EP0878561A3 - Procédé et dispositif pour la régéneration des solutions de plaçage d'étain - Google Patents

Procédé et dispositif pour la régéneration des solutions de plaçage d'étain Download PDF

Info

Publication number: EP0878561A3
Authority: EP; European Patent Office
Prior art keywords: chamber; tin; exchange membrane; copper; solution
Prior art date: 1997-05-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP98107584A

Other languages

German (de)

English (en)

Other versions

EP0878561A2 (fr

EP0878561B1 (fr

Inventor

Klaus Prof. Rer. Nat. Fischwasser

Hans-Wilhelm Prof. Dr.-Ing. Lieber

Ralph Dr. Rer. Nat. Blittersdorf

Annette Dipl.-Ing. Heuss (Fh)

Ulrich Dr.-Ing. Reiter

Werner Dr. Rer. Nat. Harnischmacher

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

KM Europa Metal AG

Original Assignee

KM Europa Metal AG

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-05-07

Filing date

1998-04-25

Publication date

1999-04-28

1998-04-25 Application filed by KM Europa Metal AG filed Critical KM Europa Metal AG

1998-11-18 Publication of EP0878561A2 publication Critical patent/EP0878561A2/fr

1999-04-28 Publication of EP0878561A3 publication Critical patent/EP0878561A3/fr

2003-09-03 Application granted granted Critical

2003-09-03 Publication of EP0878561B1 publication Critical patent/EP0878561B1/fr

2018-04-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/22—Regeneration of process solutions by ion-exchange
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S204/00—Chemistry: electrical and wave energy
- Y10S204/13—Purification and treatment of electroplating baths and plating wastes

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Electrochemistry (AREA)
General Chemical & Material Sciences (AREA)
Mechanical Engineering (AREA)
Electrolytic Production Of Metals (AREA)
Chemically Coating (AREA)
Water Treatment By Electricity Or Magnetism (AREA)
Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Separation Using Semi-Permeable Membranes (AREA)

EP98107584A 1997-05-07 1998-04-25 Procédé et dispositif pour la régéneration des solutions de plaçage d'étain Expired - Lifetime EP0878561B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19719020A DE19719020A1 (de)	1997-05-07	1997-05-07	Verfahren und Vorrichtung zum Regenerieren von Verzinnungslösungen
DE19719020		1997-05-07

Publications (3)

Publication Number	Publication Date
EP0878561A2 EP0878561A2 (fr)	1998-11-18
EP0878561A3 true EP0878561A3 (fr)	1999-04-28
EP0878561B1 EP0878561B1 (fr)	2003-09-03

Family

ID=7828719

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP98107584A Expired - Lifetime EP0878561B1 (fr)	1997-05-07	1998-04-25	Procédé et dispositif pour la régéneration des solutions de plaçage d'étain

Country Status (12)

Country	Link
US (1)	US6120673A (fr)
EP (1)	EP0878561B1 (fr)
JP (1)	JPH10317154A (fr)
AR (1)	AR010155A1 (fr)
AT (1)	ATE248935T1 (fr)
AU (1)	AU724854B2 (fr)
BR (1)	BR9801580A (fr)
CA (1)	CA2236393C (fr)
DE (2)	DE19719020A1 (fr)
DK (1)	DK0878561T3 (fr)
ES (1)	ES2202686T3 (fr)
PT (1)	PT878561E (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9901586D0 (en) *	1999-01-25	1999-03-17	Alpha Fry Ltd	Process for the recovery of lead and/or tin or alloys thereof from substrate surfaces
JP3455709B2 (ja)	1999-04-06	2003-10-14	株式会社大和化成研究所	めっき方法とそれに用いるめっき液前駆体
FR2801062B1 (fr) *	1999-11-12	2001-12-28	Lorraine Laminage	Installation et procede de dissolution electrolytique par oxydation d'un metal
JP2002317275A (ja) *	2001-04-17	2002-10-31	Toto Ltd	無電解スズめっき液の長寿命化方法
DE10132478C1 (de) *	2001-07-03	2003-04-30	Atotech Deutschland Gmbh	Verfahren zum Abscheiden einer Metallschicht sowie Verfahren zum Regenerieren einer Metallionen in einer hohen Oxidationsstufe enthaltenden Lösung
US7195702B2 (en) *	2003-06-06	2007-03-27	Taskem, Inc.	Tin alloy electroplating system
US6942810B2 (en) *	2003-12-31	2005-09-13	The Boc Group, Inc.	Method for treating metal-containing solutions
US20060096867A1 (en) *	2004-11-10	2006-05-11	George Bokisa	Tin alloy electroplating system
DE502005003655D1 (de) *	2005-05-25	2008-05-21	Enthone	Verfahren und Vorrichtung zur Einstellung der Ionenkonzentration in Elektrolyten
JP2006341213A (ja) *	2005-06-10	2006-12-21	Es Adviser:Kk	無電解銅めっき廃液の電解処理装置及びその電解処理方法
DE102006045157B4 (de)	2006-09-25	2020-06-18	Robert Bosch Gmbh	Handwerkzeugmaschine
KR100934729B1 (ko) *	2007-10-29	2009-12-30	(주)화백엔지니어링	무전해 주석도금액 불순물 제거장치 및 방법
US20110226613A1 (en)	2010-03-19	2011-09-22	Robert Rash	Electrolyte loop with pressure regulation for separated anode chamber of electroplating system
US9404194B2 (en)	2010-12-01	2016-08-02	Novellus Systems, Inc.	Electroplating apparatus and process for wafer level packaging
JP5715411B2 (ja)	2010-12-28	2015-05-07	ローム・アンド・ハース電子材料株式会社	めっき液中から不純物を除去する方法
JP5830242B2 (ja)	2010-12-28	2015-12-09	ローム・アンド・ハース電子材料株式会社	めっき液中から不純物を除去する方法
JP5937320B2 (ja)	2011-09-14	2016-06-22	ローム・アンド・ハース電子材料株式会社	めっき液中から不純物を除去する方法
WO2013080326A1 (fr) *	2011-11-30	2013-06-06	不二商事株式会社	Procédé de régénération de liquide de placage
EP2671968B1 (fr) *	2012-06-05	2014-11-26	ATOTECH Deutschland GmbH	Procédé et appareil de régénération pour régénérer un composition de placage
US9534308B2 (en)	2012-06-05	2017-01-03	Novellus Systems, Inc.	Protecting anodes from passivation in alloy plating systems
JP6706095B2 (ja) *	2016-03-01	2020-06-03	株式会社荏原製作所	無電解めっき装置および無電解めっき方法
WO2019089282A1 (fr)	2017-11-01	2019-05-09	Lam Research Corporation	Régulation de la concentration d'électrolyte de placage sur un appareil de placage électrochimique
KR102523503B1 (ko) *	2018-05-09	2023-04-18	어플라이드 머티어리얼스, 인코포레이티드	전기도금 시스템들에서 오염을 제거하기 위한 시스템들 및 방법들
CN109467167B (zh) *	2018-10-30	2021-12-03	上海大学	一种去除不锈钢酸洗废水中重金属的方法
EP3875642A1 (fr) *	2020-03-04	2021-09-08	AT & S Austria Technologie & Systemtechnik Aktiengesellschaft	Procédé de traitement des eaux de rinçage provenant de la fabrication de cartes de circuit imprimé et/ou de substrats
CN111676470A (zh) *	2020-05-29	2020-09-18	广东天承科技有限公司	一种简易可溶性的高价锡的还原方法
CN116288292A (zh) *	2023-03-20	2023-06-23	聂柱根	一种化学锡药水锡还原再生除铜装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0347016A2 (fr) *	1985-01-14	1989-12-20	Macdermid Incorporated	Appareil d'électrodialyse pour l'entretien chimique de bains à plaqué cuivre sans électrodes
EP0545216A2 (fr) *	1991-11-27	1993-06-09	Mcgean-Rohco, Inc.	Procédé pour prolonger la durée de vie d'un bain de métallisation par déplacement
DE4310366C1 (de) *	1993-03-30	1994-10-13	Fraunhofer Ges Forschung	Verfahren zum Regenerieren von wässrigen, außenstromlos arbeitenden Beschichtungsbädern

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3764503A (en) *	1972-01-19	1973-10-09	Dart Ind Inc	Electrodialysis regeneration of metal containing acid solutions
DE2742718C2 (de) *	1977-09-22	1984-04-19	ESTEL HOOGOVENS B.V., 1970 Ijmuiden	Verfahren und Vorrichtung zur Regenerierung eines Verzinnungselektrolyten
US4330377A (en) *	1980-07-10	1982-05-18	Vulcan Materials Company	Electrolytic process for the production of tin and tin products

1997
- 1997-05-07 DE DE19719020A patent/DE19719020A1/de not_active Withdrawn
1998
- 1998-03-10 JP JP10058275A patent/JPH10317154A/ja active Pending
- 1998-04-25 DK DK98107584T patent/DK0878561T3/da active
- 1998-04-25 AT AT98107584T patent/ATE248935T1/de not_active IP Right Cessation
- 1998-04-25 EP EP98107584A patent/EP0878561B1/fr not_active Expired - Lifetime
- 1998-04-25 DE DE59809451T patent/DE59809451D1/de not_active Expired - Fee Related
- 1998-04-25 ES ES98107584T patent/ES2202686T3/es not_active Expired - Lifetime
- 1998-04-25 PT PT98107584T patent/PT878561E/pt unknown
- 1998-04-30 CA CA002236393A patent/CA2236393C/fr not_active Expired - Fee Related
- 1998-05-04 AR ARP980102075A patent/AR010155A1/es unknown
- 1998-05-05 BR BR9801580A patent/BR9801580A/pt not_active IP Right Cessation
- 1998-05-06 AU AU64757/98A patent/AU724854B2/en not_active Ceased
- 1998-05-07 US US09/074,725 patent/US6120673A/en not_active Expired - Fee Related

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0347016A2 (fr) *	1985-01-14	1989-12-20	Macdermid Incorporated	Appareil d'électrodialyse pour l'entretien chimique de bains à plaqué cuivre sans électrodes
EP0545216A2 (fr) *	1991-11-27	1993-06-09	Mcgean-Rohco, Inc.	Procédé pour prolonger la durée de vie d'un bain de métallisation par déplacement
DE4310366C1 (de) *	1993-03-30	1994-10-13	Fraunhofer Ges Forschung	Verfahren zum Regenerieren von wässrigen, außenstromlos arbeitenden Beschichtungsbädern

Also Published As

Publication number	Publication date
JPH10317154A (ja)	1998-12-02
DE19719020A1 (de)	1998-11-12
AR010155A1 (es)	2000-05-17
EP0878561A2 (fr)	1998-11-18
CA2236393C (fr)	2004-01-20
AU724854B2 (en)	2000-10-05
ATE248935T1 (de)	2003-09-15
BR9801580A (pt)	1999-07-06
ES2202686T3 (es)	2004-04-01
DK0878561T3 (da)	2004-01-12
CA2236393A1 (fr)	1998-11-07
US6120673A (en)	2000-09-19
AU6475798A (en)	1998-11-12
PT878561E (pt)	2004-02-27
DE59809451D1 (de)	2003-10-09
EP0878561B1 (fr)	2003-09-03

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Publication	Publication Date	Title
EP0878561A3 (fr)	1999-04-28	Procédé et dispositif pour la régéneration des solutions de plaçage d'étain
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DE112012004983T5 (de)	2014-09-11	Verfahren zum Regenerieren einer Beschichtungsflüssigkeit,Beschichtungsverfahren und Beschichtungsvorrichtung
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EP0305704A2 (fr)	1989-03-08	Procédé pour déposer électrolytiquement un métal, en particulier du zinc ou un alliage de zinc sur une bande d'acier
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EP1006213A2 (fr)	2000-06-07	Procédé de régeneration d'une solution de traitement
JPS62287100A (ja)	1987-12-12	リン酸塩液中のＮｉイオン除去方法
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