ATE426098T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE426098T1
ATE426098T1 AT00117868T AT00117868T ATE426098T1 AT E426098 T1 ATE426098 T1 AT E426098T1 AT 00117868 T AT00117868 T AT 00117868T AT 00117868 T AT00117868 T AT 00117868T AT E426098 T1 ATE426098 T1 AT E426098T1
Authority
AT
Austria
Prior art keywords
fixed
pump
components
casing
rotating
Prior art date
Application number
AT00117868T
Other languages
English (en)
Inventor
Armin Conrad
Wolfgang Eberl
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE426098T1 publication Critical patent/ATE426098T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)
AT00117868T 1999-09-06 2000-08-19 Vakuumpumpe ATE426098T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19942410A DE19942410A1 (de) 1999-09-06 1999-09-06 Vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE426098T1 true ATE426098T1 (de) 2009-04-15

Family

ID=7920926

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00117868T ATE426098T1 (de) 1999-09-06 2000-08-19 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6464451B1 (de)
EP (1) EP1081387B1 (de)
JP (1) JP2001090690A (de)
AT (1) ATE426098T1 (de)
DE (2) DE19942410A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
US7171786B2 (en) * 2003-12-01 2007-02-06 Tapco International Corporation Window well
EP2027015A1 (de) * 2006-06-12 2009-02-25 Mag Aerospace Industries, Inc. Regenerativer vakuum-generator für flugzeuge und andere fahrzeuge
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
WO2009142905A1 (en) 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2354046A1 (de) * 1973-10-29 1975-05-07 Battelle Institut E V Elektrisch angetriebene turbomolekularvakuumpumpe
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
CN1115362A (zh) * 1994-07-06 1996-01-24 储继国 多拖动面分子泵
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
GB2333127A (en) * 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction

Also Published As

Publication number Publication date
EP1081387B1 (de) 2009-03-18
EP1081387A3 (de) 2002-04-17
DE19942410A1 (de) 2001-03-08
DE50015596D1 (de) 2009-04-30
EP1081387A2 (de) 2001-03-07
US6464451B1 (en) 2002-10-15
JP2001090690A (ja) 2001-04-03

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