828080A3 publication Critical patent/EP0828080A3/fr

Status Withdrawn legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP97111700A 1996-08-10 1997-07-10 Pompe à effet visqueux Withdrawn EP0828080A3 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19632375		1996-08-10
DE19632375A DE19632375A1 (de)	1996-08-10	1996-08-10	Gasreibungspumpe

Publications (2)

Publication Number	Publication Date
EP0828080A2 EP0828080A2 (fr)	1998-03-11
EP0828080A3 true EP0828080A3 (fr)	1998-10-14

Family

ID=7802360

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP97111700A Withdrawn EP0828080A3 (fr)	1996-08-10	1997-07-10	Pompe à effet visqueux

Country Status (4)

Country	Link
US (1)	US5893702A (fr)
EP (1)	EP0828080A3 (fr)
JP (1)	JP3971821B2 (fr)
DE (1)	DE19632375A1 (fr)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9810872D0 (en) *	1998-05-20	1998-07-22	Boc Group Plc	Improved vacuum pump
DE19846188A1 (de)	1998-10-07	2000-04-13	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Stator und Rotor
DE19930952A1 (de) *	1999-07-05	2001-01-11	Pfeiffer Vacuum Gmbh	Vakuumpumpe
US6508631B1 (en) *	1999-11-18	2003-01-21	Mks Instruments, Inc.	Radial flow turbomolecular vacuum pump
GB9927493D0 (en) *	1999-11-19	2000-01-19	Boc Group Plc	Improved vacuum pumps
DE10114585A1 (de) *	2001-03-24	2002-09-26	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE10149366A1 (de)	2001-10-06	2003-04-17	Leybold Vakuum Gmbh	Axial fördernde Reibungsvakuumpumpe
JP3961273B2 (ja)	2001-12-04	2007-08-22	Ｂｏｃエドワーズ株式会社	真空ポンプ
GB0229355D0 (en) *	2002-12-17	2003-01-22	Boc Group Plc	Vacuum pumping arrangement
FR2854933B1 (fr) *	2003-05-13	2005-08-05	Cit Alcatel	Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
ITTO20030420A1 (it) *	2003-06-05	2004-12-06	Varian Spa	Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
GB0424199D0 (en) *	2004-11-01	2004-12-01	Boc Group Plc	Vacuum pump
GB0614928D0 (en) *	2006-07-27	2006-09-06	Boc Group Plc	Molecular Drag Pumping Mechanism
JP4935509B2 (ja) *	2007-06-05	2012-05-23	株式会社島津製作所	ターボ分子ポンプ
DE102007044945A1 (de) *	2007-09-20	2009-04-09	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102008063131A1 (de)	2008-12-24	2010-07-01	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
US8152442B2 (en) *	2008-12-24	2012-04-10	Agilent Technologies, Inc.	Centripetal pumping stage and vacuum pump incorporating such pumping stage
GB2474507B (en) *	2009-10-19	2016-01-27	Edwards Ltd	Vacuum pump
KR101823705B1 (ko) *	2010-09-28	2018-01-30	에드워즈 가부시키가이샤	배기 펌프
DE202011002809U1 (de)	2011-02-17	2012-06-12	Oerlikon Leybold Vacuum Gmbh	Statorelement sowie Hochvakuumpumpe
DE102011112691A1 (de)	2011-09-05	2013-03-07	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102011119506A1 (de)	2011-11-26	2013-05-29	Pfeiffer Vacuum Gmbh	Schnell drehender Rotor für eine Vakuumpumpe
EP2620649B1 (fr)	2012-01-27	2019-03-13	Edwards Limited	Pompe à vide de transfert gazeux
GB2498816A (en) *	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
DE102012003680A1 (de) *	2012-02-23	2013-08-29	Pfeiffer Vacuum Gmbh	Vakuumpumpe
US8597553B1 (en)	2012-05-31	2013-12-03	Mohawk Industries, Inc.	Systems and methods for manufacturing bulked continuous filament
US9636860B2 (en)	2012-05-31	2017-05-02	Mohawk Industries, Inc.	Method of manufacturing bulked continuous filament
US10487422B2 (en)	2012-05-31	2019-11-26	Aladdin Manufacturing Corporation	Methods for manufacturing bulked continuous filament from colored recycled pet
US10532495B2 (en)	2012-05-31	2020-01-14	Aladdin Manufacturing Corporation	Methods for manufacturing bulked continuous filament from recycled PET
US10695953B2 (en)	2012-05-31	2020-06-30	Aladdin Manufacturing Corporation	Methods for manufacturing bulked continuous carpet filament
US11045979B2 (en)	2012-05-31	2021-06-29	Aladdin Manufacturing Corporation	Methods for manufacturing bulked continuous filament from recycled PET
US9630353B2 (en)	2012-05-31	2017-04-25	Mohawk Industries, Inc.	Method of manufacturing bulked continuous filament
US10538016B2 (en)	2012-05-31	2020-01-21	Aladdin Manufacturing Corporation	Methods for manufacturing bulked continuous carpet filament
CN104541063B (zh)	2012-09-26	2018-08-31	埃地沃兹日本有限公司	转子及具备该转子的真空泵
DE102012110691A1 (de) *	2012-11-08	2014-05-08	Pfeiffer Vacuum Gmbh	Vorrichtung zur kinetischen Energiespeicherung
DE102013207269A1 (de)	2013-04-22	2014-10-23	Pfeiffer Vacuum Gmbh	Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
EP3205884B1 (fr) *	2016-02-12	2020-11-11	Enrichment Technology Company Ltd. Zweigniederlassung Deutschland	Système de rotor à vide auto-pompant
US10751915B2 (en)	2016-11-10	2020-08-25	Aladdin Manufacturing Corporation	Polyethylene terephthalate coloring systems and methods
EA201991807A1 (ru)	2017-01-30	2019-12-30	Аладдин Мэньюфэкчеринг Корпорейшн	Способы для изготовления объемной непрерывной нити из окрашенного вторичного полиэтилентерефталата
US11279071B2 (en)	2017-03-03	2022-03-22	Aladdin Manufacturing Corporation	Method of manufacturing bulked continuous carpet filament
HUE061237T2 (hu)	2017-09-15	2023-05-28	Aladdin Mfg Corp	Eljárás ömlesztett folytonos szõnyegszál elõállítására
US11242622B2 (en)	2018-07-20	2022-02-08	Aladdin Manufacturing Corporation	Bulked continuous carpet filament manufacturing from polytrimethylene terephthalate
EP3980587A1 (fr)	2019-06-05	2022-04-13	Aladdin Manufacturing Corporation	Procédé de fabrication de filament de tapis continu gonflant

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2730297A (en) *	1950-04-12	1956-01-10	Hartford Nat Bank & Trust Co	High-vacuum molecular pump
DE1010235B (de) *	1955-04-22	1957-06-13	Arthur Pfeiffer Fa	Molekularpumpe
DE4113122A1 (de) *	1990-04-25	1991-10-31	Seiko Seiki Kk	Vakuumpumpe
EP0779434A1 (fr) *	1995-12-12	1997-06-18	The BOC Group plc	Améliorations dans les pompes à vide
EP0805275A2 (fr) *	1996-05-03	1997-11-05	The BOC Group plc	Pompes à vide

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2526164A1 (de) *	1975-06-12	1976-12-30	Leybold Heraeus Gmbh & Co Kg	Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
JPS60139098U (ja) *	1984-02-24	1985-09-13	セイコ−精機株式会社	組合せ型軸流分子ポンプ
JPS61145394A (ja) *	1984-12-18	1986-07-03	Tokuda Seisakusho Ltd	分子ポンプ
JPH0765592B2 (ja) *	1986-02-22	1995-07-19	守彦木俣	タ−ボ分子ポンプ
JPS62261696A (ja) *	1986-05-08	1987-11-13	Mitsubishi Electric Corp	タ−ボ分子ポンプ装置
NL8602052A (nl) *	1986-08-12	1988-03-01	Ultra Centrifuge Nederland Nv	Hoogvacuumpomp.
EP0464292B1 (fr) *	1990-07-06	1995-01-18	Alcatel Cit	Ensemble mécanique de pompage pour vide secondaire et installation de détection de fuite utilisant un tel ensemble
JPH05248386A (ja) *	1992-03-04	1993-09-24	Osaka Shinku Kiki Seisakusho:Kk	ねじ溝型真空ポンプ
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system

1996
- 1996-08-10 DE DE19632375A patent/DE19632375A1/de not_active Withdrawn
1997
- 1997-07-10 EP EP97111700A patent/EP0828080A3/fr not_active Withdrawn
- 1997-07-28 JP JP20148797A patent/JP3971821B2/ja not_active Expired - Fee Related
- 1997-08-05 US US08/906,362 patent/US5893702A/en not_active Expired - Lifetime

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2730297A (en) *	1950-04-12	1956-01-10	Hartford Nat Bank & Trust Co	High-vacuum molecular pump
DE1010235B (de) *	1955-04-22	1957-06-13	Arthur Pfeiffer Fa	Molekularpumpe
DE4113122A1 (de) *	1990-04-25	1991-10-31	Seiko Seiki Kk	Vakuumpumpe
EP0779434A1 (fr) *	1995-12-12	1997-06-18	The BOC Group plc	Améliorations dans les pompes à vide
EP0805275A2 (fr) *	1996-05-03	1997-11-05	The BOC Group plc	Pompes à vide

Also Published As

Publication number	Publication date
DE19632375A1 (de)	1998-02-19
JP3971821B2 (ja)	2007-09-05
EP0828080A2 (fr)	1998-03-11
US5893702A (en)	1999-04-13
JPH1077990A (ja)	1998-03-24

Legal Events

Date	Code	Title	Description
1998-01-23	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1998-03-11	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT CH DE FR GB IT LI NL
1998-03-11	AX	Request for extension of the european patent	Free format text: AL;LT;LV;RO;SI
1998-08-28	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1998-10-14	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
1998-10-14	AX	Request for extension of the european patent	Free format text: AL;LT;LV;RO;SI
1999-02-03	17P	Request for examination filed	Effective date: 19981201
1999-06-23	AKX	Designation fees paid	Free format text: AT CH DE FR GB IT LI NL
2002-04-17	17Q	First examination report despatched	Effective date: 20020228
2002-11-29	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2003-01-15	18D	Application deemed to be withdrawn	Effective date: 20020711

Publication	Publication Date	Title
EP0828080A3 (fr)	1998-10-14	Pompe à effet visqueux
DE60302589T2 (de)	2006-09-14	Gebläsemotor
DE2905624A1 (de)	1979-08-16	Kleingeblaese mit elektrischem antriebsmotor
DE2534528A1 (de)	1976-03-11	Vakuumpumpe
EP1659293A3 (fr)	2006-12-20	Turbomachine
DE102012003680A1 (de)	2013-08-29	Vakuumpumpe
DE69104749T2 (de)	1995-03-30	Verbesserte Turbomolekularpumpe.
DE2035063C3 (de)	1974-05-30	Laufrad für eine Turbomolekularpumpe
DE20001236U1 (de)	2000-04-27	Ventilator
DE60031187T2 (de)	2007-08-30	Elektromotorisch betriebene Saugeinheit mit Laufrad zum Kühlen des Motors
EP3608545B1 (fr)	2021-02-17	Pompe à vide
EP1049876B1 (fr)	2002-07-24	Pompe a engrenages
EP0825346A1 (fr)	1998-02-25	Etage d'entrée pour une pompe à gaz à friction à double circulation
DE3526517C2 (fr)	1988-10-06
DE2933904C2 (de)	1985-03-14	Einlaufkrümmer
EP1119709A1 (fr)	2001-08-01	Pompe a vide a friction avec stator et rotor
DE2258737A1 (de)	1974-06-06	Seitenkanalverdichter
DE1403579A1 (de)	1969-07-17	Turbogeblaese
DE803862C (de)	1951-04-12	Gleitlager
DE2354046A1 (de)	1975-05-07	Elektrisch angetriebene turbomolekularvakuumpumpe
EP2165085A2 (fr)	2010-03-24	Flasque destiné à supporter un arbre
DE2017583A1 (de)	1971-11-04	Antrieb für Strömungsmaschinen
DE29619930U1 (de)	1998-03-19	Flüssigkeitsringverdichter
DE19629843B4 (de)	2005-06-02	Notschmiervorrichtung für Kreiselpumpen
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